FR2415348A1 - Procede et dispositif pour la correction des aberrations provoquees par deviation dans un appareil a rayonnement corpusculaire - Google Patents

Procede et dispositif pour la correction des aberrations provoquees par deviation dans un appareil a rayonnement corpusculaire

Info

Publication number
FR2415348A1
FR2415348A1 FR7901658A FR7901658A FR2415348A1 FR 2415348 A1 FR2415348 A1 FR 2415348A1 FR 7901658 A FR7901658 A FR 7901658A FR 7901658 A FR7901658 A FR 7901658A FR 2415348 A1 FR2415348 A1 FR 2415348A1
Authority
FR
France
Prior art keywords
distortion
astigmatism
coma
deflection
compensates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7901658A
Other languages
English (en)
French (fr)
Other versions
FR2415348B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
VEB Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VEB Carl Zeiss Jena GmbH filed Critical VEB Carl Zeiss Jena GmbH
Publication of FR2415348A1 publication Critical patent/FR2415348A1/fr
Application granted granted Critical
Publication of FR2415348B1 publication Critical patent/FR2415348B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/093—Deviation, concentration or focusing of the beam by electric or magnetic means by magnetic means

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Electron Beam Exposure (AREA)
FR7901658A 1978-01-24 1979-01-23 Procede et dispositif pour la correction des aberrations provoquees par deviation dans un appareil a rayonnement corpusculaire Granted FR2415348A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD20337678A DD135311A1 (de) 1978-01-24 1978-01-24 Verfahren und einrichtung zur korrektur der ablenkaberrationen in einem korpuskularstrahlgeraet

Publications (2)

Publication Number Publication Date
FR2415348A1 true FR2415348A1 (fr) 1979-08-17
FR2415348B1 FR2415348B1 (enrdf_load_stackoverflow) 1984-10-12

Family

ID=5511337

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7901658A Granted FR2415348A1 (fr) 1978-01-24 1979-01-23 Procede et dispositif pour la correction des aberrations provoquees par deviation dans un appareil a rayonnement corpusculaire

Country Status (3)

Country Link
DD (1) DD135311A1 (enrdf_load_stackoverflow)
DE (1) DE2901426A1 (enrdf_load_stackoverflow)
FR (1) FR2415348A1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0175933A1 (de) * 1984-09-21 1986-04-02 Siemens Aktiengesellschaft Rasterlinsen-System ohne Ablenkfarbfehler zur Materialbearbeitung mit Korpuskularstrahlen
US8405045B2 (en) 2010-12-03 2013-03-26 Carl Zeiss Nts Gmbh Particle beam device with deflection system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0175933A1 (de) * 1984-09-21 1986-04-02 Siemens Aktiengesellschaft Rasterlinsen-System ohne Ablenkfarbfehler zur Materialbearbeitung mit Korpuskularstrahlen
US8405045B2 (en) 2010-12-03 2013-03-26 Carl Zeiss Nts Gmbh Particle beam device with deflection system

Also Published As

Publication number Publication date
DD135311A1 (de) 1979-04-25
FR2415348B1 (enrdf_load_stackoverflow) 1984-10-12
DE2901426A1 (de) 1979-07-26

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Legal Events

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