FR2441582A1 - Procede pour preparer des cibles de vaporisation cathodique de grandes dimensions et de composition homogene en tellurure de mercure et de cadmium - Google Patents

Procede pour preparer des cibles de vaporisation cathodique de grandes dimensions et de composition homogene en tellurure de mercure et de cadmium

Info

Publication number
FR2441582A1
FR2441582A1 FR7927738A FR7927738A FR2441582A1 FR 2441582 A1 FR2441582 A1 FR 2441582A1 FR 7927738 A FR7927738 A FR 7927738A FR 7927738 A FR7927738 A FR 7927738A FR 2441582 A1 FR2441582 A1 FR 2441582A1
Authority
FR
France
Prior art keywords
mercury
particles
targets
cadmium
vaporization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7927738A
Other languages
English (en)
French (fr)
Other versions
FR2441582B1 (enExample
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teck Metals Ltd
Original Assignee
Teck Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teck Metals Ltd filed Critical Teck Metals Ltd
Publication of FR2441582A1 publication Critical patent/FR2441582A1/fr
Application granted granted Critical
Publication of FR2441582B1 publication Critical patent/FR2441582B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B19/00—Selenium; Tellurium; Compounds thereof
    • C01B19/007—Tellurides or selenides of metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/02—Compacting only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/12—Active materials
    • H10F77/123—Active materials comprising only Group II-VI materials, e.g. CdS, ZnS or HgCdTe
    • H10F77/1237—Active materials comprising only Group II-VI materials, e.g. CdS, ZnS or HgCdTe having at least three elements, e.g. HgCdTe
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/10—Solid density

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Powder Metallurgy (AREA)
  • Bipolar Transistors (AREA)
FR7927738A 1978-11-09 1979-11-09 Procede pour preparer des cibles de vaporisation cathodique de grandes dimensions et de composition homogene en tellurure de mercure et de cadmium Granted FR2441582A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA316,105A CA1110421A (en) 1978-11-09 1978-11-09 Cadmium mercury telluride sputtering targets

Publications (2)

Publication Number Publication Date
FR2441582A1 true FR2441582A1 (fr) 1980-06-13
FR2441582B1 FR2441582B1 (enExample) 1985-04-19

Family

ID=4112934

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7927738A Granted FR2441582A1 (fr) 1978-11-09 1979-11-09 Procede pour preparer des cibles de vaporisation cathodique de grandes dimensions et de composition homogene en tellurure de mercure et de cadmium

Country Status (5)

Country Link
JP (1) JPS5565338A (enExample)
CA (1) CA1110421A (enExample)
DE (1) DE2944482A1 (enExample)
FR (1) FR2441582A1 (enExample)
GB (1) GB2037264B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2464225A1 (fr) * 1979-08-30 1981-03-06 Hughes Aircraft Co Procede de production de tellurure de mercure et de cadmium monocristallin et ce produit
EP0115629A3 (en) * 1983-01-10 1985-12-04 Merck Patent Gesellschaft Mit Beschrankter Haftung Target for cathodic sputtering

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3627775A1 (de) * 1986-08-16 1988-02-18 Demetron Verfahren zur herstellung von targets

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2265872B1 (enExample) * 1974-03-27 1977-10-14 Anvar

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
THIN SOLID FILMS, vol. 13, 1972, Elsevier Sequoia S.A., LAUSANNE (CH) *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2464225A1 (fr) * 1979-08-30 1981-03-06 Hughes Aircraft Co Procede de production de tellurure de mercure et de cadmium monocristallin et ce produit
EP0115629A3 (en) * 1983-01-10 1985-12-04 Merck Patent Gesellschaft Mit Beschrankter Haftung Target for cathodic sputtering
US4690745A (en) * 1983-01-10 1987-09-01 Merck Patent Gesellschaft Mit Beschrankter Haftung Targets for cathode sputtering

Also Published As

Publication number Publication date
CA1110421A (en) 1981-10-13
GB2037264B (en) 1982-09-29
JPS5565338A (en) 1980-05-16
FR2441582B1 (enExample) 1985-04-19
DE2944482A1 (de) 1980-05-29
GB2037264A (en) 1980-07-09
DE2944482C2 (enExample) 1988-09-08

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Legal Events

Date Code Title Description
ST Notification of lapse