FR2382523A1 - Procede d'elimination selective d'un materiau semiconducteur par rapport a un autre materiau semiconducteur, et produit en resultant - Google Patents

Procede d'elimination selective d'un materiau semiconducteur par rapport a un autre materiau semiconducteur, et produit en resultant

Info

Publication number
FR2382523A1
FR2382523A1 FR7706202A FR7706202A FR2382523A1 FR 2382523 A1 FR2382523 A1 FR 2382523A1 FR 7706202 A FR7706202 A FR 7706202A FR 7706202 A FR7706202 A FR 7706202A FR 2382523 A1 FR2382523 A1 FR 2382523A1
Authority
FR
France
Prior art keywords
substance
radiation
electrochemical
another
contg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7706202A
Other languages
English (en)
Other versions
FR2382523B1 (fr
Inventor
Edouard Haroutiounian
Denise Marteau
Jean-Paul Sandino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Radiotechnique Compelec RTC SA
Original Assignee
Radiotechnique Compelec RTC SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radiotechnique Compelec RTC SA filed Critical Radiotechnique Compelec RTC SA
Priority to FR7706202A priority Critical patent/FR2382523A1/fr
Publication of FR2382523A1 publication Critical patent/FR2382523A1/fr
Application granted granted Critical
Publication of FR2382523B1 publication Critical patent/FR2382523B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/14—Etching locally
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3063—Electrolytic etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3063—Electrolytic etching
    • H01L21/30635—Electrolytic etching of AIIIBV compounds

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

Elimination d'un matériau par rapport à un autre matériau, par décapage électrochimique. La structure comportant les deux matériaux est irradiée par un rayonnement qu'absorbe le matériau à éliminer et qui traverse le matériau à conserver. Application notamment au décapage sélectif de structures comportant des matériaux III-V.
FR7706202A 1977-03-03 1977-03-03 Procede d'elimination selective d'un materiau semiconducteur par rapport a un autre materiau semiconducteur, et produit en resultant Granted FR2382523A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7706202A FR2382523A1 (fr) 1977-03-03 1977-03-03 Procede d'elimination selective d'un materiau semiconducteur par rapport a un autre materiau semiconducteur, et produit en resultant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7706202A FR2382523A1 (fr) 1977-03-03 1977-03-03 Procede d'elimination selective d'un materiau semiconducteur par rapport a un autre materiau semiconducteur, et produit en resultant

Publications (2)

Publication Number Publication Date
FR2382523A1 true FR2382523A1 (fr) 1978-09-29
FR2382523B1 FR2382523B1 (fr) 1980-10-24

Family

ID=9187492

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7706202A Granted FR2382523A1 (fr) 1977-03-03 1977-03-03 Procede d'elimination selective d'un materiau semiconducteur par rapport a un autre materiau semiconducteur, et produit en resultant

Country Status (1)

Country Link
FR (1) FR2382523A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4482442A (en) * 1981-07-09 1984-11-13 At&T Bell Laboratories Photoelectrochemical etching of n-type gallium arsenide
US4622114A (en) * 1984-12-20 1986-11-11 At&T Bell Laboratories Process of producing devices with photoelectrochemically produced gratings
US4689125A (en) * 1982-09-10 1987-08-25 American Telephone & Telegraph Co., At&T Bell Labs Fabrication of cleaved semiconductor lasers

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4482442A (en) * 1981-07-09 1984-11-13 At&T Bell Laboratories Photoelectrochemical etching of n-type gallium arsenide
US4689125A (en) * 1982-09-10 1987-08-25 American Telephone & Telegraph Co., At&T Bell Labs Fabrication of cleaved semiconductor lasers
US4622114A (en) * 1984-12-20 1986-11-11 At&T Bell Laboratories Process of producing devices with photoelectrochemically produced gratings

Also Published As

Publication number Publication date
FR2382523B1 (fr) 1980-10-24

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Legal Events

Date Code Title Description
ST Notification of lapse