BE889054A - Procede de traitement de matieres de reproduction photodurcissables - Google Patents

Procede de traitement de matieres de reproduction photodurcissables

Info

Publication number
BE889054A
BE889054A BE0/204968A BE204968A BE889054A BE 889054 A BE889054 A BE 889054A BE 0/204968 A BE0/204968 A BE 0/204968A BE 204968 A BE204968 A BE 204968A BE 889054 A BE889054 A BE 889054A
Authority
BE
Belgium
Prior art keywords
photosetting
treatment
reproductive material
reproductive
photosetting reproductive
Prior art date
Application number
BE0/204968A
Other languages
English (en)
French (fr)
Inventor
M Grossa
Original Assignee
Du Pont
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Du Pont filed Critical Du Pont
Publication of BE889054A publication Critical patent/BE889054A/fr

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
BE0/204968A 1980-06-03 1981-06-02 Procede de traitement de matieres de reproduction photodurcissables BE889054A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3020976A DE3020976C2 (de) 1980-06-03 1980-06-03 Verfahren zur Erhöhung der Verarbeitungsbreite von lichthärtbaren Aufzeichnungsmaterialien

Publications (1)

Publication Number Publication Date
BE889054A true BE889054A (fr) 1981-12-02

Family

ID=6103829

Family Applications (1)

Application Number Title Priority Date Filing Date
BE0/204968A BE889054A (fr) 1980-06-03 1981-06-02 Procede de traitement de matieres de reproduction photodurcissables

Country Status (6)

Country Link
US (1) US4361642A (enExample)
JP (1) JPS5724940A (enExample)
BE (1) BE889054A (enExample)
DE (1) DE3020976C2 (enExample)
FR (1) FR2483639A1 (enExample)
GB (1) GB2081918B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ZA872295B (enExample) * 1986-03-13 1987-09-22
JPH03192718A (ja) * 1989-12-22 1991-08-22 Fujitsu Ltd 半導体装置の製造方法
EP0559934A1 (en) * 1992-03-11 1993-09-15 International Business Machines Corporation Method and apparatus for deep UV image reversal patterning

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2892712A (en) * 1954-04-23 1959-06-30 Du Pont Process for preparing relief images
US3415648A (en) * 1964-08-07 1968-12-10 Philco Ford Corp Pva etch masking process
US3597204A (en) * 1966-10-03 1971-08-03 Hughes Aircraft Co Method of providing induction photography and product
US3723120A (en) * 1971-08-30 1973-03-27 Du Pont Process for hardening photohardenable images
DE2861444D1 (en) * 1977-08-18 1982-02-11 Vickers Ltd Apparatus and method for the controlled processing of radiation sensitive devices in dependence upon the temperature of the developer liquid

Also Published As

Publication number Publication date
FR2483639A1 (fr) 1981-12-04
GB2081918B (en) 1984-05-10
DE3020976C2 (de) 1983-01-27
US4361642A (en) 1982-11-30
JPS5724940A (en) 1982-02-09
GB2081918A (en) 1982-02-24
DE3020976A1 (de) 1981-12-10
FR2483639B1 (enExample) 1982-11-26
JPS6255771B2 (enExample) 1987-11-20

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: E.I. DU PONT DE NEMOURS AND CY

Effective date: 19930630