FR2415348A1 - Correction circuit for deflection aberrations in electron microscopes - compensates third-order energy errors, coma, astigmatism and distortion, by induced distortion from focussing system - Google Patents
Correction circuit for deflection aberrations in electron microscopes - compensates third-order energy errors, coma, astigmatism and distortion, by induced distortion from focussing systemInfo
- Publication number
- FR2415348A1 FR2415348A1 FR7901658A FR7901658A FR2415348A1 FR 2415348 A1 FR2415348 A1 FR 2415348A1 FR 7901658 A FR7901658 A FR 7901658A FR 7901658 A FR7901658 A FR 7901658A FR 2415348 A1 FR2415348 A1 FR 2415348A1
- Authority
- FR
- France
- Prior art keywords
- distortion
- astigmatism
- coma
- correction circuit
- deflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
- G21K1/093—Deviation, concentration or focusing of the beam by electric or magnetic means by magnetic means
Abstract
The correction circuit, for deflection aberrations in electron microscopes, corrects given third order or more aberrations. Energy errors and coma are corrected by setting positional angle and exiciting and deflection system comprising two deflection components. The astigmatism of the first component is compensated by the astigmatism of the second such that isotropic astigmatism is adjusted by the position and anisotropic astigmatism by the field length of the first deflect on component. Distortion caused by the deflection components is compensated by the focussing system's induced distortion.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD20337678A DD135311A1 (en) | 1978-01-24 | 1978-01-24 | METHOD AND DEVICE FOR CORRECTING DEFLECTION CERAMICS IN A CORPUSCULAR RADIATOR |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2415348A1 true FR2415348A1 (en) | 1979-08-17 |
FR2415348B1 FR2415348B1 (en) | 1984-10-12 |
Family
ID=5511337
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7901658A Granted FR2415348A1 (en) | 1978-01-24 | 1979-01-23 | Correction circuit for deflection aberrations in electron microscopes - compensates third-order energy errors, coma, astigmatism and distortion, by induced distortion from focussing system |
Country Status (3)
Country | Link |
---|---|
DD (1) | DD135311A1 (en) |
DE (1) | DE2901426A1 (en) |
FR (1) | FR2415348A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0175933A1 (en) * | 1984-09-21 | 1986-04-02 | Siemens Aktiengesellschaft | Scanning lens system without deflection chromatic defects for corpuscular beam treatment of material |
US8405045B2 (en) | 2010-12-03 | 2013-03-26 | Carl Zeiss Nts Gmbh | Particle beam device with deflection system |
-
1978
- 1978-01-24 DD DD20337678A patent/DD135311A1/en not_active IP Right Cessation
-
1979
- 1979-01-16 DE DE19792901426 patent/DE2901426A1/en not_active Withdrawn
- 1979-01-23 FR FR7901658A patent/FR2415348A1/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0175933A1 (en) * | 1984-09-21 | 1986-04-02 | Siemens Aktiengesellschaft | Scanning lens system without deflection chromatic defects for corpuscular beam treatment of material |
US8405045B2 (en) | 2010-12-03 | 2013-03-26 | Carl Zeiss Nts Gmbh | Particle beam device with deflection system |
Also Published As
Publication number | Publication date |
---|---|
DD135311A1 (en) | 1979-04-25 |
FR2415348B1 (en) | 1984-10-12 |
DE2901426A1 (en) | 1979-07-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |