AU554813B2 - Pulsed plasma surface treatment - Google Patents

Pulsed plasma surface treatment

Info

Publication number
AU554813B2
AU554813B2 AU88154/82A AU8815482A AU554813B2 AU 554813 B2 AU554813 B2 AU 554813B2 AU 88154/82 A AU88154/82 A AU 88154/82A AU 8815482 A AU8815482 A AU 8815482A AU 554813 B2 AU554813 B2 AU 554813B2
Authority
AU
Australia
Prior art keywords
surface treatment
plasma surface
pulsed plasma
pulsed
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU88154/82A
Other versions
AU8815482A (en
Inventor
Michael Joseph Cooke
Rudolf August Herbert Heinecke
Sureshchandra Mishrilal Ojha
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nortel Networks Corp
Original Assignee
International Standard Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Standard Electric Corp filed Critical International Standard Electric Corp
Publication of AU8815482A publication Critical patent/AU8815482A/en
Application granted granted Critical
Publication of AU554813B2 publication Critical patent/AU554813B2/en
Assigned to NORTHERN TELECOM LIMITED reassignment NORTHERN TELECOM LIMITED Alteration of Name(s) in Register under S187 Assignors: STC PLC
Assigned to NORTEL NETWORKS CORPORATION reassignment NORTEL NETWORKS CORPORATION Request to Amend Deed and Register Assignors: NORTHERN TELECOM LIMITED
Anticipated expiration legal-status Critical
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12—Chemical modification
    • C08J7/123—Treatment by wave energy or particle radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
    • B05B7/22—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc
    • B05B7/222—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc using an arc
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/029—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/30—Vehicles, e.g. ships or aircraft, or body parts thereof
AU88154/82A 1981-09-15 1982-09-09 Pulsed plasma surface treatment Expired AU554813B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8127798 1981-09-15
GB08127798A GB2105729B (en) 1981-09-15 1981-09-15 Surface processing of a substrate material

Publications (2)

Publication Number Publication Date
AU8815482A AU8815482A (en) 1983-03-24
AU554813B2 true AU554813B2 (en) 1986-09-04

Family

ID=10524509

Family Applications (1)

Application Number Title Priority Date Filing Date
AU88154/82A Expired AU554813B2 (en) 1981-09-15 1982-09-09 Pulsed plasma surface treatment

Country Status (3)

Country Link
AU (1) AU554813B2 (en)
GB (1) GB2105729B (en)
NZ (1) NZ201906A (en)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2144343A (en) * 1983-08-02 1985-03-06 Standard Telephones Cables Ltd Optical fibre manufacture
DE3577730D1 (en) * 1984-03-03 1990-06-21 Stc Plc COATING PROCESS.
GB2155024A (en) * 1984-03-03 1985-09-18 Standard Telephones Cables Ltd Surface treatment of plastics materials
EP0154483B1 (en) * 1984-03-03 1989-12-27 Stc Plc Improved pulsed plasma process
US4749589A (en) * 1984-12-13 1988-06-07 Stc Plc Method of surface treatment
GB8431422D0 (en) * 1984-12-13 1985-01-23 Standard Telephones Cables Ltd Plasma reactor vessel
GB8516537D0 (en) * 1985-06-29 1985-07-31 Standard Telephones Cables Ltd Pulsed plasma apparatus
GB2208656B (en) * 1985-06-29 1990-01-17 Stc Plc Pulsed radio frequency plasma apparatus and process
NZ218128A (en) * 1985-11-01 1990-04-26 Biotech Australia Pty Ltd Etched substrate having improved binding capacity
US4985112A (en) * 1987-02-09 1991-01-15 International Business Machines Corporation Enhanced plasma etching
FR2612204A1 (en) * 1987-03-12 1988-09-16 Vac Tec Syst METHOD AND APPARATUS FOR VACUUM ELECTRIC ARC PLASMA DEPOSITION OF DECORATIVE COATINGS AND WEAR RESISTANT COATINGS
FR2637607B1 (en) * 1988-10-07 1994-06-03 Cibie Projecteurs PROCESS FOR MAKING ABRASION RESISTANT PLASTIC ICE AND PLASTIC ABRASION RESISTANT ICE
DE3841730C2 (en) * 1988-12-10 1997-06-19 Widia Gmbh Process for coating a metallic base body with a non-conductive coating material
IT1229221B (en) * 1989-03-31 1991-07-26 Tecnopart Srl ARTICLES FORMED OF POLYMERIC MATERIAL HAVING IMPROVED WETNESS AND ADHESIVITY AND PROCESS FOR THEIR PRODUCTION.
GB9010000D0 (en) * 1990-05-03 1990-06-27 Stc Plc Phosphide films
KR930011413B1 (en) 1990-09-25 1993-12-06 가부시키가이샤 한도오따이 에네루기 겐큐쇼 Plasma cvd method for using pulsed waveform
US5389195A (en) * 1991-03-07 1995-02-14 Minnesota Mining And Manufacturing Company Surface modification by accelerated plasma or ions
EP0502634B1 (en) * 1991-03-07 1997-04-09 Minnesota Mining And Manufacturing Company A polymer with crosslinked surface zones
ES2091388T3 (en) * 1991-12-23 1996-11-01 Balzers Hochvakuum PROCEDURE FOR THE TREATMENT WITH PLASMA OF A ONE-PIECE SURFACE, VACUUM TREATMENT INSTALLATION FOR ITS PERFORMANCE AND USE OF THE PROCEDURE OR OF THE INSTALLATION AND PART OF VARNISHED PLASTIC, PREVIOUSLY TREATED WITH PLASMA.
US5405808A (en) * 1993-08-16 1995-04-11 Lsi Logic Corporation Fluid-filled and gas-filled semiconductor packages
EP0653501B1 (en) * 1993-11-11 1998-02-04 Nissin Electric Company, Limited Plasma-CVD method and apparatus
US6794301B2 (en) 1995-10-13 2004-09-21 Mattson Technology, Inc. Pulsed plasma processing of semiconductor substrates
US6253704B1 (en) 1995-10-13 2001-07-03 Mattson Technology, Inc. Apparatus and method for pulsed plasma processing of a semiconductor substrate
US5983828A (en) * 1995-10-13 1999-11-16 Mattson Technology, Inc. Apparatus and method for pulsed plasma processing of a semiconductor substrate
GB9712338D0 (en) 1997-06-14 1997-08-13 Secr Defence Surface coatings
JPH1180975A (en) * 1997-09-04 1999-03-26 Speedfam Co Ltd Corrosion resistance system of plasma etching apparatus and method therefor
DE69942020D1 (en) 1998-12-11 2010-04-01 Surface Technology Systems Plc PLASMA TREATMENT DEVICE
DE10029905A1 (en) * 2000-06-17 2002-01-03 Schott Auer Gmbh Reflector, in particular for use in a motor vehicle
DE10044841B4 (en) * 2000-09-11 2006-11-30 Osram Opto Semiconductors Gmbh Plasma encapsulation for electronic and microelectronic components such as OLEDs and method for its production
GB0406049D0 (en) 2004-03-18 2004-04-21 Secr Defence Surface coatings
DE102006012302A1 (en) 2006-03-15 2007-09-27 Seaquist Perfect Dispensing Gmbh dispenser
WO2007131790A2 (en) 2006-05-16 2007-11-22 Seaquist Perfect Dispensing Gmbh Dispensing device
DE102006027042A1 (en) 2006-06-08 2007-12-13 Seaquist Perfect Dispensing Gmbh dispenser
DE202007012331U1 (en) 2006-09-07 2007-11-15 Seaquist Perfect Dispensing Gmbh dispenser
DE102007049614B4 (en) 2007-03-15 2015-03-05 Aptar Dortmund Gmbh dispenser
ES2436002T3 (en) 2008-06-20 2013-12-26 Aptar Dortmund Gmbh Distribution device
US8286839B2 (en) 2008-08-12 2012-10-16 Aptar Dortmund Gmbh Dispensing device
DE102008038654B4 (en) 2008-08-12 2019-09-19 Aptar Dortmund Gmbh Dispensing head with swiveling valve element
DE102009030627B4 (en) 2009-06-25 2020-03-12 Aptar Dortmund Gmbh Valve and dispenser

Also Published As

Publication number Publication date
AU8815482A (en) 1983-03-24
GB2105729A (en) 1983-03-30
NZ201906A (en) 1985-12-13
GB2105729B (en) 1985-06-12

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Legal Events

Date Code Title Description
HB Alteration of name in register

Free format text: NORTEL NETWORKS CORPORATION

MK14 Patent ceased section 143(a) (annual fees not paid) or expired