FR2579487B1 - Appareil pour reguler l'ecoulement de particules fines - Google Patents
Appareil pour reguler l'ecoulement de particules finesInfo
- Publication number
- FR2579487B1 FR2579487B1 FR8604251A FR8604251A FR2579487B1 FR 2579487 B1 FR2579487 B1 FR 2579487B1 FR 8604251 A FR8604251 A FR 8604251A FR 8604251 A FR8604251 A FR 8604251A FR 2579487 B1 FR2579487 B1 FR 2579487B1
- Authority
- FR
- France
- Prior art keywords
- controlling
- flow
- fine particles
- fine
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/228—Gas flow assisted PVD deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45582—Expansion of gas before it reaches the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45585—Compression of gas before it reaches the substrate
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15D—FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
- F15D1/00—Influencing flow of fluids
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60059619A JPS61218810A (ja) | 1985-03-26 | 1985-03-26 | 微粒子流の流れ制御装置 |
JP60060841A JPS61223313A (ja) | 1985-03-27 | 1985-03-27 | 微粒子流の流れ制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2579487A1 FR2579487A1 (fr) | 1986-10-03 |
FR2579487B1 true FR2579487B1 (fr) | 1989-05-12 |
Family
ID=26400676
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8604251A Expired FR2579487B1 (fr) | 1985-03-26 | 1986-03-25 | Appareil pour reguler l'ecoulement de particules fines |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE3610299A1 (fr) |
FR (1) | FR2579487B1 (fr) |
GB (1) | GB2175709B (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1272661A (fr) * | 1985-05-11 | 1990-08-14 | Yuji Chiba | Appareil reacteur |
DE3721875A1 (de) * | 1987-07-02 | 1989-01-12 | Gema Ransburg Ag | Verfahren und einrichtung fuer eine pulverspruehbeschichtungsanlage |
DE10320147A1 (de) * | 2003-05-06 | 2004-12-09 | Dürr Systems GmbH | Verfahren und Versorgungssystem zur dosierten Materialversorgung einer Beschichtungsvorrichtung |
WO2020119895A1 (fr) * | 2018-12-11 | 2020-06-18 | Applied Materials, Inc. | Source de vapeur pour déposer une matière évaporée, buse pour une source de vapeur, système de dépôt par évaporation sous vide et procédé pour déposer une matière évaporée |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR544737A (fr) * | 1921-05-26 | 1922-09-27 | Arbed | Procédé de chauffage à l'aide de combustibles pulvérisés |
GB415446A (en) * | 1931-11-25 | 1934-08-27 | Daimler Benz Ag | Method of and means for stabilising the flow of gas in pipes connected to reciprocating piston machines |
GB891159A (en) * | 1957-03-20 | 1962-03-14 | Holmes & Co Ltd W C | Improvements in or relating to the reduction or substantial elimination of pressure fluctuations in pipe lines |
US3015481A (en) * | 1959-12-11 | 1962-01-02 | Archie H Clingensmith | Tuyere assembly |
FR1404306A (fr) * | 1964-08-17 | 1965-06-25 | Avco Corp | Perfectionnements à la combustion de charbon pulvérisé |
DE1523019C3 (de) * | 1964-12-09 | 1975-09-04 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Einrichtung zur Einstellung und Konstanthaltung des Trägergasflusses bei gaschromatographischen Meßeinrichtungen |
NL6712305A (fr) * | 1966-09-12 | 1968-03-13 | ||
SE311449B (fr) * | 1967-11-30 | 1969-06-09 | Aga Ab | |
US3904505A (en) * | 1970-03-20 | 1975-09-09 | Space Sciences Inc | Apparatus for film deposition |
FR2122682A5 (fr) * | 1971-01-20 | 1972-09-01 | Siderurgie Fse Inst Rech | |
GB1336253A (en) * | 1971-03-11 | 1973-11-07 | Gaz De France | Pressure regulating and reducing gas-flow meter for industrial installations |
GB1342994A (en) * | 1972-07-24 | 1974-01-10 | Clarke Chapman John Thompson L | Equalising flow in pipes |
US4078097A (en) * | 1976-07-09 | 1978-03-07 | International Prototypes, Inc. | Metallic coating process |
US4200264A (en) * | 1976-08-16 | 1980-04-29 | Fumio Hori | Apparatus for obtaining Mg and Ca through carbon reduction |
FR2404126A1 (fr) * | 1977-09-26 | 1979-04-20 | Iceberg Transport Int | Procede de production d'energie a partir d'un iceberg tabulaire |
GB2007388A (en) * | 1977-10-14 | 1979-05-16 | Northern Eng Ind | Proportioning flow in pipes |
AU8288282A (en) * | 1981-05-04 | 1982-11-11 | Optical Coating Laboratory, Inc. | Production and utilization of activated molecular beams |
DE3127074A1 (de) * | 1981-07-09 | 1983-01-27 | Ernst Peiniger GmbH Unternehmen für Bautenschutz, 5090 Leverkusen | Strahlgeraet, insbesondere fuer das druckluftstrahlen |
DE3148756A1 (de) * | 1981-12-09 | 1983-07-21 | Dusan Dr.-Ing. 8000 München Nendl | Ueberschallringduese |
FR2519273A1 (fr) * | 1982-01-07 | 1983-07-08 | Camiva | Dispositif de projection pour produit solide finement divise |
CH659864A5 (de) * | 1982-06-23 | 1987-02-27 | Bbc Brown Boveri & Cie | Lochplatte zur vergleichmaessigung der geschwindigkeitsverteilung in einem stroemungskanal. |
-
1986
- 1986-03-25 FR FR8604251A patent/FR2579487B1/fr not_active Expired
- 1986-03-26 GB GB8607606A patent/GB2175709B/en not_active Expired
- 1986-03-26 DE DE19863610299 patent/DE3610299A1/de active Granted
Also Published As
Publication number | Publication date |
---|---|
DE3610299C2 (fr) | 1993-06-24 |
GB2175709B (en) | 1989-06-28 |
GB8607606D0 (en) | 1986-04-30 |
DE3610299A1 (de) | 1986-10-02 |
GB2175709A (en) | 1986-12-03 |
FR2579487A1 (fr) | 1986-10-03 |
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