FR2435022A1 - Transducteurs de pression avec senseurs piezo-resistants proteges electriquement - Google Patents

Transducteurs de pression avec senseurs piezo-resistants proteges electriquement

Info

Publication number
FR2435022A1
FR2435022A1 FR7916710A FR7916710A FR2435022A1 FR 2435022 A1 FR2435022 A1 FR 2435022A1 FR 7916710 A FR7916710 A FR 7916710A FR 7916710 A FR7916710 A FR 7916710A FR 2435022 A1 FR2435022 A1 FR 2435022A1
Authority
FR
France
Prior art keywords
piezo
resistant
sensors
screen
pressure transducers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7916710A
Other languages
English (en)
French (fr)
Other versions
FR2435022B1 (de
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Babcock and Wilcox Co
Original Assignee
Babcock and Wilcox Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Babcock and Wilcox Co filed Critical Babcock and Wilcox Co
Publication of FR2435022A1 publication Critical patent/FR2435022A1/fr
Application granted granted Critical
Publication of FR2435022B1 publication Critical patent/FR2435022B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
FR7916710A 1978-08-28 1979-06-28 Transducteurs de pression avec senseurs piezo-resistants proteges electriquement Granted FR2435022A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US93730478A 1978-08-28 1978-08-28

Publications (2)

Publication Number Publication Date
FR2435022A1 true FR2435022A1 (fr) 1980-03-28
FR2435022B1 FR2435022B1 (de) 1983-04-01

Family

ID=25469756

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7916710A Granted FR2435022A1 (fr) 1978-08-28 1979-06-28 Transducteurs de pression avec senseurs piezo-resistants proteges electriquement

Country Status (9)

Country Link
JP (1) JPS5533092A (de)
AU (1) AU503379B1 (de)
BR (1) BR7902641A (de)
CA (1) CA1134021A (de)
DE (1) DE2921043C2 (de)
ES (2) ES480076A1 (de)
FR (1) FR2435022A1 (de)
GB (1) GB2029094B (de)
IT (1) IT1112793B (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4327350A (en) * 1979-07-17 1982-04-27 Data Instruments, Inc. Pressure transducer
JPS5796573A (en) * 1980-12-08 1982-06-15 Hitachi Ltd Semiconductor strain transducer
JPS58197780A (ja) * 1982-05-14 1983-11-17 Hitachi Ltd 半導体圧力変換器
JPS59230101A (ja) * 1983-06-13 1984-12-24 Tokyo Electric Co Ltd 歪センサ
CA1314410C (en) * 1986-12-08 1993-03-16 Masanori Nishiguchi Wiring structure of semiconductor pressure sensor
FR2643148B1 (fr) * 1989-02-15 1991-12-06 Schlumberger Ind Sa Capteur de pression du type semiconducteur sur isolant
DE102007057877A1 (de) 2007-11-29 2009-06-04 Endress + Hauser Gmbh + Co. Kg Drucksensor
CN116222839B (zh) * 2023-05-09 2023-07-18 苏州亿波达光电子科技有限公司 一种感测元件及压力传感器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE875879C (de) * 1951-07-25 1953-05-07 Land Abschirmverfahren fuer Dehnungsmessstreifen
FR2016429A1 (de) * 1968-08-27 1970-05-08 Matsushita Electronics Corp
US4050049A (en) * 1976-02-09 1977-09-20 Signetics Corporation Solid state force transducer, support and method of making same
FR2367280A1 (fr) * 1976-10-08 1978-05-05 Schlumberger Ind Sa Capteur a jauges de contrainte equipe d'une sonde de temperature

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54131892A (en) * 1978-04-05 1979-10-13 Hitachi Ltd Semiconductor pressure converter

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE875879C (de) * 1951-07-25 1953-05-07 Land Abschirmverfahren fuer Dehnungsmessstreifen
FR2016429A1 (de) * 1968-08-27 1970-05-08 Matsushita Electronics Corp
US4050049A (en) * 1976-02-09 1977-09-20 Signetics Corporation Solid state force transducer, support and method of making same
FR2367280A1 (fr) * 1976-10-08 1978-05-05 Schlumberger Ind Sa Capteur a jauges de contrainte equipe d'une sonde de temperature

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
EXBK/69 *

Also Published As

Publication number Publication date
FR2435022B1 (de) 1983-04-01
GB2029094A (en) 1980-03-12
ES480076A1 (es) 1979-11-16
DE2921043A1 (de) 1980-03-13
IT1112793B (it) 1986-01-20
BR7902641A (pt) 1980-03-18
CA1134021A (en) 1982-10-19
AU503379B1 (en) 1979-08-30
JPS5533092A (en) 1980-03-08
ES480075A1 (es) 1979-11-16
IT7922259A0 (it) 1979-04-30
DE2921043C2 (de) 1985-07-04
GB2029094B (en) 1983-01-26

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Legal Events

Date Code Title Description
ST Notification of lapse