FR2744799B1 - Appareil de controle de cassettes de transport de plaquettes de semiconducteur - Google Patents

Appareil de controle de cassettes de transport de plaquettes de semiconducteur

Info

Publication number
FR2744799B1
FR2744799B1 FR9601765A FR9601765A FR2744799B1 FR 2744799 B1 FR2744799 B1 FR 2744799B1 FR 9601765 A FR9601765 A FR 9601765A FR 9601765 A FR9601765 A FR 9601765A FR 2744799 B1 FR2744799 B1 FR 2744799B1
Authority
FR
France
Prior art keywords
control device
semiconductor wafer
wafer transport
cassette control
transport cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9601765A
Other languages
English (en)
Other versions
FR2744799A1 (fr
Inventor
Andre Rochet
Pascal Decamps
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
SGS Thomson Microelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SGS Thomson Microelectronics SA filed Critical SGS Thomson Microelectronics SA
Priority to FR9601765A priority Critical patent/FR2744799B1/fr
Priority to US08/796,178 priority patent/US5929766A/en
Publication of FR2744799A1 publication Critical patent/FR2744799A1/fr
Application granted granted Critical
Publication of FR2744799B1 publication Critical patent/FR2744799B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
FR9601765A 1996-02-08 1996-02-08 Appareil de controle de cassettes de transport de plaquettes de semiconducteur Expired - Fee Related FR2744799B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9601765A FR2744799B1 (fr) 1996-02-08 1996-02-08 Appareil de controle de cassettes de transport de plaquettes de semiconducteur
US08/796,178 US5929766A (en) 1996-02-08 1997-02-07 Device for controlling semiconductor wafer transport cassettes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9601765A FR2744799B1 (fr) 1996-02-08 1996-02-08 Appareil de controle de cassettes de transport de plaquettes de semiconducteur

Publications (2)

Publication Number Publication Date
FR2744799A1 FR2744799A1 (fr) 1997-08-14
FR2744799B1 true FR2744799B1 (fr) 1998-04-30

Family

ID=9489149

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9601765A Expired - Fee Related FR2744799B1 (fr) 1996-02-08 1996-02-08 Appareil de controle de cassettes de transport de plaquettes de semiconducteur

Country Status (2)

Country Link
US (1) US5929766A (fr)
FR (1) FR2744799B1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4469462B2 (ja) * 2000-05-25 2010-05-26 株式会社ニコン キャリア形状測定機
US7112812B2 (en) * 2001-12-28 2006-09-26 Applied Materials, Inc. Optical measurement apparatus
JP4001555B2 (ja) * 2003-02-04 2007-10-31 沖電気工業株式会社 ウエハハンドリングチェッカー
US7169018B2 (en) * 2005-05-04 2007-01-30 Micrel, Incorporated Wafer carrier checker and method of using same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4776744A (en) * 1985-09-09 1988-10-11 Applied Materials, Inc. Systems and methods for wafer handling in semiconductor process equipment
US4836733A (en) * 1986-04-28 1989-06-06 Varian Associates, Inc. Wafer transfer system
US4907931A (en) * 1988-05-18 1990-03-13 Prometrix Corporation Apparatus for handling semiconductor wafers
JPH01303734A (ja) * 1988-06-01 1989-12-07 Oki Electric Ind Co Ltd ウエハキャリヤの良否判別装置
FR2644237B1 (fr) * 1989-03-07 1991-06-14 Doeuvre Jean Pierre Appareil automatique de controle dimensionnel de nacelles porte-plaquettes
JPH0475361A (ja) * 1990-07-18 1992-03-10 Canon Inc ウエハカセット検出装置
JP2957288B2 (ja) * 1991-02-04 1999-10-04 松下電子工業株式会社 半導体ウェハ用カセットの検査方法及びその装置並びに半導体ウェハ用カセットの洗浄装置
JPH04256333A (ja) * 1991-02-08 1992-09-11 Nec Yamaguchi Ltd ウェーハカセット歪み検査装置
US5291025A (en) * 1992-11-30 1994-03-01 Advanced Micro Devices, Inc. In-line non-contact wafer boat inspection apparatus
US5485759A (en) * 1994-04-28 1996-01-23 Advanced Micro Devices, Inc. Boat test apparatus

Also Published As

Publication number Publication date
US5929766A (en) 1999-07-27
FR2744799A1 (fr) 1997-08-14

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20071030