FR2698211B1 - Procédé de fabrication avec encapsulation, d'un capteur de type ISFET et capteur en faisant application. - Google Patents
Procédé de fabrication avec encapsulation, d'un capteur de type ISFET et capteur en faisant application.Info
- Publication number
- FR2698211B1 FR2698211B1 FR9213872A FR9213872A FR2698211B1 FR 2698211 B1 FR2698211 B1 FR 2698211B1 FR 9213872 A FR9213872 A FR 9213872A FR 9213872 A FR9213872 A FR 9213872A FR 2698211 B1 FR2698211 B1 FR 2698211B1
- Authority
- FR
- France
- Prior art keywords
- sensor
- encapsulation
- manufacturing
- isfet type
- type sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Molecular Biology (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9213872A FR2698211B1 (fr) | 1992-11-13 | 1992-11-13 | Procédé de fabrication avec encapsulation, d'un capteur de type ISFET et capteur en faisant application. |
PCT/FR1993/001116 WO1994011729A1 (fr) | 1992-11-13 | 1993-11-15 | Procede de fabrication avec encapsulation, d'un capteur de type isfet et capteur en faisant application |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9213872A FR2698211B1 (fr) | 1992-11-13 | 1992-11-13 | Procédé de fabrication avec encapsulation, d'un capteur de type ISFET et capteur en faisant application. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2698211A1 FR2698211A1 (fr) | 1994-05-20 |
FR2698211B1 true FR2698211B1 (fr) | 1995-02-03 |
Family
ID=9435664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9213872A Expired - Fee Related FR2698211B1 (fr) | 1992-11-13 | 1992-11-13 | Procédé de fabrication avec encapsulation, d'un capteur de type ISFET et capteur en faisant application. |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR2698211B1 (fr) |
WO (1) | WO1994011729A1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2805826B1 (fr) * | 2000-03-01 | 2002-09-20 | Nucleica | Nouvelles puces a adn |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60202347A (ja) * | 1984-03-27 | 1985-10-12 | Sumitomo Electric Ind Ltd | 電界効果型半導体センサ |
FR2591389B1 (fr) * | 1985-12-05 | 1988-08-12 | Elf Aquitaine | Transistor a effet de champ selectif aux ions et procede de fabrication |
-
1992
- 1992-11-13 FR FR9213872A patent/FR2698211B1/fr not_active Expired - Fee Related
-
1993
- 1993-11-15 WO PCT/FR1993/001116 patent/WO1994011729A1/fr active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO1994011729A1 (fr) | 1994-05-26 |
FR2698211A1 (fr) | 1994-05-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse | ||
ST | Notification of lapse |