FR2409500A1 - Transducteur a semiconducteur en boitier - Google Patents
Transducteur a semiconducteur en boitierInfo
- Publication number
- FR2409500A1 FR2409500A1 FR7832512A FR7832512A FR2409500A1 FR 2409500 A1 FR2409500 A1 FR 2409500A1 FR 7832512 A FR7832512 A FR 7832512A FR 7832512 A FR7832512 A FR 7832512A FR 2409500 A1 FR2409500 A1 FR 2409500A1
- Authority
- FR
- France
- Prior art keywords
- transducer
- pad
- semiconductor
- boxed
- semiconductor transducer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 239000012528 membrane Substances 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 abstract 1
- 230000006835 compression Effects 0.000 abstract 1
- 238000007906 compression Methods 0.000 abstract 1
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
- Coupling Device And Connection With Printed Circuit (AREA)
Abstract
UN TRANSDUCTEUR A SEMICONDUCTEUR EST UNI PAR SOUDAGE INVERSE SANS FIL A UNE PASTILLE D'INTERFACE SEMICONDUCTRICE QUI EST MONTE SUR LE BOITIER EN CERAMIQUE. UN COUPLAGE THERMIQUE ENTRE LE BOITIER ET LA PASTILLE DE TRANSDUCTEUR EST REDUIT AU MINIMUM PAR L'AIRE DE CONTACT PEU ETENDUE ENTRE LA PASTILLE DE TRANSDUCTEUR ET LA PASTILLE D'INTERFACE. UN ESPACEMENT DE LA DIMENSION DU MICRON ENTRE LA MEMBRANE FORMANT RESSORT DANS LA PASTILLE DE TRANSDUCTEUR ET LA PASTILLE D'INTERFACE PRODUIT UN AMORTISSEMENT PAR COMPRESSION DE FILM DE LA MEMBRANE FORMANT RESSORT. APPLICATION: TRANSDUCTEUR DE FORCE, A SEMICONDUCTEUR.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/852,909 US4129042A (en) | 1977-11-18 | 1977-11-18 | Semiconductor transducer packaged assembly |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2409500A1 true FR2409500A1 (fr) | 1979-06-15 |
FR2409500B1 FR2409500B1 (fr) | 1984-12-28 |
Family
ID=25314546
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7832512A Granted FR2409500A1 (fr) | 1977-11-18 | 1978-11-17 | Transducteur a semiconducteur en boitier |
Country Status (6)
Country | Link |
---|---|
US (1) | US4129042A (fr) |
JP (1) | JPS5478991A (fr) |
DE (1) | DE2849738A1 (fr) |
FR (1) | FR2409500A1 (fr) |
GB (1) | GB2008319B (fr) |
IT (1) | IT1101152B (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2461939A1 (fr) * | 1979-07-17 | 1981-02-06 | Data Instr Inc | Transducteur de pression et procede de fabrication d'un tel transducteur |
Families Citing this family (67)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5524423A (en) * | 1978-08-10 | 1980-02-21 | Nissan Motor Co Ltd | Semiconductor pressure sensor |
JPS5543819A (en) * | 1978-09-22 | 1980-03-27 | Hitachi Ltd | Pressure detecting equipment |
JPS5595373A (en) * | 1979-01-11 | 1980-07-19 | Nissan Motor Co Ltd | Semiconductor pressure sensor |
JPS5817421B2 (ja) * | 1979-02-02 | 1983-04-07 | 日産自動車株式会社 | 半導体圧力センサ |
JPS55112864U (fr) * | 1979-02-02 | 1980-08-08 | ||
JPS55103438A (en) * | 1979-02-05 | 1980-08-07 | Hitachi Ltd | Pressure converter |
US4322980A (en) * | 1979-11-08 | 1982-04-06 | Hitachi, Ltd. | Semiconductor pressure sensor having plural pressure sensitive diaphragms and method |
US4342227A (en) * | 1980-12-24 | 1982-08-03 | International Business Machines Corporation | Planar semiconductor three direction acceleration detecting device and method of fabrication |
US4498342A (en) * | 1983-04-18 | 1985-02-12 | Honeywell Inc. | Integrated silicon accelerometer with stress-free rebalancing |
JPH0650270B2 (ja) * | 1984-05-21 | 1994-06-29 | 株式会社日本自動車部品総合研究所 | 高圧用圧力検出器 |
DE3432293A1 (de) * | 1984-09-01 | 1986-03-13 | Schaudt Maschinenbau Gmbh, 7000 Stuttgart | Spannvorrichtung fuer eine werkzeugmaschine |
ATE42637T1 (de) * | 1985-09-11 | 1989-05-15 | Kunz Manfred | Drucksensor. |
NL8502543A (nl) * | 1985-09-17 | 1987-04-16 | Sentron V O F | Langwerpig drukgevoelig element, vervaardigd uit halfgeleidermateriaal. |
US4691568A (en) * | 1985-12-09 | 1987-09-08 | Motorola, Inc. | Semi-conductor accelerometer |
EP0276979A3 (fr) * | 1987-01-30 | 1989-12-06 | University College Cardiff Consultants Ltd. | Microsenseur |
US4780699A (en) * | 1987-02-06 | 1988-10-25 | Solartron Electronics, Inc. | Input/output terminal assembly for flexure-type pressure transducers |
WO1988008522A1 (fr) * | 1987-04-24 | 1988-11-03 | Kabushiki Kaisha Nexy Kenkyusho | Detecteur de forces, d'acceleration et de magnetisme, utilisant des resistances |
EP0333872B1 (fr) * | 1987-09-18 | 1995-08-23 | Wacoh Corporation | Pince du robot |
US4987780A (en) * | 1987-11-16 | 1991-01-29 | Litton Systems, Inc. | Integrated accelerometer assembly |
US4823230A (en) * | 1988-03-04 | 1989-04-18 | General Electric Company | Pressure transducer |
DE3814950A1 (de) * | 1988-05-03 | 1989-11-16 | Bosch Gmbh Robert | Beschleunigungsaufnehmer |
IT1223710B (it) * | 1988-07-21 | 1990-09-29 | Marelli Autronica | Trasduttore di altissima pressione in particolare per il rilevamento della pressione di un fluido idraulico |
US5191798A (en) * | 1988-09-30 | 1993-03-09 | Kabushiki Kaisha Komatsu Seisakusho | Pressure sensor |
US5049421A (en) * | 1989-01-30 | 1991-09-17 | Dresser Industries, Inc. | Transducer glass bonding technique |
US4922754A (en) * | 1989-03-17 | 1990-05-08 | Kennametal Inc. | Acoustic emission transducer and mounting adapter for monitoring metalcutting tools |
KR930008304B1 (ko) * | 1990-04-27 | 1993-08-27 | 미쯔비시 덴끼 가부시끼가이샤 | 진동 검출기 |
US5164328A (en) * | 1990-06-25 | 1992-11-17 | Motorola, Inc. | Method of bump bonding and sealing an accelerometer chip onto an integrated circuit chip |
DE4137624A1 (de) * | 1991-11-15 | 1993-05-19 | Bosch Gmbh Robert | Silizium-chip zur verwendung in einem kraftsensor |
JP2831195B2 (ja) * | 1992-03-25 | 1998-12-02 | 富士電機株式会社 | 半導体加速度センサ |
US5665915A (en) * | 1992-03-25 | 1997-09-09 | Fuji Electric Co., Ltd. | Semiconductor capacitive acceleration sensor |
US5346857A (en) * | 1992-09-28 | 1994-09-13 | Motorola, Inc. | Method for forming a flip-chip bond from a gold-tin eutectic |
JPH0875580A (ja) * | 1994-09-06 | 1996-03-22 | Mitsubishi Electric Corp | 半導体圧力センサ |
JPH10104101A (ja) * | 1996-10-02 | 1998-04-24 | Mitsubishi Electric Corp | 半導体圧力センサ |
DE19758463C2 (de) * | 1997-04-22 | 2000-12-07 | Fraunhofer Ges Forschung | Dosiervorrichtung |
JP3644205B2 (ja) | 1997-08-08 | 2005-04-27 | 株式会社デンソー | 半導体装置及びその製造方法 |
DE19743409A1 (de) * | 1997-10-01 | 1999-04-08 | Bosch Gmbh Robert | Meßvorrichtung zur Messung der Masse eines strömenden Mediums |
AU9766498A (en) * | 1997-10-23 | 1999-05-10 | Texas Instruments Incorporated | Device for performing measurements in a space by means of a chip |
US6050147A (en) * | 1997-12-05 | 2000-04-18 | Delco Electronics Corp. | Pressure sensor assembly |
US6203523B1 (en) | 1998-02-02 | 2001-03-20 | Medtronic Inc | Implantable drug infusion device having a flow regulator |
JPH11351990A (ja) | 1998-04-09 | 1999-12-24 | Fujikoki Corp | 圧力センサ |
US6081037A (en) * | 1998-06-22 | 2000-06-27 | Motorola, Inc. | Semiconductor component having a semiconductor chip mounted to a chip mount |
US20020003274A1 (en) * | 1998-08-27 | 2002-01-10 | Janusz Bryzek | Piezoresistive sensor with epi-pocket isolation |
US6006607A (en) * | 1998-08-31 | 1999-12-28 | Maxim Integrated Products, Inc. | Piezoresistive pressure sensor with sculpted diaphragm |
US6351996B1 (en) | 1998-11-12 | 2002-03-05 | Maxim Integrated Products, Inc. | Hermetic packaging for semiconductor pressure sensors |
US6346742B1 (en) | 1998-11-12 | 2002-02-12 | Maxim Integrated Products, Inc. | Chip-scale packaged pressure sensor |
US6229190B1 (en) | 1998-12-18 | 2001-05-08 | Maxim Integrated Products, Inc. | Compensated semiconductor pressure sensor |
US6255728B1 (en) | 1999-01-15 | 2001-07-03 | Maxim Integrated Products, Inc. | Rigid encapsulation package for semiconductor devices |
EP1055921A3 (fr) * | 1999-05-26 | 2002-05-08 | Infineon Technologies AG | Montage d'un composant micromécanique dans un boítier |
US6522762B1 (en) * | 1999-09-07 | 2003-02-18 | Microtronic A/S | Silicon-based sensor system |
JP2001133345A (ja) * | 1999-11-02 | 2001-05-18 | Fuji Koki Corp | 圧力センサ |
US6931928B2 (en) * | 2001-09-04 | 2005-08-23 | Tokyo Electron Limited | Microstructure with movable mass |
US6997059B2 (en) * | 2003-10-07 | 2006-02-14 | Cts Corporation | Pressure sensor |
US7000298B2 (en) * | 2004-04-20 | 2006-02-21 | Honeywell International Inc. | Method a quartz sensor |
US7406870B2 (en) * | 2005-01-06 | 2008-08-05 | Ricoh Company, Ltd. | Semiconductor sensor |
JP4642634B2 (ja) * | 2005-10-31 | 2011-03-02 | パナソニック株式会社 | 音響センサの製造方法 |
US7845229B2 (en) * | 2006-08-11 | 2010-12-07 | Rohm Co., Ltd. | Acceleration sensor |
EP2015046A1 (fr) * | 2007-06-06 | 2009-01-14 | Infineon Technologies SensoNor AS | Capteur de vide |
US7930944B2 (en) * | 2008-05-14 | 2011-04-26 | Honeywell International Inc. | ASIC compensated pressure sensor with soldered sense die attach |
DE112011102030T5 (de) * | 2010-06-15 | 2013-04-04 | Murata Manufacturing Co., Ltd. | Dynamiksensor |
US9227835B2 (en) | 2010-11-23 | 2016-01-05 | Honeywell International Inc. | Vibration isolation interposer die |
US8371176B2 (en) | 2011-01-06 | 2013-02-12 | Honeywell International Inc. | Media isolated pressure sensor |
US20130167482A1 (en) * | 2011-09-08 | 2013-07-04 | Advanced Numicro Systems, Inc. | Vacuum sealing process of a mems package |
DE102011112935B4 (de) * | 2011-09-13 | 2015-02-12 | Micronas Gmbh | Kraftsensor |
US8516897B1 (en) | 2012-02-21 | 2013-08-27 | Honeywell International Inc. | Pressure sensor |
US9500808B2 (en) | 2012-05-09 | 2016-11-22 | The Boeing Company | Ruggedized photonic crystal sensor packaging |
RU167463U1 (ru) * | 2016-08-10 | 2017-01-10 | Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" | Радиационно стойкий высокотемпературный тензочувствительный элемент преобразователя давления |
RU167464U1 (ru) * | 2016-08-11 | 2017-01-10 | Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" | Интегральный чувствительный элемент преобразователя давления с датчиком температуры |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1248087A (en) * | 1969-02-28 | 1971-09-29 | Ferranti Ltd | Improvements relating to pressure gauges |
FR2282720A1 (fr) * | 1974-08-19 | 1976-03-19 | Ibm | Assemblage de supports et de dispositifs semi-conducteurs |
FR2293704A1 (fr) * | 1974-12-02 | 1976-07-02 | Philips Nv | Indicateur de pression |
US4050049A (en) * | 1976-02-09 | 1977-09-20 | Signetics Corporation | Solid state force transducer, support and method of making same |
DE2617731A1 (de) * | 1976-04-23 | 1977-10-27 | Siemens Ag | Druckmesswandler |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3858150A (en) * | 1973-06-21 | 1974-12-31 | Motorola Inc | Polycrystalline silicon pressure sensor |
US4071838A (en) * | 1976-02-09 | 1978-01-31 | Diax Corporation | Solid state force transducer and method of making same |
-
1977
- 1977-11-18 US US05/852,909 patent/US4129042A/en not_active Expired - Lifetime
-
1978
- 1978-11-15 IT IT29830/78A patent/IT1101152B/it active
- 1978-11-15 GB GB7844552A patent/GB2008319B/en not_active Expired
- 1978-11-16 DE DE19782849738 patent/DE2849738A1/de active Granted
- 1978-11-17 FR FR7832512A patent/FR2409500A1/fr active Granted
- 1978-11-18 JP JP14276678A patent/JPS5478991A/ja active Granted
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1248087A (en) * | 1969-02-28 | 1971-09-29 | Ferranti Ltd | Improvements relating to pressure gauges |
FR2282720A1 (fr) * | 1974-08-19 | 1976-03-19 | Ibm | Assemblage de supports et de dispositifs semi-conducteurs |
FR2293704A1 (fr) * | 1974-12-02 | 1976-07-02 | Philips Nv | Indicateur de pression |
US4050049A (en) * | 1976-02-09 | 1977-09-20 | Signetics Corporation | Solid state force transducer, support and method of making same |
DE2617731A1 (de) * | 1976-04-23 | 1977-10-27 | Siemens Ag | Druckmesswandler |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2461939A1 (fr) * | 1979-07-17 | 1981-02-06 | Data Instr Inc | Transducteur de pression et procede de fabrication d'un tel transducteur |
Also Published As
Publication number | Publication date |
---|---|
IT1101152B (it) | 1985-09-28 |
US4129042A (en) | 1978-12-12 |
GB2008319A (en) | 1979-05-31 |
DE2849738C2 (fr) | 1987-02-26 |
GB2008319B (en) | 1982-02-24 |
FR2409500B1 (fr) | 1984-12-28 |
JPS5478991A (en) | 1979-06-23 |
IT7829830A0 (it) | 1978-11-15 |
DE2849738A1 (de) | 1979-05-23 |
JPS6241434B2 (fr) | 1987-09-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |