DD135311A1 - METHOD AND DEVICE FOR CORRECTING DEFLECTION CERAMICS IN A CORPUSCULAR RADIATOR - Google Patents

METHOD AND DEVICE FOR CORRECTING DEFLECTION CERAMICS IN A CORPUSCULAR RADIATOR

Info

Publication number
DD135311A1
DD135311A1 DD20337678A DD20337678A DD135311A1 DD 135311 A1 DD135311 A1 DD 135311A1 DD 20337678 A DD20337678 A DD 20337678A DD 20337678 A DD20337678 A DD 20337678A DD 135311 A1 DD135311 A1 DD 135311A1
Authority
DD
German Democratic Republic
Prior art keywords
corpuscular
radiator
ceramics
correcting deflection
deflection
Prior art date
Application number
DD20337678A
Other languages
German (de)
Inventor
Eberhard Hahn
Original Assignee
Eberhard Hahn
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eberhard Hahn filed Critical Eberhard Hahn
Priority to DD20337678A priority Critical patent/DD135311A1/en
Priority to DE19792901426 priority patent/DE2901426A1/en
Priority to FR7901658A priority patent/FR2415348A1/en
Publication of DD135311A1 publication Critical patent/DD135311A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/093—Deviation, concentration or focusing of the beam by electric or magnetic means by magnetic means
DD20337678A 1978-01-24 1978-01-24 METHOD AND DEVICE FOR CORRECTING DEFLECTION CERAMICS IN A CORPUSCULAR RADIATOR DD135311A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DD20337678A DD135311A1 (en) 1978-01-24 1978-01-24 METHOD AND DEVICE FOR CORRECTING DEFLECTION CERAMICS IN A CORPUSCULAR RADIATOR
DE19792901426 DE2901426A1 (en) 1978-01-24 1979-01-16 PROCEDURE AND EQUIPMENT FOR CORRECTING DEFLECTION CABERRATIONS IN A BODY BLAST DEVICE
FR7901658A FR2415348A1 (en) 1978-01-24 1979-01-23 Correction circuit for deflection aberrations in electron microscopes - compensates third-order energy errors, coma, astigmatism and distortion, by induced distortion from focussing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD20337678A DD135311A1 (en) 1978-01-24 1978-01-24 METHOD AND DEVICE FOR CORRECTING DEFLECTION CERAMICS IN A CORPUSCULAR RADIATOR

Publications (1)

Publication Number Publication Date
DD135311A1 true DD135311A1 (en) 1979-04-25

Family

ID=5511337

Family Applications (1)

Application Number Title Priority Date Filing Date
DD20337678A DD135311A1 (en) 1978-01-24 1978-01-24 METHOD AND DEVICE FOR CORRECTING DEFLECTION CERAMICS IN A CORPUSCULAR RADIATOR

Country Status (3)

Country Link
DD (1) DD135311A1 (en)
DE (1) DE2901426A1 (en)
FR (1) FR2415348A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010053194A1 (en) * 2010-12-03 2012-06-06 Carl Zeiss Nts Gmbh Particle beam device with deflection system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0175933A1 (en) * 1984-09-21 1986-04-02 Siemens Aktiengesellschaft Scanning lens system without deflection chromatic defects for corpuscular beam treatment of material

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010053194A1 (en) * 2010-12-03 2012-06-06 Carl Zeiss Nts Gmbh Particle beam device with deflection system
US8405045B2 (en) 2010-12-03 2013-03-26 Carl Zeiss Nts Gmbh Particle beam device with deflection system
EP2461346A3 (en) * 2010-12-03 2013-12-04 Carl Zeiss NTS GmbH Particle beam apparatus with deflection system

Also Published As

Publication number Publication date
FR2415348A1 (en) 1979-08-17
FR2415348B1 (en) 1984-10-12
DE2901426A1 (en) 1979-07-26

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Legal Events

Date Code Title Description
ENJ Ceased due to non-payment of renewal fee