GB1365793A - Coating substrates under vacuum - Google Patents

Coating substrates under vacuum

Info

Publication number
GB1365793A
GB1365793A GB5271172A GB5271172A GB1365793A GB 1365793 A GB1365793 A GB 1365793A GB 5271172 A GB5271172 A GB 5271172A GB 5271172 A GB5271172 A GB 5271172A GB 1365793 A GB1365793 A GB 1365793A
Authority
GB
United Kingdom
Prior art keywords
substrates
under vacuum
coating substrates
substrates under
nov
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5271172A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19712157571 external-priority patent/DE2157571C3/en
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB1365793A publication Critical patent/GB1365793A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1365793 Vapour deposition apparatus SIEMENS A G 15 Nov 1972 [19 Nov 1971] 52711/72 Heading C7F Substrates 9 are coated whilst moving in a perforated, rotating frustro-conical basket 3 which has a device, e.g. screw feed, an inner frustro-conical member or as shown a chute 7 for returning the substrates to the upper end of the basket. The substrates may be heated by radiation or by making the return device an electric resistance heater. The walls of the vacuum chamber may be covered with aluminium foil.
GB5271172A 1971-11-19 1972-11-15 Coating substrates under vacuum Expired GB1365793A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712157571 DE2157571C3 (en) 1971-11-19 Device for coating bulk goods under vacuum

Publications (1)

Publication Number Publication Date
GB1365793A true GB1365793A (en) 1974-09-04

Family

ID=5825622

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5271172A Expired GB1365793A (en) 1971-11-19 1972-11-15 Coating substrates under vacuum

Country Status (6)

Country Link
JP (1) JPS4862680A (en)
BE (1) BE791563A (en)
FR (1) FR2160604B3 (en)
GB (1) GB1365793A (en)
IT (1) IT970857B (en)
NL (1) NL7215178A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58695Y2 (en) * 1978-04-17 1983-01-07 日本真空技術株式会社 Dry plating equipment

Also Published As

Publication number Publication date
FR2160604B3 (en) 1976-01-09
BE791563A (en) 1973-03-16
NL7215178A (en) 1973-05-22
IT970857B (en) 1974-04-20
DE2157571B2 (en) 1976-01-29
FR2160604A1 (en) 1973-06-29
DE2157571A1 (en) 1973-05-30
JPS4862680A (en) 1973-09-01

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee