FR2814855B1 - Jonction schottky a barriere stable sur carbure de silicium - Google Patents

Jonction schottky a barriere stable sur carbure de silicium

Info

Publication number
FR2814855B1
FR2814855B1 FR0012596A FR0012596A FR2814855B1 FR 2814855 B1 FR2814855 B1 FR 2814855B1 FR 0012596 A FR0012596 A FR 0012596A FR 0012596 A FR0012596 A FR 0012596A FR 2814855 B1 FR2814855 B1 FR 2814855B1
Authority
FR
France
Prior art keywords
silicon carbide
schottky junction
stable barrier
barrier
stable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0012596A
Other languages
English (en)
Other versions
FR2814855A1 (fr
Inventor
Dominique Defives
Olivier Noblanc
Emmanuel Collard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR0012596A priority Critical patent/FR2814855B1/fr
Publication of FR2814855A1 publication Critical patent/FR2814855A1/fr
Application granted granted Critical
Publication of FR2814855B1 publication Critical patent/FR2814855B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
    • H01L29/6606—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/47—Schottky barrier electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/861—Diodes
    • H01L29/872—Schottky diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
    • H01L29/1608—Silicon carbide

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrodes Of Semiconductors (AREA)
FR0012596A 2000-10-03 2000-10-03 Jonction schottky a barriere stable sur carbure de silicium Expired - Fee Related FR2814855B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0012596A FR2814855B1 (fr) 2000-10-03 2000-10-03 Jonction schottky a barriere stable sur carbure de silicium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0012596A FR2814855B1 (fr) 2000-10-03 2000-10-03 Jonction schottky a barriere stable sur carbure de silicium

Publications (2)

Publication Number Publication Date
FR2814855A1 FR2814855A1 (fr) 2002-04-05
FR2814855B1 true FR2814855B1 (fr) 2003-10-31

Family

ID=8854934

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0012596A Expired - Fee Related FR2814855B1 (fr) 2000-10-03 2000-10-03 Jonction schottky a barriere stable sur carbure de silicium

Country Status (1)

Country Link
FR (1) FR2814855B1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9331197B2 (en) 2013-08-08 2016-05-03 Cree, Inc. Vertical power transistor device
US10600903B2 (en) 2013-09-20 2020-03-24 Cree, Inc. Semiconductor device including a power transistor device and bypass diode
US20150084063A1 (en) * 2013-09-20 2015-03-26 Cree, Inc. Semiconductor device with a current spreading layer
US10868169B2 (en) 2013-09-20 2020-12-15 Cree, Inc. Monolithically integrated vertical power transistor and bypass diode
US9318597B2 (en) 2013-09-20 2016-04-19 Cree, Inc. Layout configurations for integrating schottky contacts into a power transistor device
US20240297258A1 (en) * 2023-03-01 2024-09-05 Kabushiki Kaisha Toshiba Semiconductor device and method for manufacturing semiconductor device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10256572A (ja) * 1997-03-11 1998-09-25 Mitsubishi Materials Corp サージ吸収素子

Also Published As

Publication number Publication date
FR2814855A1 (fr) 2002-04-05

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20070629