FR2487696B1 - Appareil de traitement continu sous vide - Google Patents

Appareil de traitement continu sous vide

Info

Publication number
FR2487696B1
FR2487696B1 FR818114782A FR8114782A FR2487696B1 FR 2487696 B1 FR2487696 B1 FR 2487696B1 FR 818114782 A FR818114782 A FR 818114782A FR 8114782 A FR8114782 A FR 8114782A FR 2487696 B1 FR2487696 B1 FR 2487696B1
Authority
FR
France
Prior art keywords
processing apparatus
vacuum processing
continuous vacuum
continuous
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR818114782A
Other languages
English (en)
French (fr)
Other versions
FR2487696A1 (fr
Inventor
Kiyoshi Imada
Susumo Ueno
Hirokazu Nomura
Masaie Tokai
Yoshitada Hata
Kenichi Kato
Hideaki Kamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10363080A external-priority patent/JPS5730733A/ja
Priority claimed from JP14946180A external-priority patent/JPS5773025A/ja
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of FR2487696A1 publication Critical patent/FR2487696A1/fr
Application granted granted Critical
Publication of FR2487696B1 publication Critical patent/FR2487696B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/168—Sealings between relatively-moving surfaces which permits material to be continuously conveyed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0089—Sealing devices placed between articles and treatment installations during moulding or shaping, e.g. sealing off the entrance or exit of ovens or irradiation rooms, connections between rooms at different pressures
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761—Continuous moving
    • H01J37/3277—Continuous moving of continuous material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32788—Means for moving the material to be treated for extracting the material from the process chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32899—Multiple chambers, e.g. cluster tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Vapour Deposition (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
FR818114782A 1980-07-30 1981-07-29 Appareil de traitement continu sous vide Expired - Lifetime FR2487696B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10363080A JPS5730733A (en) 1980-07-30 1980-07-30 Device for continuous plasma treatment
JP14946180A JPS5773025A (en) 1980-10-27 1980-10-27 Apparatus for continuous vacuum treatment

Publications (2)

Publication Number Publication Date
FR2487696A1 FR2487696A1 (fr) 1982-02-05
FR2487696B1 true FR2487696B1 (fr) 1991-06-14

Family

ID=26444251

Family Applications (1)

Application Number Title Priority Date Filing Date
FR818114782A Expired - Lifetime FR2487696B1 (fr) 1980-07-30 1981-07-29 Appareil de traitement continu sous vide

Country Status (4)

Country Link
DE (1) DE3129997C2 (de)
FR (1) FR2487696B1 (de)
GB (1) GB2084264B (de)
NL (1) NL8103566A (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4511419A (en) * 1982-04-23 1985-04-16 Firma Erwin Kampf Gmbh & Co. Method and device for laminating foils
EP0130444B1 (de) * 1983-06-17 1987-09-23 Hitachi, Ltd. Apparat zur kontinuierlichen Vakuumbehandlung
DE3415012A1 (de) * 1984-04-19 1986-01-09 BMP Plasmatechnologie GmbH, 8011 Heimstetten Verfahren und vorrichtung zum kontinuierlichen bearbeiten von substraten mit niederdruck-plasma
US4812101A (en) * 1987-04-27 1989-03-14 American Telephone And Telegraph Company, At&T Bell Laboratories Method and apparatus for continuous throughput in a vacuum environment
EP0527859B1 (de) * 1990-05-10 1995-07-19 Eastman Kodak Company Gerät zur plasmabehandlung eines durchgehenden materials
US5110396A (en) * 1990-06-14 1992-05-05 The Langston Corporation Floating air seal for an apparatus for manufacturing single faced corrugated board
US6250222B1 (en) 1998-09-22 2001-06-26 Agfa-Gevaert Apparatus for the continuous treatment of sheet material under reduced pressure
EP0989455A1 (de) * 1998-09-22 2000-03-29 Agfa-Gevaert N.V. Gerät zur kontinuierlichen Vakuumbehandlung von Blattmaterial
DE19903935A1 (de) * 1999-02-01 2000-08-03 Bosch Gmbh Robert Verfahren und Vorrichtung zur Sterilisation von Gefäßen oder Gegenständen
ES2336870B1 (es) 2007-08-20 2011-02-18 Novogenio, S.L. Sistema y procedimiento para el recubrimiento en vacio y en continuo de un material en forma de banda.
DE102011100257A1 (de) * 2011-05-03 2013-01-03 Maschinenbau Scholz Gmbh & Co Kg Variable Dichtung für CV-Rohr
EP3771747B1 (de) 2019-08-01 2022-11-30 Vereinigung zur Förderung des Instituts für Kunststoffverarbeitung in Industrie und Handwerk An der Rhein.- Westf. Technischen Hochschule Verfahren und anlage zur kontinuierlichen vakuumbasierten behandlung von bahnware
CN113737149A (zh) * 2020-05-28 2021-12-03 宝山钢铁股份有限公司 一种用于金属带材上的连续真空镀膜密封锁
WO2024052712A1 (en) * 2022-09-05 2024-03-14 Arcelormittal Sealing airlock for deposition chamber

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2384500A (en) * 1942-07-08 1945-09-11 Crown Cork & Seal Co Apparatus and method of coating
DE961771C (de) * 1954-06-27 1957-04-11 Ernst Tuescher Dr Abdichtvorrichtung zum laufenden Hindurchfuehren von Foerdergut, wie Baender, Netze, Faeden, aus einem Raum bestimmten Druckes in einen Raum anderen Druckes
US2853047A (en) * 1954-12-23 1958-09-23 Vac Anstalt Installations for continuously treating strip-like materials in vacuum
US3032890A (en) * 1958-03-28 1962-05-08 Continental Can Co Sealing structures for treating chambers
FR1488202A (fr) * 1962-05-18 1967-07-13 Crompton & Knowles Corp Calfeutrage de récipients sous pression
US3326177A (en) * 1963-09-12 1967-06-20 Pennsalt Chemicals Corp Metal vapor coating apparatus
DE1279426B (de) * 1966-08-24 1968-10-03 Leybold Heraeus Gmbh & Co Kg Bandbedampfungsvorrichtung
DE1911120A1 (de) * 1968-03-08 1969-12-18 Galileo Spa Off Verfahren und Vorrichtung zum halbkontinuierlichen Metallisieren von bahn- oder fadenfoermigem Gut
DD94794A1 (de) * 1972-03-20 1973-01-12
DE2249333C3 (de) * 1972-10-07 1978-10-05 Hoechst Ag, 6000 Frankfurt Abdichtungsvorrichtung für den kontinuierlichen Ein- und Auslauf textiler Warenbahnen an Hochdruckdämpfern
US4013539A (en) * 1973-01-12 1977-03-22 Coulter Information Systems, Inc. Thin film deposition apparatus
GB1461412A (en) * 1973-07-16 1977-01-13 Ici Ltd Seal
GB1451704A (en) * 1974-06-28 1976-10-06 Head Wrightson & Co Ltd Strip cooling
US3959104A (en) * 1974-09-30 1976-05-25 Surface Activation Corporation Electrode structure for generating electrical discharge plasma

Also Published As

Publication number Publication date
DE3129997A1 (de) 1982-04-01
NL8103566A (nl) 1982-02-16
FR2487696A1 (fr) 1982-02-05
GB2084264A (en) 1982-04-07
GB2084264B (en) 1984-04-26
DE3129997C2 (de) 1983-12-29

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