AU548694B2 - Plasma treatment - Google Patents

Plasma treatment

Info

Publication number
AU548694B2
AU548694B2 AU24673/84A AU2467384A AU548694B2 AU 548694 B2 AU548694 B2 AU 548694B2 AU 24673/84 A AU24673/84 A AU 24673/84A AU 2467384 A AU2467384 A AU 2467384A AU 548694 B2 AU548694 B2 AU 548694B2
Authority
AU
Australia
Prior art keywords
plasma treatment
plasma
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU24673/84A
Other versions
AU2467384A (en
Inventor
Kenji Fukuta
Takaoki Kaneko
Yoshinobu Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to AU24673/84A priority Critical patent/AU548694B2/en
Publication of AU2467384A publication Critical patent/AU2467384A/en
Application granted granted Critical
Publication of AU548694B2 publication Critical patent/AU548694B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • B29C59/142—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment of profiled articles, e.g. hollow or tubular articles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
AU24673/84A 1984-02-16 1984-02-16 Plasma treatment Ceased AU548694B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU24673/84A AU548694B2 (en) 1984-02-16 1984-02-16 Plasma treatment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AU24673/84A AU548694B2 (en) 1984-02-16 1984-02-16 Plasma treatment

Publications (2)

Publication Number Publication Date
AU2467384A AU2467384A (en) 1985-08-22
AU548694B2 true AU548694B2 (en) 1986-01-02

Family

ID=3713561

Family Applications (1)

Application Number Title Priority Date Filing Date
AU24673/84A Ceased AU548694B2 (en) 1984-02-16 1984-02-16 Plasma treatment

Country Status (1)

Country Link
AU (1) AU548694B2 (en)

Also Published As

Publication number Publication date
AU2467384A (en) 1985-08-22

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Legal Events

Date Code Title Description
MK14 Patent ceased section 143(a) (annual fees not paid) or expired