FR2631258B1 - Procede de nettoyage en surface par plasma differe - Google Patents

Procede de nettoyage en surface par plasma differe

Info

Publication number
FR2631258B1
FR2631258B1 FR8806607A FR8806607A FR2631258B1 FR 2631258 B1 FR2631258 B1 FR 2631258B1 FR 8806607 A FR8806607 A FR 8806607A FR 8806607 A FR8806607 A FR 8806607A FR 2631258 B1 FR2631258 B1 FR 2631258B1
Authority
FR
France
Prior art keywords
cleaning process
surface cleaning
plasma surface
delayed plasma
delayed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR8806607A
Other languages
English (en)
Other versions
FR2631258A1 (fr
Inventor
Odile Dessaux
Brigitte Mutel
Daniel Szurminski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PRESTATIONS SERVICES SPS
Original Assignee
PRESTATIONS SERVICES SPS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PRESTATIONS SERVICES SPS filed Critical PRESTATIONS SERVICES SPS
Priority to FR8806607A priority Critical patent/FR2631258B1/fr
Priority to NO891827A priority patent/NO173921C/no
Priority to JP1113871A priority patent/JPH0252084A/ja
Priority to DK226989A priority patent/DK226989A/da
Priority to CN89103142A priority patent/CN1038036A/zh
Priority to ZA893473A priority patent/ZA893473B/xx
Priority to EP89401297A priority patent/EP0343038A1/fr
Publication of FR2631258A1 publication Critical patent/FR2631258A1/fr
Application granted granted Critical
Publication of FR2631258B1 publication Critical patent/FR2631258B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Optics & Photonics (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Cleaning In General (AREA)
  • Detergent Compositions (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
FR8806607A 1988-05-10 1988-05-10 Procede de nettoyage en surface par plasma differe Expired - Lifetime FR2631258B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR8806607A FR2631258B1 (fr) 1988-05-10 1988-05-10 Procede de nettoyage en surface par plasma differe
NO891827A NO173921C (no) 1988-05-10 1989-05-03 Fremgangsmaate til rengjoering av en gjenstands overflate
JP1113871A JPH0252084A (ja) 1988-05-10 1989-05-08 アフターグロープラズマによる表面浄化方法
DK226989A DK226989A (da) 1988-05-10 1989-05-09 Fremgangsmaade til plasma-rensning af overflader
CN89103142A CN1038036A (zh) 1988-05-10 1989-05-10 用余辉等离子体清洗表面的方法
ZA893473A ZA893473B (en) 1988-05-10 1989-05-10 Surface cleaning process by afterglow plasma
EP89401297A EP0343038A1 (fr) 1988-05-10 1989-05-10 Procédé de nettoyage en surface par plasma différé

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8806607A FR2631258B1 (fr) 1988-05-10 1988-05-10 Procede de nettoyage en surface par plasma differe

Publications (2)

Publication Number Publication Date
FR2631258A1 FR2631258A1 (fr) 1989-11-17
FR2631258B1 true FR2631258B1 (fr) 1991-04-05

Family

ID=9366376

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8806607A Expired - Lifetime FR2631258B1 (fr) 1988-05-10 1988-05-10 Procede de nettoyage en surface par plasma differe

Country Status (7)

Country Link
EP (1) EP0343038A1 (fr)
JP (1) JPH0252084A (fr)
CN (1) CN1038036A (fr)
DK (1) DK226989A (fr)
FR (1) FR2631258B1 (fr)
NO (1) NO173921C (fr)
ZA (1) ZA893473B (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06285868A (ja) * 1993-03-30 1994-10-11 Bridgestone Corp 加硫金型の清浄方法
US5938854A (en) * 1993-05-28 1999-08-17 The University Of Tennessee Research Corporation Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure
FR2733437B1 (fr) * 1995-04-27 1997-09-12 Aubert Bruno Procede de separation d'elements chimiques par formation de composes volatils avec un gaz excite dans un plasma froid et dispositif de mise en oeuvre
FR2750348B1 (fr) * 1996-06-28 1998-08-21 Conte Procede pour augmenter l'anti-mouillabilite d'un corps, corps ainsi traite et ses applications
US6125859A (en) * 1997-03-05 2000-10-03 Applied Materials, Inc. Method for improved cleaning of substrate processing systems
US6274058B1 (en) 1997-07-11 2001-08-14 Applied Materials, Inc. Remote plasma cleaning method for processing chambers
US6673262B1 (en) 1997-12-18 2004-01-06 Central Glass Company, Limited Gas for removing deposit and removal method using same
EP1194032A1 (fr) 1999-06-24 2002-04-10 Wisconsin Alumni Research Foundation Traitement au plasma froid de cristaux germes permettant d'eliminer les matieres de surface
JP2005036250A (ja) * 2003-07-16 2005-02-10 Matsushita Electric Ind Co Ltd スパッタ装置
US20110108058A1 (en) * 2009-11-11 2011-05-12 Axcelis Technologies, Inc. Method and apparatus for cleaning residue from an ion source component
CN101837357B (zh) * 2010-05-04 2011-10-05 宁波大学 一种等离子体清洗装置
JP2012152855A (ja) * 2011-01-26 2012-08-16 Osg Corp ダイヤモンド被膜または硬質炭素被膜の脱膜方法
CN104148334A (zh) * 2014-07-02 2014-11-19 太仓华德石太工业设备有限公司 一种针对工业局部清洁的碳氢化合物/等离子体的清洁方法
CN104353643B (zh) * 2014-12-02 2017-07-25 上海华虹宏力半导体制造有限公司 一种减小超声波清洗器的维护系统及维护方法
DE102020131832A1 (de) 2020-12-01 2022-06-02 Universität Kassel, Körperschaft des öffentlichen Rechts Verfahren zur Herstellung von Gussformen oder Gusskernen

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2647088B2 (de) * 1976-10-19 1979-04-05 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Verfahren und Vorrichtung zum Reinigen von Oberflächen
US4555303A (en) * 1984-10-02 1985-11-26 Motorola, Inc. Oxidation of material in high pressure oxygen plasma
DE3682063D1 (de) * 1985-10-29 1991-11-21 Hughes Aircraft Co Verfahren und vorrichtung fuer bestrahlung mit atomischem strahl.

Also Published As

Publication number Publication date
NO173921B (no) 1993-11-15
FR2631258A1 (fr) 1989-11-17
NO173921C (no) 1994-02-23
DK226989D0 (da) 1989-05-09
DK226989A (da) 1989-11-11
JPH0252084A (ja) 1990-02-21
NO891827L (no) 1989-11-13
CN1038036A (zh) 1989-12-20
ZA893473B (en) 1990-01-31
EP0343038A1 (fr) 1989-11-23
NO891827D0 (no) 1989-05-03

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