FR2423551A1 - Appareil pour le revetement a sec sous vide - Google Patents

Appareil pour le revetement a sec sous vide

Info

Publication number
FR2423551A1
FR2423551A1 FR7827410A FR7827410A FR2423551A1 FR 2423551 A1 FR2423551 A1 FR 2423551A1 FR 7827410 A FR7827410 A FR 7827410A FR 7827410 A FR7827410 A FR 7827410A FR 2423551 A1 FR2423551 A1 FR 2423551A1
Authority
FR
France
Prior art keywords
appts
bulk
chamber
drum
nuts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7827410A
Other languages
English (en)
French (fr)
Other versions
FR2423551B1 (enrdf_load_stackoverflow
Inventor
Chikara Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Publication of FR2423551A1 publication Critical patent/FR2423551A1/fr
Application granted granted Critical
Publication of FR2423551B1 publication Critical patent/FR2423551B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/223—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating specially adapted for coating particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7827410A 1978-04-17 1978-09-25 Appareil pour le revetement a sec sous vide Granted FR2423551A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978049359U JPS58695Y2 (ja) 1978-04-17 1978-04-17 ドライプレ−テイング装置

Publications (2)

Publication Number Publication Date
FR2423551A1 true FR2423551A1 (fr) 1979-11-16
FR2423551B1 FR2423551B1 (enrdf_load_stackoverflow) 1981-01-16

Family

ID=12828815

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7827410A Granted FR2423551A1 (fr) 1978-04-17 1978-09-25 Appareil pour le revetement a sec sous vide

Country Status (2)

Country Link
JP (1) JPS58695Y2 (enrdf_load_stackoverflow)
FR (1) FR2423551A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0293229A3 (en) * 1987-05-29 1989-08-30 Inco Limited Apparatus and process for coloring objects by plasma coating

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1465386A (fr) * 1965-04-30 1967-01-13 American Components Inc Procédé et appareil pour la production de films métalliques sur des supports
US3514388A (en) * 1968-03-18 1970-05-26 Automatic Fire Control Inc Ion metal plating of multiple parts
DE1901891A1 (de) * 1969-01-15 1970-08-20 Siemens Ag Verfahren und Vorrichtung zum Herstellen von Metallschichtwiderstaenden
FR2160604A1 (enrdf_load_stackoverflow) * 1971-11-19 1973-06-29 Siemens Ag
US3926147A (en) * 1974-11-15 1975-12-16 Mc Donnell Douglas Corp Glow discharge-tumbling vapor deposition apparatus
DE2434652A1 (de) * 1974-07-18 1976-01-29 Siemens Ag Verfahren und vorrichtung zum belegen von traegerkoerpern als schuettgut innerhalb einer vakuumbedampfungsapparatur
US4116161A (en) * 1976-11-12 1978-09-26 Mcdonnell Douglas Corporation Dual tumbling barrel plating apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5114157U (enrdf_load_stackoverflow) * 1974-07-16 1976-02-02
JPS5213461A (en) * 1975-07-23 1977-02-01 Hokuriku Elect Ind Device for manufacturing thin metal film

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1465386A (fr) * 1965-04-30 1967-01-13 American Components Inc Procédé et appareil pour la production de films métalliques sur des supports
US3514388A (en) * 1968-03-18 1970-05-26 Automatic Fire Control Inc Ion metal plating of multiple parts
DE1901891A1 (de) * 1969-01-15 1970-08-20 Siemens Ag Verfahren und Vorrichtung zum Herstellen von Metallschichtwiderstaenden
FR2160604A1 (enrdf_load_stackoverflow) * 1971-11-19 1973-06-29 Siemens Ag
DE2434652A1 (de) * 1974-07-18 1976-01-29 Siemens Ag Verfahren und vorrichtung zum belegen von traegerkoerpern als schuettgut innerhalb einer vakuumbedampfungsapparatur
US3926147A (en) * 1974-11-15 1975-12-16 Mc Donnell Douglas Corp Glow discharge-tumbling vapor deposition apparatus
US4116161A (en) * 1976-11-12 1978-09-26 Mcdonnell Douglas Corporation Dual tumbling barrel plating apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0293229A3 (en) * 1987-05-29 1989-08-30 Inco Limited Apparatus and process for coloring objects by plasma coating
US4926792A (en) * 1987-05-29 1990-05-22 Inco Limited Apparatus and process for coloring objects by plasma coating

Also Published As

Publication number Publication date
JPS58695Y2 (ja) 1983-01-07
FR2423551B1 (enrdf_load_stackoverflow) 1981-01-16
JPS54152256U (enrdf_load_stackoverflow) 1979-10-23

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Legal Events

Date Code Title Description
ST Notification of lapse