FR2483685B1 - - Google Patents

Info

Publication number
FR2483685B1
FR2483685B1 FR8110413A FR8110413A FR2483685B1 FR 2483685 B1 FR2483685 B1 FR 2483685B1 FR 8110413 A FR8110413 A FR 8110413A FR 8110413 A FR8110413 A FR 8110413A FR 2483685 B1 FR2483685 B1 FR 2483685B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8110413A
Other languages
French (fr)
Other versions
FR2483685A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arris Technology Inc
Original Assignee
Arris Technology Inc
General Instrument Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arris Technology Inc, General Instrument Corp filed Critical Arris Technology Inc
Publication of FR2483685A1 publication Critical patent/FR2483685A1/fr
Application granted granted Critical
Publication of FR2483685B1 publication Critical patent/FR2483685B1/fr
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/64Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66Vertical DMOS [VDMOS] FETs
    • H10D30/668Vertical DMOS [VDMOS] FETs having trench gate electrodes, e.g. UMOS transistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • H10D62/126Top-view geometrical layouts of the regions or the junctions
    • H10D62/127Top-view geometrical layouts of the regions or the junctions of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311Gate electrodes for field-effect devices
    • H10D64/411Gate electrodes for field-effect devices for FETs
    • H10D64/511Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/512Disposition of the gate electrodes, e.g. buried gates
    • H10D64/513Disposition of the gate electrodes, e.g. buried gates within recesses in the substrate, e.g. trench gates, groove gates or buried gates
FR8110413A 1980-05-29 1981-05-26 Transistor de puissance a effet de champ (fet) du type v-mos a grille maillee Granted FR2483685A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/154,280 US4379305A (en) 1980-05-29 1980-05-29 Mesh gate V-MOS power FET

Publications (2)

Publication Number Publication Date
FR2483685A1 FR2483685A1 (fr) 1981-12-04
FR2483685B1 true FR2483685B1 (cg-RX-API-DMAC7.html) 1984-05-18

Family

ID=22550726

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8110413A Granted FR2483685A1 (fr) 1980-05-29 1981-05-26 Transistor de puissance a effet de champ (fet) du type v-mos a grille maillee

Country Status (6)

Country Link
US (1) US4379305A (cg-RX-API-DMAC7.html)
JP (1) JPS5756975A (cg-RX-API-DMAC7.html)
CA (1) CA1154543A (cg-RX-API-DMAC7.html)
DE (1) DE3119137A1 (cg-RX-API-DMAC7.html)
FR (1) FR2483685A1 (cg-RX-API-DMAC7.html)
GB (1) GB2077495B (cg-RX-API-DMAC7.html)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2089119A (en) * 1980-12-10 1982-06-16 Philips Electronic Associated High voltage semiconductor devices
JPS58106870A (ja) * 1981-12-18 1983-06-25 Nissan Motor Co Ltd パワ−mosfet
DE3380136D1 (en) * 1982-04-12 1989-08-03 Gen Electric Semiconductor device having a diffused region of reduced length and method of fabricating the same
JP2739004B2 (ja) * 1992-01-16 1998-04-08 三菱電機株式会社 半導体装置
TW434648B (en) * 1998-04-23 2001-05-16 Int Rectifier Corp P-channel trench mosfet structure
US7462910B1 (en) 1998-10-14 2008-12-09 International Rectifier Corporation P-channel trench MOSFET structure
US7737533B2 (en) * 2006-08-10 2010-06-15 Vishay General Semiconductor Llc Low voltage transient voltage suppressor with tapered recess extending into substrate of device allowing for reduced breakdown voltage
US8072027B2 (en) * 2009-06-08 2011-12-06 Fairchild Semiconductor Corporation 3D channel architecture for semiconductor devices
FR3070222A1 (fr) * 2017-08-16 2019-02-22 Stmicroelectronics (Rousset) Sas Puce comprenant deux transistors mos en parallele
FR3070221B1 (fr) 2017-08-16 2020-05-15 Stmicroelectronics (Rousset) Sas Transistors mos en parallele

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4145703A (en) * 1977-04-15 1979-03-20 Supertex, Inc. High power MOS device and fabrication method therefor
JPS53142189A (en) * 1977-05-17 1978-12-11 Matsushita Electronics Corp Insulating gate type field effect transistor
JPS5469085A (en) * 1977-11-03 1979-06-02 Ei Hoerunii Jiin Large power semiconductor
US4148047A (en) * 1978-01-16 1979-04-03 Honeywell Inc. Semiconductor apparatus
US4219835A (en) * 1978-02-17 1980-08-26 Siliconix, Inc. VMOS Mesa structure and manufacturing process
US4198693A (en) * 1978-03-20 1980-04-15 Texas Instruments Incorporated VMOS Read only memory
NL184551C (nl) * 1978-07-24 1989-08-16 Philips Nv Veldeffekttransistor met geisoleerde stuurelektrode.
US4268537A (en) * 1979-12-03 1981-05-19 Rca Corporation Method for manufacturing a self-aligned contact in a grooved semiconductor surface

Also Published As

Publication number Publication date
JPS5756975A (en) 1982-04-05
GB2077495B (en) 1985-04-11
CA1154543A (en) 1983-09-27
FR2483685A1 (fr) 1981-12-04
US4379305A (en) 1983-04-05
DE3119137A1 (de) 1982-03-04
GB2077495A (en) 1981-12-16

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Legal Events

Date Code Title Description
ST Notification of lapse