FR2413479A1 - Dispositif pour pulverisation cathodique d'un revetement sur un cylindre - Google Patents

Dispositif pour pulverisation cathodique d'un revetement sur un cylindre

Info

Publication number
FR2413479A1
FR2413479A1 FR7836513A FR7836513A FR2413479A1 FR 2413479 A1 FR2413479 A1 FR 2413479A1 FR 7836513 A FR7836513 A FR 7836513A FR 7836513 A FR7836513 A FR 7836513A FR 2413479 A1 FR2413479 A1 FR 2413479A1
Authority
FR
France
Prior art keywords
substrate
coating
chuck
cylinder
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7836513A
Other languages
English (en)
Other versions
FR2413479B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coulter Systems Corp
Original Assignee
Coulter Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Coulter Systems Corp filed Critical Coulter Systems Corp
Publication of FR2413479A1 publication Critical patent/FR2413479A1/fr
Application granted granted Critical
Publication of FR2413479B1 publication Critical patent/FR2413479B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

L'INVENTION CONCERNE UN DISPOSITIF POUR LA PULVERISATION A HAUTE FREQUENCE DE CYLINDRES. SELON L'INVENTION, UN SUBSTRAT CYLINDRIQUE EN METAL EST MONTE SUR UN MANDRIN 28, QUI EST INSTALLE DANS UNE CHAMBRE DE PULVERISATION 20. DES CIBLES 30 SONT AGENCEES AUTOUR DU SUBSTRAT CYLINDRIQUE 24. LE SUBSTRAT FORME L'ANODE OU IL EST MONTE SUR L'ANODE. L'OPERATION DE PULVERISATION PERMET D'APPLIQUER UN REVETEMENT TRES UNIFORME D'UN MATERIAU PHOTOCONDUCTEUR SUR LE SUBSTRAT. LE CYLINDRE COMPLETE PEUT ETRE RETIRE DE LA CHAMBRE 20 EN MEME TEMPS QUE LE MANDRIN 28 ET ETRE REMPLACE PAR UN AUTRE SUBSTRAT ANALOGUE SUR UN AUTRE MANDRIN. LE CYLINDRE FINI 22 PEUT ETRE UN MANCHON EN METAL MINCE SANS SOUDURE AYANT UN REVETEMENT DE MATERIAU PHOTOCONDUCTEUR D'UNE EPAISSEUR ET DE PROPRIETES UNIFORMES. L'INVENTION S'APPLIQUE NOTAMMENT AUX CYLINDRES D'IMPRESSION.
FR7836513A 1977-12-27 1978-12-27 Dispositif pour pulverisation cathodique d'un revetement sur un cylindre Expired FR2413479B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/864,378 US4151064A (en) 1977-12-27 1977-12-27 Apparatus for sputtering cylinders

Publications (2)

Publication Number Publication Date
FR2413479A1 true FR2413479A1 (fr) 1979-07-27
FR2413479B1 FR2413479B1 (fr) 1985-07-05

Family

ID=25343141

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7836513A Expired FR2413479B1 (fr) 1977-12-27 1978-12-27 Dispositif pour pulverisation cathodique d'un revetement sur un cylindre

Country Status (6)

Country Link
US (1) US4151064A (fr)
CH (1) CH626456A5 (fr)
DE (1) DE2856364C2 (fr)
FR (1) FR2413479B1 (fr)
NL (1) NL7812572A (fr)
SE (1) SE447272B (fr)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4298444A (en) * 1978-10-11 1981-11-03 Heat Mirror Associates Method for multilayer thin film deposition
US4204942A (en) * 1978-10-11 1980-05-27 Heat Mirror Associates Apparatus for multilayer thin film deposition
US4304983A (en) * 1980-06-26 1981-12-08 Rca Corporation Plasma etching device and process
US4290877A (en) * 1980-09-08 1981-09-22 The United States Of America As Represented By The Secretary Of The Interior Sputtering apparatus for coating elongated tubes and strips
DE3107914A1 (de) * 1981-03-02 1982-09-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zum beschichten von formteilen durch katodenzerstaeubung
JPS6037188B2 (ja) * 1981-08-27 1985-08-24 三菱マテリアル株式会社 スパツタリング装置
US4508053A (en) * 1983-01-05 1985-04-02 Xis, Incorporated Vacuum deposition apparatus for manufacturing selenium photoreceptors
DE3306738A1 (de) * 1983-02-25 1984-08-30 Berna AG Olten, Olten Vorrichtung und verfahren zur beschichtung von substraten mittels glimmentladung, sowie deren anwendung
GB8328858D0 (en) * 1983-10-28 1983-11-30 Atomic Energy Authority Uk Metal vapour deposition
GB2147973B (en) * 1983-10-13 1986-06-18 Atomic Energy Authority Uk Metal vapour deposition drum construction
US4560462A (en) * 1984-06-22 1985-12-24 Westinghouse Electric Corp. Apparatus for coating nuclear fuel pellets with a burnable absorber
GB8512455D0 (en) * 1985-05-16 1985-06-19 Atomic Energy Authority Uk Coating apparatus
NL8602759A (nl) * 1986-10-31 1988-05-16 Bekaert Sa Nv Werkwijze en inrichting voor het behandelen van een langwerpig substraat, dat van een deklaag voorzien is; alsmede volgens die werkwijze behandelde substraten en met deze substraten versterkte voorwerpen uit polymeermateriaal.
US4814056A (en) * 1987-06-23 1989-03-21 Vac-Tec Systems, Inc. Apparatus for producing graded-composition coatings
US5798027A (en) * 1988-02-08 1998-08-25 Optical Coating Laboratory, Inc. Process for depositing optical thin films on both planar and non-planar substrates
US4851095A (en) * 1988-02-08 1989-07-25 Optical Coating Laboratory, Inc. Magnetron sputtering apparatus and process
US5618388A (en) * 1988-02-08 1997-04-08 Optical Coating Laboratory, Inc. Geometries and configurations for magnetron sputtering apparatus
US5225057A (en) * 1988-02-08 1993-07-06 Optical Coating Laboratory, Inc. Process for depositing optical films on both planar and non-planar substrates
JPH08176821A (ja) * 1994-12-26 1996-07-09 Shincron:Kk 薄膜形成方法および装置
US6401614B1 (en) * 1996-03-14 2002-06-11 Rotoincisa S.R.L. Process for preparing removable metal sleeves for printing machines
US5733600A (en) * 1996-11-13 1998-03-31 Powderject Vaccines, Inc. Method and apparatus for preparing sample cartridges for a particle acceleration device
WO2001053559A1 (fr) 2000-01-24 2001-07-26 Smart Therapeutics, Inc. Dispositif d'alliage a memoire de forme a couche mince et procede
WO2004005574A2 (fr) * 2002-07-02 2004-01-15 Academy Precision Materials A Division Of Academy Corporation Cible rotative
US20050276381A1 (en) * 2003-07-02 2005-12-15 Academy Corporation Rotary target locking ring assembly
US7169232B2 (en) * 2004-06-01 2007-01-30 Eastman Kodak Company Producing repetitive coatings on a flexible substrate
US20060118210A1 (en) * 2004-10-04 2006-06-08 Johnson A D Portable energy storage devices and methods
US7763342B2 (en) * 2005-03-31 2010-07-27 Tini Alloy Company Tear-resistant thin film methods of fabrication
PL1782951T3 (pl) * 2005-11-03 2008-05-30 Ball Europe Gmbh Trzpień naprężający stosowany w druku cyfrowym
US20070246233A1 (en) * 2006-04-04 2007-10-25 Johnson A D Thermal actuator for fire protection sprinkler head
US20080075557A1 (en) * 2006-09-22 2008-03-27 Johnson A David Constant load bolt
US20080213062A1 (en) * 2006-09-22 2008-09-04 Tini Alloy Company Constant load fastener
WO2008133738A2 (fr) 2006-12-01 2008-11-06 Tini Alloy Company Procédé d'alliage de composants réactifs
US8584767B2 (en) * 2007-01-25 2013-11-19 Tini Alloy Company Sprinkler valve with active actuation
US8684101B2 (en) * 2007-01-25 2014-04-01 Tini Alloy Company Frangible shape memory alloy fire sprinkler valve actuator
US8007674B2 (en) * 2007-07-30 2011-08-30 Tini Alloy Company Method and devices for preventing restenosis in cardiovascular stents
US8556969B2 (en) 2007-11-30 2013-10-15 Ormco Corporation Biocompatible copper-based single-crystal shape memory alloys
US7842143B2 (en) * 2007-12-03 2010-11-30 Tini Alloy Company Hyperelastic shape setting devices and fabrication methods
US8382917B2 (en) 2007-12-03 2013-02-26 Ormco Corporation Hyperelastic shape setting devices and fabrication methods
US10124197B2 (en) 2012-08-31 2018-11-13 TiNi Allot Company Fire sprinkler valve actuator
US11040230B2 (en) 2012-08-31 2021-06-22 Tini Alloy Company Fire sprinkler valve actuator
US10596492B2 (en) 2014-07-09 2020-03-24 Sudhin Biopharma Particle settling devices
CN109112487A (zh) * 2017-12-08 2019-01-01 常州市知豆信息科技有限公司 一种具有高稳定性oled基板送入装置的oled蒸镀设备
CN114481047B (zh) * 2022-01-26 2022-09-27 广东省新兴激光等离子体技术研究院 小尺寸工件镀膜装置、真空镀膜机及其镀膜方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1590800A (fr) * 1967-11-06 1970-04-20
FR1602786A (fr) * 1968-03-25 1971-01-25
US3911162A (en) * 1972-04-17 1975-10-07 Xerox Corp System for vapor deposition of thin films
FR2322666A1 (fr) * 1973-01-12 1977-04-01 Coulter Information Systems Appareil pour deposer une pellicule mince en utilisant un moyen formant cible segmentee
FR2354393A1 (fr) * 1976-06-10 1978-01-06 Univ Sydney Procede et dispositif de pulverisation cathodique reactive

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2233070A (en) * 1938-03-09 1941-02-25 Atlantic Rayon Corp Holder for hollow articles
US2721535A (en) * 1953-11-09 1955-10-25 Owens Illinois Glass Co Apparatus for decorating glassware
AT258664B (de) * 1964-08-25 1967-12-11 Fritz Dr Grasenick Vorrichtung zur Herstellung und bzw. oder zum Abbau von Schichten mittels elektrischer Gasentladungen
DE1761462A1 (de) * 1967-05-26 1971-06-16 Zimmer Johannes Einrichtung an Schablonendruckmaschinen
US3649502A (en) * 1969-08-14 1972-03-14 Precision Instr Co Apparatus for supported discharge sputter-coating of a substrate
CH544274A (de) * 1971-10-27 1973-11-15 Balzers Patent Beteilig Ag Einrichtung zum Kühlen von Werkstücken, die einer Behandlung im Vakuum unterworfen werden
US4014779A (en) * 1974-11-01 1977-03-29 Coulter Information Systems, Inc. Sputtering apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1590800A (fr) * 1967-11-06 1970-04-20
FR1602786A (fr) * 1968-03-25 1971-01-25
US3911162A (en) * 1972-04-17 1975-10-07 Xerox Corp System for vapor deposition of thin films
FR2322666A1 (fr) * 1973-01-12 1977-04-01 Coulter Information Systems Appareil pour deposer une pellicule mince en utilisant un moyen formant cible segmentee
FR2354393A1 (fr) * 1976-06-10 1978-01-06 Univ Sydney Procede et dispositif de pulverisation cathodique reactive

Also Published As

Publication number Publication date
DE2856364C2 (de) 1986-01-09
CH626456A5 (fr) 1981-11-13
DE2856364A1 (de) 1979-07-05
FR2413479B1 (fr) 1985-07-05
SE447272B (sv) 1986-11-03
US4151064A (en) 1979-04-24
NL7812572A (nl) 1979-06-29
SE7813332L (sv) 1979-06-28

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse