IT970857B - Dispositivo per rivestire con strati protettivi o isolanti corpi di supporto con un pro cesso di barilatura sotto vuoto - Google Patents

Dispositivo per rivestire con strati protettivi o isolanti corpi di supporto con un pro cesso di barilatura sotto vuoto

Info

Publication number
IT970857B
IT970857B IT3166972A IT3166972A IT970857B IT 970857 B IT970857 B IT 970857B IT 3166972 A IT3166972 A IT 3166972A IT 3166972 A IT3166972 A IT 3166972A IT 970857 B IT970857 B IT 970857B
Authority
IT
Italy
Prior art keywords
protective
insulating layers
support bodies
covering support
vacuum tumbling
Prior art date
Application number
IT3166972A
Other languages
English (en)
Italian (it)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19712157571 external-priority patent/DE2157571C3/de
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of IT970857B publication Critical patent/IT970857B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
IT3166972A 1971-11-19 1972-11-15 Dispositivo per rivestire con strati protettivi o isolanti corpi di supporto con un pro cesso di barilatura sotto vuoto IT970857B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712157571 DE2157571C3 (de) 1971-11-19 Vorrichtung zum Beschichten von Schüttgut unter Vakuum

Publications (1)

Publication Number Publication Date
IT970857B true IT970857B (it) 1974-04-20

Family

ID=5825622

Family Applications (1)

Application Number Title Priority Date Filing Date
IT3166972A IT970857B (it) 1971-11-19 1972-11-15 Dispositivo per rivestire con strati protettivi o isolanti corpi di supporto con un pro cesso di barilatura sotto vuoto

Country Status (6)

Country Link
JP (1) JPS4862680A (enrdf_load_stackoverflow)
BE (1) BE791563A (enrdf_load_stackoverflow)
FR (1) FR2160604B3 (enrdf_load_stackoverflow)
GB (1) GB1365793A (enrdf_load_stackoverflow)
IT (1) IT970857B (enrdf_load_stackoverflow)
NL (1) NL7215178A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58695Y2 (ja) * 1978-04-17 1983-01-07 日本真空技術株式会社 ドライプレ−テイング装置

Also Published As

Publication number Publication date
DE2157571B2 (de) 1976-01-29
GB1365793A (en) 1974-09-04
FR2160604A1 (enrdf_load_stackoverflow) 1973-06-29
BE791563A (fr) 1973-03-16
FR2160604B3 (enrdf_load_stackoverflow) 1976-01-09
DE2157571A1 (de) 1973-05-30
JPS4862680A (enrdf_load_stackoverflow) 1973-09-01
NL7215178A (enrdf_load_stackoverflow) 1973-05-22

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