FR2554969B1 - Evaporateur a faisceau d'electrons - Google Patents

Evaporateur a faisceau d'electrons

Info

Publication number
FR2554969B1
FR2554969B1 FR848416435A FR8416435A FR2554969B1 FR 2554969 B1 FR2554969 B1 FR 2554969B1 FR 848416435 A FR848416435 A FR 848416435A FR 8416435 A FR8416435 A FR 8416435A FR 2554969 B1 FR2554969 B1 FR 2554969B1
Authority
FR
France
Prior art keywords
electron beam
beam evaporator
evaporator
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR848416435A
Other languages
English (en)
Other versions
FR2554969A1 (fr
Inventor
Volker Bauer
Horst Ranke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2554969A1 publication Critical patent/FR2554969A1/fr
Application granted granted Critical
Publication of FR2554969B1 publication Critical patent/FR2554969B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1475—Scanning means magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
FR848416435A 1983-10-28 1984-10-26 Evaporateur a faisceau d'electrons Expired FR2554969B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19833339131 DE3339131A1 (de) 1983-10-28 1983-10-28 Elektronenstrahlverdampfer mit mindestens zwei magnetischen ablenksystemen

Publications (2)

Publication Number Publication Date
FR2554969A1 FR2554969A1 (fr) 1985-05-17
FR2554969B1 true FR2554969B1 (fr) 1989-01-27

Family

ID=6212954

Family Applications (1)

Application Number Title Priority Date Filing Date
FR848416435A Expired FR2554969B1 (fr) 1983-10-28 1984-10-26 Evaporateur a faisceau d'electrons

Country Status (6)

Country Link
US (1) US4611330A (fr)
JP (1) JPS60175355A (fr)
CH (1) CH661288A5 (fr)
DE (1) DE3339131A1 (fr)
FR (1) FR2554969B1 (fr)
GB (1) GB2149201B (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4863581A (en) * 1987-02-12 1989-09-05 Kawasaki Steel Corp. Hollow cathode gun and deposition device for ion plating process
NL9001751A (nl) * 1990-08-02 1992-03-02 Philips Nv Geladen deeltjesbundelsysteem alsmede een koelinrichting, een spoel voorzien van een koelorgaan en een koelorgaan voor toepassing in een dergelijk geladen deeltjesbundelsysteem.
DE19745771B4 (de) 1997-10-16 2005-12-22 Unaxis Deutschland Holding Gmbh Verfahren für den Betrieb eines Hochleistungs-Elektronenstrahls
CN201864770U (zh) * 2010-11-22 2011-06-15 江苏淘镜有限公司 电子枪蒸发用坩埚

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1248175B (de) * 1961-08-31 1967-08-24 Heraeus Gmbh W C Elektronenstrahlerzeugungssystem
US3497602A (en) * 1966-12-16 1970-02-24 Air Reduction Apparatus for producing and directing an electron beam in an electron beam furnace
US3535428A (en) * 1968-07-17 1970-10-20 Air Reduction Apparatus for producing and directing an electron beam
US3582529A (en) * 1969-09-24 1971-06-01 Air Reduction Electron beam heating apparatus and control system therein
US3896258A (en) * 1973-09-04 1975-07-22 Charles W Hanks Electron beam gun system
IT1037702B (it) * 1975-04-29 1979-11-20 Varian Associates Apparecchiatura di rescaldamento e o di evaporazione a fascio elettronico
SU705699A2 (ru) * 1976-05-03 1979-12-25 Орденов Ленина И Трудового Красного Знамени Институт Электросварки Им. Е.О.Патона Установка дл электроннолучевого нагрева материалов
DE2812285C2 (de) * 1978-03-21 1986-05-15 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum Verdampfen von Legierungsschmelzen aus Metallen mit voneinander abweichenden Dampfdrücken

Also Published As

Publication number Publication date
JPH0524616B2 (fr) 1993-04-08
DE3339131C2 (fr) 1990-09-06
JPS60175355A (ja) 1985-09-09
US4611330A (en) 1986-09-09
CH661288A5 (de) 1987-07-15
GB8423997D0 (en) 1984-10-31
FR2554969A1 (fr) 1985-05-17
GB2149201B (en) 1987-03-04
DE3339131A1 (de) 1985-05-09
GB2149201A (en) 1985-06-05

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Legal Events

Date Code Title Description
ST Notification of lapse