FR2704240B1 - Installation de revêtement sous vide. - Google Patents

Installation de revêtement sous vide.

Info

Publication number
FR2704240B1
FR2704240B1 FR9404790A FR9404790A FR2704240B1 FR 2704240 B1 FR2704240 B1 FR 2704240B1 FR 9404790 A FR9404790 A FR 9404790A FR 9404790 A FR9404790 A FR 9404790A FR 2704240 B1 FR2704240 B1 FR 2704240B1
Authority
FR
France
Prior art keywords
vacuum coating
coating installation
installation
vacuum
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9404790A
Other languages
English (en)
Other versions
FR2704240A1 (fr
Inventor
Gunter Brauer
Ulrich Patz
Michael Scherer
Joachim Szczyrbowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of FR2704240A1 publication Critical patent/FR2704240A1/fr
Application granted granted Critical
Publication of FR2704240B1 publication Critical patent/FR2704240B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
FR9404790A 1993-04-23 1994-04-21 Installation de revêtement sous vide. Expired - Fee Related FR2704240B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4313353A DE4313353C2 (de) 1993-04-23 1993-04-23 Vakuum-Beschichtungsanlage

Publications (2)

Publication Number Publication Date
FR2704240A1 FR2704240A1 (fr) 1994-10-28
FR2704240B1 true FR2704240B1 (fr) 1998-02-20

Family

ID=6486228

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9404790A Expired - Fee Related FR2704240B1 (fr) 1993-04-23 1994-04-21 Installation de revêtement sous vide.

Country Status (5)

Country Link
US (1) US5372693A (fr)
JP (1) JPH06346235A (fr)
DE (1) DE4313353C2 (fr)
FR (1) FR2704240B1 (fr)
IT (1) IT1269524B (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4341635C2 (de) * 1993-12-07 2002-07-18 Unaxis Deutschland Holding Vakuumbeschichtungsanlage
US5908565A (en) * 1995-02-03 1999-06-01 Sharp Kabushiki Kaisha Line plasma vapor phase deposition apparatus and method
US5812405A (en) * 1995-05-23 1998-09-22 Viratec Thin Films, Inc. Three variable optimization system for thin film coating design
KR100318724B1 (ko) * 1996-04-18 2002-04-22 니시무로 타이죠 음극선관의제조방법및그장치
US6103069A (en) * 1997-03-31 2000-08-15 Applied Materials, Inc. Chamber design with isolation valve to preserve vacuum during maintenance
IT1298891B1 (it) * 1998-02-06 2000-02-07 Ca Te V Centro Tecnologie Del Impianto da vuoto portatile provvisto di precamera per la deposizione di film sottili su superfici anche inamovibili.
DE10247888A1 (de) * 2002-10-14 2004-04-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Einrichtung zur Erzeugung von Plasmen durch Hochfrequenzentladungen
US20060260938A1 (en) * 2005-05-20 2006-11-23 Petrach Philip M Module for Coating System and Associated Technology
US9644260B1 (en) * 2012-03-16 2017-05-09 Oliver James Groves Portable sputtering apparatus and method
DE102014004323B4 (de) 2014-03-25 2021-11-11 Gottfried Wilhelm Leibniz Universität Hannover Beschichtungseinrichtung zum zumindest teilweisen Beschichten einer Oberfläche

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LU43878A1 (fr) * 1963-06-10 1964-12-10
JPS57134559A (en) * 1981-02-12 1982-08-19 Toyota Central Res & Dev Lab Inc Physical vapor deposition device
US4416759A (en) * 1981-11-27 1983-11-22 Varian Associates, Inc. Sputter system incorporating an improved blocking shield for contouring the thickness of sputter coated layers
US4450062A (en) * 1981-12-22 1984-05-22 Raytheon Company Sputtering apparatus and methods
JPS63270457A (ja) * 1987-04-24 1988-11-08 Matsushita Electric Ind Co Ltd 薄膜形成装置
JPH0791645B2 (ja) * 1989-04-28 1995-10-04 株式会社日立製作所 薄膜形成装置
DE69105941T2 (de) * 1991-01-25 1995-05-04 Shibaura Eng Works Ltd Zerstäubungsvorrichtung.

Also Published As

Publication number Publication date
ITMI940442A1 (it) 1995-09-10
US5372693A (en) 1994-12-13
ITMI940442A0 (it) 1994-03-10
IT1269524B (it) 1997-04-08
DE4313353A1 (de) 1994-10-27
DE4313353C2 (de) 1997-08-28
FR2704240A1 (fr) 1994-10-28
JPH06346235A (ja) 1994-12-20

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Legal Events

Date Code Title Description
CD Change of name or company name
ST Notification of lapse