FR2160604A1 - - Google Patents

Info

Publication number
FR2160604A1
FR2160604A1 FR7240905A FR7240905A FR2160604A1 FR 2160604 A1 FR2160604 A1 FR 2160604A1 FR 7240905 A FR7240905 A FR 7240905A FR 7240905 A FR7240905 A FR 7240905A FR 2160604 A1 FR2160604 A1 FR 2160604A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7240905A
Other languages
French (fr)
Other versions
FR2160604B3 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19712157571 external-priority patent/DE2157571C3/de
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of FR2160604A1 publication Critical patent/FR2160604A1/fr
Application granted granted Critical
Publication of FR2160604B3 publication Critical patent/FR2160604B3/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7240905A 1971-11-19 1972-11-17 Expired FR2160604B3 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712157571 DE2157571C3 (de) 1971-11-19 Vorrichtung zum Beschichten von Schüttgut unter Vakuum

Publications (2)

Publication Number Publication Date
FR2160604A1 true FR2160604A1 (enrdf_load_stackoverflow) 1973-06-29
FR2160604B3 FR2160604B3 (enrdf_load_stackoverflow) 1976-01-09

Family

ID=5825622

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7240905A Expired FR2160604B3 (enrdf_load_stackoverflow) 1971-11-19 1972-11-17

Country Status (6)

Country Link
JP (1) JPS4862680A (enrdf_load_stackoverflow)
BE (1) BE791563A (enrdf_load_stackoverflow)
FR (1) FR2160604B3 (enrdf_load_stackoverflow)
GB (1) GB1365793A (enrdf_load_stackoverflow)
IT (1) IT970857B (enrdf_load_stackoverflow)
NL (1) NL7215178A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2423551A1 (fr) * 1978-04-17 1979-11-16 Ulvac Corp Appareil pour le revetement a sec sous vide

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2423551A1 (fr) * 1978-04-17 1979-11-16 Ulvac Corp Appareil pour le revetement a sec sous vide

Also Published As

Publication number Publication date
GB1365793A (en) 1974-09-04
IT970857B (it) 1974-04-20
BE791563A (fr) 1973-03-16
DE2157571B2 (de) 1976-01-29
FR2160604B3 (enrdf_load_stackoverflow) 1976-01-09
JPS4862680A (enrdf_load_stackoverflow) 1973-09-01
NL7215178A (enrdf_load_stackoverflow) 1973-05-22
DE2157571A1 (de) 1973-05-30

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Legal Events

Date Code Title Description
ST Notification of lapse