BE791563A - Installation pour revetir des corps de support suivant un procede en vrac sous vide - Google Patents

Installation pour revetir des corps de support suivant un procede en vrac sous vide

Info

Publication number
BE791563A
BE791563A BE791563DA BE791563A BE 791563 A BE791563 A BE 791563A BE 791563D A BE791563D A BE 791563DA BE 791563 A BE791563 A BE 791563A
Authority
BE
Belgium
Prior art keywords
installation
support bodies
bulk process
covering support
bodies following
Prior art date
Application number
Other languages
English (en)
French (fr)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19712157571 external-priority patent/DE2157571C3/de
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of BE791563A publication Critical patent/BE791563A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
BE791563D 1971-11-19 1972-11-17 Installation pour revetir des corps de support suivant un procede en vrac sous vide BE791563A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712157571 DE2157571C3 (de) 1971-11-19 Vorrichtung zum Beschichten von Schüttgut unter Vakuum

Publications (1)

Publication Number Publication Date
BE791563A true BE791563A (fr) 1973-03-16

Family

ID=5825622

Family Applications (1)

Application Number Title Priority Date Filing Date
BE791563D BE791563A (fr) 1971-11-19 1972-11-17 Installation pour revetir des corps de support suivant un procede en vrac sous vide

Country Status (6)

Country Link
JP (1) JPS4862680A (enrdf_load_stackoverflow)
BE (1) BE791563A (enrdf_load_stackoverflow)
FR (1) FR2160604B3 (enrdf_load_stackoverflow)
GB (1) GB1365793A (enrdf_load_stackoverflow)
IT (1) IT970857B (enrdf_load_stackoverflow)
NL (1) NL7215178A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58695Y2 (ja) * 1978-04-17 1983-01-07 日本真空技術株式会社 ドライプレ−テイング装置

Also Published As

Publication number Publication date
IT970857B (it) 1974-04-20
DE2157571B2 (de) 1976-01-29
GB1365793A (en) 1974-09-04
FR2160604A1 (enrdf_load_stackoverflow) 1973-06-29
FR2160604B3 (enrdf_load_stackoverflow) 1976-01-09
DE2157571A1 (de) 1973-05-30
JPS4862680A (enrdf_load_stackoverflow) 1973-09-01
NL7215178A (enrdf_load_stackoverflow) 1973-05-22

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