FR2591924A1 - Procede et dispositif de positionnement relatif entre une piece a usiner, un outil et des tetes de mesure - Google Patents

Procede et dispositif de positionnement relatif entre une piece a usiner, un outil et des tetes de mesure Download PDF

Info

Publication number
FR2591924A1
FR2591924A1 FR8617858A FR8617858A FR2591924A1 FR 2591924 A1 FR2591924 A1 FR 2591924A1 FR 8617858 A FR8617858 A FR 8617858A FR 8617858 A FR8617858 A FR 8617858A FR 2591924 A1 FR2591924 A1 FR 2591924A1
Authority
FR
France
Prior art keywords
measuring heads
workpiece
coordinate
plate
relative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
FR8617858A
Other languages
English (en)
French (fr)
Inventor
Bernd-Uwe Dr Zehner
Wolfgang Heinrich
Klaus Roth
Reiner Kupferschmidt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GERABERG THERMOMETER
Original Assignee
GERABERG THERMOMETER
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GERABERG THERMOMETER filed Critical GERABERG THERMOMETER
Publication of FR2591924A1 publication Critical patent/FR2591924A1/fr
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Heat Sensitive Colour Forming Recording (AREA)
  • Automatic Control Of Machine Tools (AREA)
FR8617858A 1985-12-23 1986-12-19 Procede et dispositif de positionnement relatif entre une piece a usiner, un outil et des tetes de mesure Pending FR2591924A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD28512285A DD244939B1 (de) 1985-12-23 1985-12-23 Vorrichtung zur relativpositionierung zwischen wirkstueck, werkzeug und messsonde

Publications (1)

Publication Number Publication Date
FR2591924A1 true FR2591924A1 (fr) 1987-06-26

Family

ID=5574956

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8617858A Pending FR2591924A1 (fr) 1985-12-23 1986-12-19 Procede et dispositif de positionnement relatif entre une piece a usiner, un outil et des tetes de mesure

Country Status (7)

Country Link
BG (1) BG49086A1 (enrdf_load_stackoverflow)
CH (1) CH672276A5 (enrdf_load_stackoverflow)
CS (1) CS269789B1 (enrdf_load_stackoverflow)
DD (1) DD244939B1 (enrdf_load_stackoverflow)
DE (1) DE3639461A1 (enrdf_load_stackoverflow)
FR (1) FR2591924A1 (enrdf_load_stackoverflow)
HU (1) HUT45712A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4975637A (en) * 1989-12-29 1990-12-04 International Business Machines Corporation Method and apparatus for integrated circuit device testing
DE4325450A1 (de) * 1993-07-29 1995-02-02 Bacher Graphische Geraete Gmbh Tischverstellvorrichtung
DE4442411B4 (de) 1994-11-29 2007-05-03 Heidelberger Druckmaschinen Ag Verfahren zur formenden Bearbeitung von Papier in einer Druckmaschine
CN109015048B (zh) * 2018-09-13 2020-12-18 温州通昌机械有限公司 具有高精度定位功能的数控机床
CN110421393B (zh) * 2019-05-29 2021-07-16 陕西飞机工业(集团)有限公司 一种数控铣削工件快速二次找正的方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3448280A (en) * 1966-11-02 1969-06-03 Western Electric Co Apparatus for positioning workpiece to aline a cavity therein with a light beam
DE2261001A1 (de) * 1972-01-26 1973-08-02 Pennwalt Corp Abtragungsvorrichtung mit drehschalttisch
DD200956A1 (de) * 1981-07-22 1983-06-22 Woschni Hans Guenter Zweikoordinatenantrieb
WO1984001437A1 (en) * 1982-09-30 1984-04-12 Tri Gamma Corp Probe disk and associated assembly apparatus
DE3436965A1 (de) * 1983-11-09 1985-05-15 Veb Kombinat Textima, Ddr 9010 Karl-Marx-Stadt Verfahren und vorrichtung zum ausrichten von stueckigen flaechengebilden

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3425166A (en) * 1966-09-28 1969-02-04 Corning Glass Works Resistor tailoring machine
DE6921061U (de) * 1969-05-23 1969-11-27 Hamuel Werkzeugfab Kirschbaum Beweglicher werkstuecktisch
DE2805532A1 (de) * 1978-02-10 1979-08-16 Trumpf Maschinen Ag Werkzeugmaschine mit einer einstellbaren vorrichtung zum festhalten und verschieben eines werkstuecks gegenueber einem werkzeug
GB2131162B (en) * 1982-11-27 1986-04-30 Ferranti Plc Aligning objects
US4523749A (en) * 1983-03-02 1985-06-18 W. A. Whitney Corp. Hole forming machine with adjustable work clamps
US4634876A (en) * 1983-05-13 1987-01-06 Canon Kabushiki Kaisha Object position detecting apparatus using accumulation type sensor
KR890001730Y1 (ko) * 1983-08-26 1989-04-07 니뽕 빅터 가부시끼가이샤 칩 저항

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3448280A (en) * 1966-11-02 1969-06-03 Western Electric Co Apparatus for positioning workpiece to aline a cavity therein with a light beam
DE2261001A1 (de) * 1972-01-26 1973-08-02 Pennwalt Corp Abtragungsvorrichtung mit drehschalttisch
DD200956A1 (de) * 1981-07-22 1983-06-22 Woschni Hans Guenter Zweikoordinatenantrieb
WO1984001437A1 (en) * 1982-09-30 1984-04-12 Tri Gamma Corp Probe disk and associated assembly apparatus
DE3436965A1 (de) * 1983-11-09 1985-05-15 Veb Kombinat Textima, Ddr 9010 Karl-Marx-Stadt Verfahren und vorrichtung zum ausrichten von stueckigen flaechengebilden

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
APPLIED PHYSICS LETTERS *
MACHINE DESIGN *

Also Published As

Publication number Publication date
DD244939B1 (de) 1988-06-29
CS269789B1 (en) 1990-05-14
HUT45712A (en) 1988-08-29
BG49086A1 (en) 1991-08-15
DD244939A1 (de) 1987-04-22
DE3639461C2 (enrdf_load_stackoverflow) 1990-09-06
DE3639461A1 (de) 1987-07-23
CH672276A5 (enrdf_load_stackoverflow) 1989-11-15
CS889786A1 (en) 1989-06-13

Similar Documents

Publication Publication Date Title
US7599048B2 (en) Optical emission spectroscopy process monitoring and material characterization
JP3605359B2 (ja) 加工材料の加工のためのレーザ加工機械の較正のための方法及び装置
JPH05248817A (ja) 干渉計装置、半導体処理装置ならびに基板表面位置の測定方法
JP2025120232A (ja) 加工装置及び加工方法
US7718554B2 (en) Focused laser beam processing
US10340170B2 (en) Method and device for grooving wafers
KR101057765B1 (ko) 노광 장치, 노광 방법 및 표시용 패널 기판의 제조 방법
KR20160040097A (ko) 레이저 가공 장치
CN101356304A (zh) 光学计量度盘及其基于激光的制造方法
KR20010033388A (ko) 막 두께 측정을 위한 향상된 방법 및 장치
CN106077966A (zh) 激光加工装置
FR2591924A1 (fr) Procede et dispositif de positionnement relatif entre une piece a usiner, un outil et des tetes de mesure
EP0015789B1 (fr) Dispositif optique de projection en photorépétition
EP1098556A1 (fr) Dispositif de mesure d'erreur de position relative
JP2016133370A (ja) レーザー光線の検査方法
JP7650597B2 (ja) 測定治具、動作精度測定システム、及び動作精度測定方法
JP2000283728A (ja) 薄板材の厚み変動測定方法および装置
WO2010063826A1 (en) Cartesian coordinate measurement for a rotating system
JP2004119673A (ja) 半導体ウエハの反り量測定方法および測定装置
Piqué et al. Assembly and integration of thin bare die using laser direct-write
KR100465538B1 (ko) 형상 측정장치 및 방법
JP3639231B2 (ja) 位置合わせ装置及び位置合わせ方法
KR20220027957A (ko) 기판의 처리된 표면에 전달되는 에너지의 양을 공간적으로 제어하기 위한 시스템 및 방법
CN107665831B (zh) 用于半导体器件制造工具器具的测量的系统及其方法
JP7605786B2 (ja) レーザ加工装置