FR2567659B1 - Materiaux de formation d'une image sensibles a un faisceau de haute energie, procede de formation et element obtenu - Google Patents

Materiaux de formation d'une image sensibles a un faisceau de haute energie, procede de formation et element obtenu

Info

Publication number
FR2567659B1
FR2567659B1 FR8510589A FR8510589A FR2567659B1 FR 2567659 B1 FR2567659 B1 FR 2567659B1 FR 8510589 A FR8510589 A FR 8510589A FR 8510589 A FR8510589 A FR 8510589A FR 2567659 B1 FR2567659 B1 FR 2567659B1
Authority
FR
France
Prior art keywords
energy beam
element obtained
image forming
sensitive image
beam sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8510589A
Other languages
English (en)
Other versions
FR2567659A1 (fr
Inventor
Hideo Ai
Nobuo Nakazaki
Manabu Miyao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Kasei Corp
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Asahi Kasei Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP59142233A external-priority patent/JPS6122340A/ja
Priority claimed from JP15337284A external-priority patent/JPS6132052A/ja
Priority claimed from JP59265273A external-priority patent/JPS61143409A/ja
Priority claimed from JP59265274A external-priority patent/JPS61143746A/ja
Priority claimed from JP59265272A external-priority patent/JPS61143408A/ja
Priority claimed from JP60099082A external-priority patent/JPS61255909A/ja
Application filed by Asahi Chemical Industry Co Ltd, Asahi Kasei Kogyo KK filed Critical Asahi Chemical Industry Co Ltd
Publication of FR2567659A1 publication Critical patent/FR2567659A1/fr
Application granted granted Critical
Publication of FR2567659B1 publication Critical patent/FR2567659B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F212/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
    • C08F212/02—Monomers containing only one unsaturated aliphatic radical
    • C08F212/04—Monomers containing only one unsaturated aliphatic radical containing one ring
    • C08F212/14—Monomers containing only one unsaturated aliphatic radical containing one ring substituted by heteroatoms or groups containing heteroatoms
    • C08F212/16—Halogens
    • C08F212/18—Chlorine
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/016—Diazonium salts or compounds
    • G03F7/021—Macromolecular diazonium compounds; Macromolecular additives, e.g. binders
    • G03F7/0212—Macromolecular diazonium compounds; Macromolecular additives, e.g. binders characterised by the polymeric binder or the macromolecular additives other than the diazo resins or the polymeric diazonium compounds
    • G03F7/0217—Polyurethanes; Epoxy resins
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Materials For Photolithography (AREA)
FR8510589A 1984-07-11 1985-07-10 Materiaux de formation d'une image sensibles a un faisceau de haute energie, procede de formation et element obtenu Expired FR2567659B1 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP59142233A JPS6122340A (ja) 1984-07-11 1984-07-11 レジスト材料
JP15337284A JPS6132052A (ja) 1984-07-24 1984-07-24 高エネルギ−線感応性材料
JP59265273A JPS61143409A (ja) 1984-12-18 1984-12-18 新規なエピスルフイド化合物及びその製造方法
JP59265274A JPS61143746A (ja) 1984-12-18 1984-12-18 新規高エネルギ−線感応性材料
JP59265272A JPS61143408A (ja) 1984-12-18 1984-12-18 新規共重合体及びその製造方法
JP60099082A JPS61255909A (ja) 1985-05-10 1985-05-10 新規硬化性材料

Publications (2)

Publication Number Publication Date
FR2567659A1 FR2567659A1 (fr) 1986-01-17
FR2567659B1 true FR2567659B1 (fr) 1988-11-25

Family

ID=27552057

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8510589A Expired FR2567659B1 (fr) 1984-07-11 1985-07-10 Materiaux de formation d'une image sensibles a un faisceau de haute energie, procede de formation et element obtenu

Country Status (5)

Country Link
US (1) US4756989A (fr)
KR (1) KR900000976B1 (fr)
DE (1) DE3524633A1 (fr)
FR (1) FR2567659B1 (fr)
GB (1) GB2163435B (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4839261A (en) * 1986-09-29 1989-06-13 Asahi Kasei Kogyo Kabushiki Kaisha Photocurable laminate
EP0505997B1 (fr) * 1991-03-29 1997-05-28 Idemitsu Kosan Company Limited Procédé de préparation de homo- ou copolymères styréniques
US5468812A (en) * 1991-04-02 1995-11-21 Minnesota Mining And Manufacturing Company Polymerizable fluorochemical surfactants
US5250395A (en) * 1991-07-25 1993-10-05 International Business Machines Corporation Process for imaging of photoresist including treatment of the photoresist with an organometallic compound
DE19741492A1 (de) * 1997-09-19 1999-03-25 Microparts Gmbh Verfahren zur Herstellung von Mikrostrukturkörpern
US6572980B1 (en) * 2001-08-13 2003-06-03 Henkel Loctite Corporation Reworkable thermosetting resin compositions
DE10208449A1 (de) * 2002-02-27 2003-09-11 Infineon Technologies Ag Verfahren zur Erhöhung der Ätzresistenz und zur Verkleinerung der Loch- oder Grabenbreite einer Fotoresiststruktur unter Verwendung von Lösungsmittelsystemen geringer Polarität
US9321871B2 (en) * 2012-10-10 2016-04-26 Dow Global Technologies Llc Water insoluble copolymer including pendant aryl epoxide groups
WO2014058755A1 (fr) * 2012-10-10 2014-04-17 Rohm And Haas Company Résine de support de synthèse
WO2016010170A1 (fr) * 2014-07-14 2016-01-21 (주)켐옵틱스 Polymère de polystyrène réactif ayant un indice de réfraction élevé et procédé de préparation associé à l'aide d'un dérivé de styrène époxyde réactif
WO2016010171A1 (fr) * 2014-07-14 2016-01-21 (주)켐옵틱스 Polymère de polystyrène réactif ayant un indice de réfraction élevé et procédé de fabrication associé à l'aide d'un dérivé de styrène réactif

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2807599A (en) * 1955-01-28 1957-09-24 Du Pont Polymers of divinyl benzene monoepoxide
US3044999A (en) * 1960-09-29 1962-07-17 Dow Chemical Co (2, 2-dihalocyclopropyl) styrenes
GB1100153A (en) * 1963-10-19 1968-01-24 Dunlop Co Ltd Polymeric compositions
CA1101586A (fr) * 1971-05-17 1981-05-19 Arnel D. Potter Composes photosensibles
US3916035A (en) * 1973-11-05 1975-10-28 Texas Instruments Inc Epoxy-polymer electron beam resists
JPS51105353A (ja) * 1975-03-07 1976-09-17 Hitachi Ltd Denshisenkannoseikobunshisoseibutsu
FR2352007A1 (fr) * 1976-05-21 1977-12-16 Thomson Csf Resine sensible aux electrons et procede de fabrication de ladite resine
US4130424A (en) * 1976-08-06 1978-12-19 Bell Telephone Laboratories, Incorporated Process using radiation curable epoxy containing resist and resultant product
FR2382709A1 (fr) * 1977-03-04 1978-09-29 Thomson Csf Famille de composes comportant un cycle thiirane, reticulables par irradiation photonique
JPS5664336A (en) * 1979-10-30 1981-06-01 Fujitsu Ltd Minute pattern forming method
JPS56149012A (en) * 1980-04-22 1981-11-18 Seiko Epson Corp Resin for plastic lens for spectacles
JPS59124907A (ja) * 1983-01-06 1984-07-19 Asahi Chem Ind Co Ltd 新規なエポキシ化合物およびその製造法
US4528332A (en) * 1983-01-06 1985-07-09 Asahi Kasei Kogyo Kabushiki Kaisha Epoxy compounds, process for the preparation thereof and resist materials comprising thereof

Also Published As

Publication number Publication date
DE3524633A1 (de) 1986-01-16
DE3524633C2 (fr) 1992-12-10
KR860009054A (ko) 1986-12-19
GB2163435B (en) 1987-07-22
GB2163435A (en) 1986-02-26
KR900000976B1 (ko) 1990-02-23
US4756989A (en) 1988-07-12
GB8517062D0 (en) 1985-08-14
FR2567659A1 (fr) 1986-01-17

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Legal Events

Date Code Title Description
ST Notification of lapse