FR2726820B1 - Creuset de quartz dont la paroi a une teneur en bulles reduite, procede de fabrication et procede d'utilisation de ce creuset - Google Patents

Creuset de quartz dont la paroi a une teneur en bulles reduite, procede de fabrication et procede d'utilisation de ce creuset

Info

Publication number
FR2726820B1
FR2726820B1 FR9513453A FR9513453A FR2726820B1 FR 2726820 B1 FR2726820 B1 FR 2726820B1 FR 9513453 A FR9513453 A FR 9513453A FR 9513453 A FR9513453 A FR 9513453A FR 2726820 B1 FR2726820 B1 FR 2726820B1
Authority
FR
France
Prior art keywords
crucible
manufacturing
bubble content
reduced bubble
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9513453A
Other languages
English (en)
Other versions
FR2726820A1 (fr
Inventor
Robert Duncan Shelley
Victor Lien Kong Lou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of FR2726820A1 publication Critical patent/FR2726820A1/fr
Application granted granted Critical
Publication of FR2726820B1 publication Critical patent/FR2726820B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
FR9513453A 1994-11-15 1995-11-14 Creuset de quartz dont la paroi a une teneur en bulles reduite, procede de fabrication et procede d'utilisation de ce creuset Expired - Fee Related FR2726820B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US33953994A 1994-11-15 1994-11-15

Publications (2)

Publication Number Publication Date
FR2726820A1 FR2726820A1 (fr) 1996-05-15
FR2726820B1 true FR2726820B1 (fr) 1997-12-12

Family

ID=23329498

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9513453A Expired - Fee Related FR2726820B1 (fr) 1994-11-15 1995-11-14 Creuset de quartz dont la paroi a une teneur en bulles reduite, procede de fabrication et procede d'utilisation de ce creuset

Country Status (4)

Country Link
US (1) US20020166341A1 (fr)
JP (1) JPH08268727A (fr)
DE (1) DE19541372A1 (fr)
FR (1) FR2726820B1 (fr)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5913975A (en) * 1998-02-03 1999-06-22 Memc Electronic Materials, Inc. Crucible and method of preparation thereof
JP4454059B2 (ja) * 1999-01-29 2010-04-21 信越石英株式会社 シリコン単結晶引き上げ用大口径石英ガラスるつぼ
KR100383796B1 (ko) * 1999-04-06 2003-05-14 가부시키가이샤 난와쿼츠 석영유리도가니의 제조방법
JP4548682B2 (ja) * 1999-04-06 2010-09-22 株式会社ワコム製作所 石英ガラスるつぼの製造方法
US6510707B2 (en) * 2001-03-15 2003-01-28 Heraeus Shin-Etsu America, Inc. Methods for making silica crucibles
JP4841764B2 (ja) * 2001-07-23 2011-12-21 信越石英株式会社 シリコン単結晶引上げ用石英ガラスるつぼの製造方法及び装置
JP4117641B2 (ja) * 2001-11-26 2008-07-16 ジャパンスーパークォーツ株式会社 合成石英粉の処理方法およびその石英ガラス製品
US20030226376A1 (en) * 2002-06-10 2003-12-11 General Electric Company Fabrication of heavy walled silica tubing
FR2858611B1 (fr) * 2003-08-07 2006-11-24 Saint Gobain Ct Recherches Procede de fabrication d'une piece en silice amorphe frittee, moule et barbotine mis en oeuvre dans ce procede
US20050120945A1 (en) * 2003-12-03 2005-06-09 General Electric Company Quartz crucibles having reduced bubble content and method of making thereof
JP4789437B2 (ja) * 2004-07-16 2011-10-12 信越石英株式会社 シリコン単結晶引上げ用石英ガラスるつぼおよびその製造方法
JP4671999B2 (ja) * 2007-11-30 2011-04-20 ジャパンスーパークォーツ株式会社 石英ガラスルツボの試験方法
JP4986921B2 (ja) * 2008-04-30 2012-07-25 ジャパンスーパークォーツ株式会社 ルツボリフト装置
DE102008026890B3 (de) * 2008-06-05 2009-06-04 Heraeus Quarzglas Gmbh & Co. Kg Verfahren und Vorrichtung zur Herstellung eines Tiegels aus Quarzglas
CN101618941B (zh) * 2008-07-04 2012-04-11 日本超精石英株式会社 石英玻璃坩埚的制造方法、石英玻璃坩埚以及石英玻璃坩埚的制造装置
TWI410534B (zh) * 2008-07-10 2013-10-01 Japan Super Quartz Corp 石英玻璃坩堝及使用其之矽單晶拉提方法
DE102008033945B4 (de) * 2008-07-19 2012-03-08 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von mit Stickstoff dotiertem Quarzglas sowie zur Durchführung des Verfahrens geeignete Quarzglaskörnung, Verfahren zur Herstellung eines Quarzglasstrangs und Verfahren zur Herstellung eines Quarzglastiegels
JP5377930B2 (ja) * 2008-10-31 2013-12-25 株式会社Ｓｕｍｃｏ シリコン単結晶引上用石英ガラスルツボの製造方法
US8272234B2 (en) 2008-12-19 2012-09-25 Heraeus Shin-Etsu America, Inc. Silica crucible with pure and bubble free inner crucible layer and method of making the same
JP4922355B2 (ja) * 2009-07-15 2012-04-25 信越石英株式会社 シリカ容器及びその製造方法
US9003832B2 (en) 2009-11-20 2015-04-14 Heraeus Shin-Etsu America, Inc. Method of making a silica crucible in a controlled atmosphere
JP4951057B2 (ja) 2009-12-10 2012-06-13 信越石英株式会社 シリカ容器及びその製造方法
US9216923B2 (en) * 2011-07-25 2015-12-22 Shin-Etsu Quartz Products Co., Ltd. Metal and graphite mold and method of making a crucible
CN102557693B (zh) * 2012-03-06 2013-10-09 江苏有能光电科技有限公司 一种制备坩埚的复合材料及其用途
CN115636663B (zh) * 2022-10-20 2023-05-16 无锡市尚领石英科技有限公司 高强度高致密性石英坩埚的制备工艺
CN117756383B (zh) * 2023-12-26 2024-07-09 廊坊赫尔劳斯太阳能光伏有限公司 大尺寸石英坩埚自动加工设备
CN118184115B (zh) * 2024-05-15 2024-08-02 浙江美晶新材料股份有限公司 一种低微气泡半导体级合成石英坩埚及其制备方法及单晶硅生长方法
CN118307182B (zh) * 2024-06-11 2024-08-06 浙江美晶新材料股份有限公司 一种半导体级合成石英坩埚及其制备方法和半导体级单晶硅生长方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1211766B (de) * 1962-06-25 1966-03-03 Patra Patent Treuhand Herstellung von blasenarmem Quarzrohr
DE3014311C2 (de) * 1980-04-15 1982-06-16 Heraeus Quarzschmelze Gmbh, 6450 Hanau Verfahren zur Herstellung von Quarzglastiegeln und Vorrichtung zur Durchführung dieses Verfahrens
JPS59152237A (ja) * 1983-02-18 1984-08-30 Hoya Corp ガラス体の製造法
US4632686A (en) * 1986-02-24 1986-12-30 Gte Products Corporation Method of manufacturing quartz glass crucibles with low bubble content
US4713104A (en) * 1986-03-31 1987-12-15 Gte Products Corporation Quartz glass crucibles

Also Published As

Publication number Publication date
US20020166341A1 (en) 2002-11-14
JPH08268727A (ja) 1996-10-15
DE19541372A1 (de) 1996-05-23
FR2726820A1 (fr) 1996-05-15

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Legal Events

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ST Notification of lapse