JPS4862680A - - Google Patents

Info

Publication number
JPS4862680A
JPS4862680A JP11573772A JP11573772A JPS4862680A JP S4862680 A JPS4862680 A JP S4862680A JP 11573772 A JP11573772 A JP 11573772A JP 11573772 A JP11573772 A JP 11573772A JP S4862680 A JPS4862680 A JP S4862680A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11573772A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19712157571 external-priority patent/DE2157571C3/de
Application filed filed Critical
Publication of JPS4862680A publication Critical patent/JPS4862680A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP11573772A 1971-11-19 1972-11-20 Pending JPS4862680A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712157571 DE2157571C3 (de) 1971-11-19 Vorrichtung zum Beschichten von Schüttgut unter Vakuum

Publications (1)

Publication Number Publication Date
JPS4862680A true JPS4862680A (enrdf_load_stackoverflow) 1973-09-01

Family

ID=5825622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11573772A Pending JPS4862680A (enrdf_load_stackoverflow) 1971-11-19 1972-11-20

Country Status (6)

Country Link
JP (1) JPS4862680A (enrdf_load_stackoverflow)
BE (1) BE791563A (enrdf_load_stackoverflow)
FR (1) FR2160604B3 (enrdf_load_stackoverflow)
GB (1) GB1365793A (enrdf_load_stackoverflow)
IT (1) IT970857B (enrdf_load_stackoverflow)
NL (1) NL7215178A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58695Y2 (ja) * 1978-04-17 1983-01-07 日本真空技術株式会社 ドライプレ−テイング装置

Also Published As

Publication number Publication date
GB1365793A (en) 1974-09-04
IT970857B (it) 1974-04-20
BE791563A (fr) 1973-03-16
DE2157571B2 (de) 1976-01-29
FR2160604B3 (enrdf_load_stackoverflow) 1976-01-09
NL7215178A (enrdf_load_stackoverflow) 1973-05-22
FR2160604A1 (enrdf_load_stackoverflow) 1973-06-29
DE2157571A1 (de) 1973-05-30

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