FR2563873B3 - Pompe turbomoleculaire combinee - Google Patents

Pompe turbomoleculaire combinee

Info

Publication number
FR2563873B3
FR2563873B3 FR8502197A FR8502197A FR2563873B3 FR 2563873 B3 FR2563873 B3 FR 2563873B3 FR 8502197 A FR8502197 A FR 8502197A FR 8502197 A FR8502197 A FR 8502197A FR 2563873 B3 FR2563873 B3 FR 2563873B3
Authority
FR
France
Prior art keywords
turbomolecular pump
combined
combined turbomolecular
pump
turbomolecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8502197A
Other languages
English (en)
Other versions
FR2563873A3 (fr
Inventor
Masaharu Miki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Seiki KK
Original Assignee
Seiko Seiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Seiki KK filed Critical Seiko Seiki KK
Publication of FR2563873A3 publication Critical patent/FR2563873A3/fr
Application granted granted Critical
Publication of FR2563873B3 publication Critical patent/FR2563873B3/fr
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
FR8502197A 1984-02-24 1985-02-15 Pompe turbomoleculaire combinee Expired FR2563873B3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984025390U JPS60139098U (ja) 1984-02-24 1984-02-24 組合せ型軸流分子ポンプ

Publications (2)

Publication Number Publication Date
FR2563873A3 FR2563873A3 (fr) 1985-11-08
FR2563873B3 true FR2563873B3 (fr) 1986-04-11

Family

ID=12164549

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8502197A Expired FR2563873B3 (fr) 1984-02-24 1985-02-15 Pompe turbomoleculaire combinee

Country Status (5)

Country Link
US (1) US4655678A (fr)
JP (1) JPS60139098U (fr)
DE (1) DE3506299A1 (fr)
FR (1) FR2563873B3 (fr)
GB (1) GB2155103B (fr)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0784871B2 (ja) * 1986-06-12 1995-09-13 株式会社日立製作所 真空排気装置
JP2556320B2 (ja) * 1987-03-18 1996-11-20 セイコ−精機株式会社 真空ポンプ
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold Ag Reibungsvakuumpumpe mit Zwischeneinlaß
IT1281025B1 (it) * 1995-11-10 1998-02-11 Varian Spa Pompa turbomolecolare.
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
US6926493B1 (en) * 1997-06-27 2005-08-09 Ebara Corporation Turbo-molecular pump
JP3013083B2 (ja) * 1998-06-23 2000-02-28 セイコー精機株式会社 ターボ分子ポンプ
TW504548B (en) * 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
JP2003172291A (ja) * 2001-12-04 2003-06-20 Boc Edwards Technologies Ltd 真空ポンプ
JP2003336597A (ja) * 2002-03-12 2003-11-28 Boc Edwards Technologies Ltd ターボ分子ポンプ
DE102004047930A1 (de) * 2004-10-01 2006-04-06 Leybold Vacuum Gmbh Reibungsvakuumpumpe
US7628577B2 (en) * 2006-08-31 2009-12-08 Varian, S.P.A. Vacuum pumps with improved pumping channel configurations
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
JP2015501918A (ja) * 2011-11-09 2015-01-19 ブレント フリーゼ， プラズマを高エネルギー状態に圧縮するための方法および装置
JP6228839B2 (ja) * 2013-12-26 2017-11-08 エドワーズ株式会社 真空排気機構、複合型真空ポンプ、および回転体部品

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE291268C (fr) *
US1586160A (en) * 1926-02-20 1926-05-25 Mauron Francois Molecular vacuum pump
US1975568A (en) * 1932-03-18 1934-10-02 Central Scientific Co Molecular vacuum pump
US2954157A (en) * 1958-01-27 1960-09-27 Edwin E Eckberg Molecular vacuum pump
FR1263944A (fr) * 1960-05-03 1961-06-19 Alsacienne Constr Meca Perfectionnements aux pompes moléculaires et aux dispositifs d'étanchéité
GB1015887A (en) * 1963-05-27 1966-01-05 William Kenneth Roberts Molecular vacuum pump
JPS4733446B1 (fr) * 1969-04-28 1972-08-25
JPS4733447B1 (fr) * 1969-05-07 1972-08-25
JPS49100608A (fr) * 1973-01-29 1974-09-24
FR2224009A5 (fr) * 1973-03-30 1974-10-25 Cit Alcatel

Also Published As

Publication number Publication date
GB2155103A (en) 1985-09-18
GB8501153D0 (en) 1985-02-20
JPS60139098U (ja) 1985-09-13
FR2563873A3 (fr) 1985-11-08
GB2155103B (en) 1987-08-26
US4655678A (en) 1987-04-07
DE3506299A1 (de) 1985-09-05

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