FR2533637B1 - Pompe cryogenique - Google Patents

Pompe cryogenique

Info

Publication number
FR2533637B1
FR2533637B1 FR8312019A FR8312019A FR2533637B1 FR 2533637 B1 FR2533637 B1 FR 2533637B1 FR 8312019 A FR8312019 A FR 8312019A FR 8312019 A FR8312019 A FR 8312019A FR 2533637 B1 FR2533637 B1 FR 2533637B1
Authority
FR
France
Prior art keywords
cryogenic pump
cryogenic
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8312019A
Other languages
English (en)
Other versions
FR2533637A1 (fr
Inventor
Charles B Hood
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CVI Inc
Original Assignee
CVI Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CVI Inc filed Critical CVI Inc
Publication of FR2533637A1 publication Critical patent/FR2533637A1/fr
Application granted granted Critical
Publication of FR2533637B1 publication Critical patent/FR2533637B1/fr
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
FR8312019A 1982-09-29 1983-07-20 Pompe cryogenique Expired FR2533637B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/426,518 US4466252A (en) 1982-09-29 1982-09-29 Cryopump

Publications (2)

Publication Number Publication Date
FR2533637A1 FR2533637A1 (fr) 1984-03-30
FR2533637B1 true FR2533637B1 (fr) 1986-02-28

Family

ID=23691121

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8312019A Expired FR2533637B1 (fr) 1982-09-29 1983-07-20 Pompe cryogenique

Country Status (4)

Country Link
US (1) US4466252A (fr)
JP (1) JPS59131779A (fr)
CA (1) CA1192756A (fr)
FR (1) FR2533637B1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60161702A (ja) * 1984-01-27 1985-08-23 Seiko Instr & Electronics Ltd 真空用冷却トラツプ
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array
JPH0227170A (ja) * 1988-07-15 1990-01-29 Hitachi Ltd クライオポンプ
US5187939A (en) * 1991-06-03 1993-02-23 Hughes Aircraft Company Rapid cooldown dewar
US6155059A (en) * 1999-01-13 2000-12-05 Helix Technology Corporation High capacity cryopump
US20050274128A1 (en) * 2004-06-10 2005-12-15 Genesis Cryopump with enhanced hydrogen pumping
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
JP6084119B2 (ja) * 2013-05-27 2017-02-22 住友重機械工業株式会社 クライオポンプ
JP6913049B2 (ja) * 2018-03-02 2021-08-04 住友重機械工業株式会社 クライオポンプ
GB2596832A (en) 2020-07-08 2022-01-12 Edwards Vacuum Llc Cryopump
GB2596831A (en) * 2020-07-08 2022-01-12 Edwards Vacuum Llc Cryopump
GB2600479A (en) * 2020-11-02 2022-05-04 Edwards Vacuum Llc Cryopumps and inlet flow restrictors for cryopumps

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3390536A (en) * 1967-02-01 1968-07-02 Gca Corp Cryogenic pumping apparatus
US3490247A (en) * 1968-01-24 1970-01-20 Perkin Elmer Corp Sorption pump roughing system
DE2620880C2 (de) * 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
JPS5420008A (en) * 1977-07-18 1979-02-15 Ube Ind Ltd Lubricant composition
US4325220A (en) * 1979-02-28 1982-04-20 United Technologies Corporation Cryoadsorption pumps having panels with zeolite plates

Also Published As

Publication number Publication date
JPH0214554B2 (fr) 1990-04-09
JPS59131779A (ja) 1984-07-28
FR2533637A1 (fr) 1984-03-30
US4466252A (en) 1984-08-21
CA1192756A (fr) 1985-09-03

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Legal Events

Date Code Title Description
ST Notification of lapse