FR2767193B1 - Dispositif de detection de pression comportant un diaphragme metallique - Google Patents

Dispositif de detection de pression comportant un diaphragme metallique

Info

Publication number
FR2767193B1
FR2767193B1 FR9809492A FR9809492A FR2767193B1 FR 2767193 B1 FR2767193 B1 FR 2767193B1 FR 9809492 A FR9809492 A FR 9809492A FR 9809492 A FR9809492 A FR 9809492A FR 2767193 B1 FR2767193 B1 FR 2767193B1
Authority
FR
France
Prior art keywords
sensing device
pressure sensing
metal diaphragm
diaphragm
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9809492A
Other languages
English (en)
Other versions
FR2767193A1 (fr
Inventor
Yukihiko Tanizawa
Kazuaki Hamamoto
Inao Toyoda
Yasutoshi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of FR2767193A1 publication Critical patent/FR2767193A1/fr
Application granted granted Critical
Publication of FR2767193B1 publication Critical patent/FR2767193B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
FR9809492A 1997-07-25 1998-07-24 Dispositif de detection de pression comportant un diaphragme metallique Expired - Fee Related FR2767193B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19997297 1997-07-25
JP15791598A JP4161410B2 (ja) 1997-07-25 1998-06-05 圧力検出装置

Publications (2)

Publication Number Publication Date
FR2767193A1 FR2767193A1 (fr) 1999-02-12
FR2767193B1 true FR2767193B1 (fr) 2001-04-06

Family

ID=26485200

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9809492A Expired - Fee Related FR2767193B1 (fr) 1997-07-25 1998-07-24 Dispositif de detection de pression comportant un diaphragme metallique

Country Status (4)

Country Link
US (1) US6595065B2 (fr)
JP (1) JP4161410B2 (fr)
DE (1) DE19833712B8 (fr)
FR (1) FR2767193B1 (fr)

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JP2001343300A (ja) * 2000-06-05 2001-12-14 Denso Corp 圧力検出装置
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DE10134586A1 (de) * 2001-07-17 2003-02-06 Siemens Ag Sensoreinrichtung zum Erfassen einer Dehnungsbeanspruchung
DE10135806A1 (de) * 2001-07-23 2003-02-13 Zeiss Carl Spiegel zur Reflexion elektromagnetischer Strahlung und Beleuchtungs- bzw. Abbildungsverfahren unter Einsatz desselben
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JP2004279089A (ja) * 2003-03-13 2004-10-07 Denso Corp 半導体圧力センサ
JP2004279090A (ja) * 2003-03-13 2004-10-07 Denso Corp 半導体圧力センサの製造方法
JP4329478B2 (ja) * 2003-10-06 2009-09-09 株式会社日立製作所 力学量測定装置
JP4075776B2 (ja) * 2003-11-13 2008-04-16 株式会社デンソー 物理量センサおよび圧力センサ
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DE102005043687A1 (de) * 2005-09-14 2007-03-15 Robert Bosch Gmbh Sensoranordnung, insbesondere zur Druck- oder Kraftsensierung, und Verfahren zur Herstellung einer Sensoranordnung
US7260996B2 (en) * 2005-12-12 2007-08-28 Signal Electronic Co., Ltd. Pressure measuring apparatus and pressure sensor thereof
JP5186725B2 (ja) * 2006-03-15 2013-04-24 株式会社デンソー 圧力センサ
JP2008039760A (ja) * 2006-07-14 2008-02-21 Denso Corp 圧力センサ
DE102008000128B4 (de) * 2007-01-30 2013-01-03 Denso Corporation Halbleitersensorvorrichtung und deren Herstellungsverfahren
DE102010042536B4 (de) * 2010-10-15 2020-07-16 Ifm Electronic Gmbh Diagnosefähige resistive Druckmesszelle
US20130118264A1 (en) * 2010-08-30 2013-05-16 Ifm Electronic Gmbh Resistive pressure measuring cell having diagnostic capabilities
EP2605023B1 (fr) * 2011-12-16 2017-07-26 Arteche Lantegi Elkartea, S.A. Diviseur ohmique haute tension et connecteur comprenant ledit diviseur
JP5870837B2 (ja) * 2012-05-10 2016-03-01 株式会社日本自動車部品総合研究所 圧力センサおよびその製造方法
JP5883771B2 (ja) 2012-11-26 2016-03-15 日立オートモティブシステムズ株式会社 圧力センサ
US9250146B2 (en) * 2013-02-12 2016-02-02 Western New England University Multidimensional strain gage
US9146164B2 (en) * 2013-03-07 2015-09-29 Sensata Technologies, Inc. Pressure transducer substrate with self alignment feature
JP5975970B2 (ja) 2013-11-20 2016-08-23 日立オートモティブシステムズ株式会社 圧力センサ
JP6154488B2 (ja) * 2013-12-25 2017-06-28 日立オートモティブシステムズ株式会社 圧力測定装置
CN103968995B (zh) * 2014-03-21 2016-03-30 佛山市天赢橡塑电器有限公司 基于弹性测压的流体压力传感器
JP2015224903A (ja) * 2014-05-26 2015-12-14 株式会社東芝 圧力センサ、マイクロフォン、超音波センサ、血圧センサ及びタッチパネル
JP2016111086A (ja) * 2014-12-03 2016-06-20 株式会社デンソー 半導体装置
JP6285889B2 (ja) * 2015-04-22 2018-02-28 株式会社豊田中央研究所 力検知装置
CN107290099B (zh) 2016-04-11 2021-06-08 森萨塔科技公司 压力传感器、用于压力传感器的插塞件和制造插塞件的方法
EP3236226B1 (fr) 2016-04-20 2019-07-24 Sensata Technologies, Inc. Procédé de fabrication d'un capteur de pression
JP6663314B2 (ja) * 2016-07-08 2020-03-11 アズビル株式会社 圧力センサ
GB2552025B (en) 2016-07-08 2020-08-12 Sovex Ltd Boom conveyor
US20180180494A1 (en) * 2016-12-22 2018-06-28 Honeywell International Inc. High Sensitivity Silicon Piezoresistor Force Sensor
US10352792B2 (en) * 2017-02-15 2019-07-16 Texas Instruments Incorporated Device and method for on-chip mechanical stress sensing
US10545064B2 (en) 2017-05-04 2020-01-28 Sensata Technologies, Inc. Integrated pressure and temperature sensor
US10323998B2 (en) 2017-06-30 2019-06-18 Sensata Technologies, Inc. Fluid pressure sensor
US10724907B2 (en) 2017-07-12 2020-07-28 Sensata Technologies, Inc. Pressure sensor element with glass barrier material configured for increased capacitive response
US10557770B2 (en) 2017-09-14 2020-02-11 Sensata Technologies, Inc. Pressure sensor with improved strain gauge
DE102019129411A1 (de) * 2019-09-12 2021-03-18 Wika Alexander Wiegand Se & Co. Kg Aufnehmerkörper mit einem Messelement und Herstellungsverfahren für einen Aufnehmerkörper
US20220026290A1 (en) * 2020-07-27 2022-01-27 Tronics MEMS, Inc. Electronic force and pressure sensor devices having flexible layers

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Also Published As

Publication number Publication date
JPH1194666A (ja) 1999-04-09
US20010039837A1 (en) 2001-11-15
DE19833712B4 (de) 2012-11-15
DE19833712B8 (de) 2013-01-31
FR2767193A1 (fr) 1999-02-12
JP4161410B2 (ja) 2008-10-08
DE19833712A1 (de) 1999-01-28
US6595065B2 (en) 2003-07-22

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Effective date: 20160331