FR2483639A1 - Procede de traitement de matieres de reproduction photodurcissables - Google Patents

Procede de traitement de matieres de reproduction photodurcissables Download PDF

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Publication number
FR2483639A1
FR2483639A1 FR8110862A FR8110862A FR2483639A1 FR 2483639 A1 FR2483639 A1 FR 2483639A1 FR 8110862 A FR8110862 A FR 8110862A FR 8110862 A FR8110862 A FR 8110862A FR 2483639 A1 FR2483639 A1 FR 2483639A1
Authority
FR
France
Prior art keywords
photocurable
development
exposure
margin
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8110862A
Other languages
English (en)
French (fr)
Other versions
FR2483639B1 (enExample
Inventor
Mario Grossa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of FR2483639A1 publication Critical patent/FR2483639A1/fr
Application granted granted Critical
Publication of FR2483639B1 publication Critical patent/FR2483639B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
FR8110862A 1980-06-03 1981-06-02 Procede de traitement de matieres de reproduction photodurcissables Granted FR2483639A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3020976A DE3020976C2 (de) 1980-06-03 1980-06-03 Verfahren zur Erhöhung der Verarbeitungsbreite von lichthärtbaren Aufzeichnungsmaterialien

Publications (2)

Publication Number Publication Date
FR2483639A1 true FR2483639A1 (fr) 1981-12-04
FR2483639B1 FR2483639B1 (enExample) 1982-11-26

Family

ID=6103829

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8110862A Granted FR2483639A1 (fr) 1980-06-03 1981-06-02 Procede de traitement de matieres de reproduction photodurcissables

Country Status (6)

Country Link
US (1) US4361642A (enExample)
JP (1) JPS5724940A (enExample)
BE (1) BE889054A (enExample)
DE (1) DE3020976C2 (enExample)
FR (1) FR2483639A1 (enExample)
GB (1) GB2081918B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0559934A1 (en) * 1992-03-11 1993-09-15 International Business Machines Corporation Method and apparatus for deep UV image reversal patterning

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ZA872295B (enExample) * 1986-03-13 1987-09-22
JPH03192718A (ja) * 1989-12-22 1991-08-22 Fujitsu Ltd 半導体装置の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB780218A (en) * 1954-04-23 1957-07-31 Du Pont Photographic process for preparing intaglio and relief images

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3415648A (en) * 1964-08-07 1968-12-10 Philco Ford Corp Pva etch masking process
US3597204A (en) * 1966-10-03 1971-08-03 Hughes Aircraft Co Method of providing induction photography and product
US3723120A (en) * 1971-08-30 1973-03-27 Du Pont Process for hardening photohardenable images
DE2861444D1 (en) * 1977-08-18 1982-02-11 Vickers Ltd Apparatus and method for the controlled processing of radiation sensitive devices in dependence upon the temperature of the developer liquid

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB780218A (en) * 1954-04-23 1957-07-31 Du Pont Photographic process for preparing intaglio and relief images

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0559934A1 (en) * 1992-03-11 1993-09-15 International Business Machines Corporation Method and apparatus for deep UV image reversal patterning

Also Published As

Publication number Publication date
GB2081918B (en) 1984-05-10
BE889054A (fr) 1981-12-02
DE3020976C2 (de) 1983-01-27
US4361642A (en) 1982-11-30
JPS5724940A (en) 1982-02-09
GB2081918A (en) 1982-02-24
DE3020976A1 (de) 1981-12-10
FR2483639B1 (enExample) 1982-11-26
JPS6255771B2 (enExample) 1987-11-20

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