FR2380556A1 - Procede et appareillage de controle de circuits electroniques par faisceau d'electrons - Google Patents

Procede et appareillage de controle de circuits electroniques par faisceau d'electrons

Info

Publication number
FR2380556A1
FR2380556A1 FR7803839A FR7803839A FR2380556A1 FR 2380556 A1 FR2380556 A1 FR 2380556A1 FR 7803839 A FR7803839 A FR 7803839A FR 7803839 A FR7803839 A FR 7803839A FR 2380556 A1 FR2380556 A1 FR 2380556A1
Authority
FR
France
Prior art keywords
electronic circuits
control
electron beam
grid
secondary electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7803839A
Other languages
English (en)
French (fr)
Other versions
FR2380556B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Industry
Original Assignee
UK Secretary of State for Industry
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Industry filed Critical UK Secretary of State for Industry
Publication of FR2380556A1 publication Critical patent/FR2380556A1/fr
Application granted granted Critical
Publication of FR2380556B1 publication Critical patent/FR2380556B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G01R31/306—Contactless testing using electron beams of printed or hybrid circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7803839A 1977-02-11 1978-02-10 Procede et appareillage de controle de circuits electroniques par faisceau d'electrons Granted FR2380556A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5835/77A GB1594597A (en) 1977-02-11 1977-02-11 Electron probe testing analysis and fault diagnosis in electronic circuits

Publications (2)

Publication Number Publication Date
FR2380556A1 true FR2380556A1 (fr) 1978-09-08
FR2380556B1 FR2380556B1 (enrdf_load_stackoverflow) 1985-02-08

Family

ID=9803533

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7803839A Granted FR2380556A1 (fr) 1977-02-11 1978-02-10 Procede et appareillage de controle de circuits electroniques par faisceau d'electrons

Country Status (6)

Country Link
JP (1) JPS53121476A (enrdf_load_stackoverflow)
DE (1) DE2805673A1 (enrdf_load_stackoverflow)
FR (1) FR2380556A1 (enrdf_load_stackoverflow)
GB (1) GB1594597A (enrdf_load_stackoverflow)
NL (1) NL7801558A (enrdf_load_stackoverflow)
SE (1) SE425869B (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0264481A1 (en) * 1986-10-23 1988-04-27 International Business Machines Corporation Testing method for integrated circuit packaging boards using a laser in vacuum

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2902495A1 (de) * 1979-01-23 1980-07-31 Siemens Ag Einrichtung zur beruehrungslosen potentialmessung
DE3036713A1 (de) * 1980-09-29 1982-05-13 Siemens AG, 1000 Berlin und 8000 München Verfahren und anordnung zur quantitativen potentialmessung an oberflaechenwellenfiltern
DE3110140A1 (de) * 1981-03-16 1982-09-23 Siemens AG, 1000 Berlin und 8000 München Vorrichtung und verfahren fuer eine rasche interne logikpruefung an integrierten schaltungen
DE3138901A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Verbessertes gegenfeld-spektrometer fuer die elektronenstrahl-messtechnik
DE3138926A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Elektronenoptische anordnung fuer die hochaufloesende elektronenstrahl-messtechnik
DE3138990A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Koaxiales gegenfeld-spektrometer hoher akzeptanz fuersekundaerelektronen und elektronenstrahl-messgeraet
DE3206309A1 (de) * 1982-02-22 1983-09-15 Siemens AG, 1000 Berlin und 8000 München Sekundaerelektronen-spektrometer und verfahren zu seinem betrieb
DE3232671A1 (de) * 1982-09-02 1984-03-08 Siemens AG, 1000 Berlin und 8000 München Anordnung und verfahren zur spannungsmessung an einem vergrabenen messobjekt
DE3235698A1 (de) * 1982-09-27 1984-03-29 Siemens AG, 1000 Berlin und 8000 München Vorrichtung und verfahren zur direkten messung von signalverlaeufen an mehreren messpunkten mit hoher zeitaufloesung
JPH0646550B2 (ja) * 1985-08-19 1994-06-15 株式会社東芝 電子ビ−ム定位置照射制御方法および電子ビ−ム定位置照射制御装置
DE3719202A1 (de) * 1987-06-09 1988-12-29 Siemens Ag Verfahren zur automatischen pruefung von elektrischen baugruppen

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3549999A (en) * 1968-06-05 1970-12-22 Gen Electric Method and apparatus for testing circuits by measuring secondary emission electrons generated by electron beam bombardment of the pulsed circuit
FR2058756A5 (enrdf_load_stackoverflow) * 1969-09-17 1971-05-28 Gen Electric
US3796947A (en) * 1973-02-27 1974-03-12 Bell Telephone Labor Inc Electron beam testing of film integrated circuits

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1286454A (en) * 1968-08-24 1972-08-23 Cambridge Scientific Instr Ltd Surface potential analysis by electron beams
JPS5093078A (enrdf_load_stackoverflow) * 1973-12-17 1975-07-24
JPS51108569A (en) * 1975-03-19 1976-09-25 Hitachi Ltd Sosadenshikenbikyo mataha ruijisochi

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3549999A (en) * 1968-06-05 1970-12-22 Gen Electric Method and apparatus for testing circuits by measuring secondary emission electrons generated by electron beam bombardment of the pulsed circuit
FR2058756A5 (enrdf_load_stackoverflow) * 1969-09-17 1971-05-28 Gen Electric
US3796947A (en) * 1973-02-27 1974-03-12 Bell Telephone Labor Inc Electron beam testing of film integrated circuits

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
EXBK/69 *
EXBK/70 *
EXBK/76 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0264481A1 (en) * 1986-10-23 1988-04-27 International Business Machines Corporation Testing method for integrated circuit packaging boards using a laser in vacuum
US4843329A (en) * 1986-10-23 1989-06-27 International Business Machines Corporation Method for contactless testing for electrical opens and short circuits in conducting paths in a substrate

Also Published As

Publication number Publication date
SE425869B (sv) 1982-11-15
GB1594597A (en) 1981-07-30
JPH0330258B2 (enrdf_load_stackoverflow) 1991-04-26
SE7801530L (sv) 1978-08-12
DE2805673A1 (de) 1978-08-17
FR2380556B1 (enrdf_load_stackoverflow) 1985-02-08
NL7801558A (nl) 1978-08-15
JPS53121476A (en) 1978-10-23

Similar Documents

Publication Publication Date Title
FR2380556A1 (fr) Procede et appareillage de controle de circuits electroniques par faisceau d'electrons
AU4501596A (en) Magnetic particle based electrochemiluminescent detection apparatus and method
Némethy et al. Gated time projection chamber
DE3878828D1 (de) Sekundaerelektronen-detektor zur anwendung in einer gasumgebung.
US4249077A (en) Ion charge neutralization for electron beam devices
EP0559202B1 (en) Secondary ion mass spectrometer for analyzing positive and negative ions
US3881108A (en) Ion microprobe analyzer
US4912327A (en) Pulsed microfocused ion beams
ES444049A1 (es) Procedimiento y dispositivo de analisis elemental y quimico de una muestra.
EP0003659A3 (en) Apparatus for and method of analysing materials by means of a beam of charged particles
KR930014870A (ko) 집속이온빔을 이용한 집적회로의 동작분석방법 및 그 장치
EP0059111A3 (en) Photoionizer
US2694151A (en) Mass spectrometry
ES2190061T3 (es) Analisis de particulas cargadas.
US4710625A (en) Charged particle energy analyzer based upon isentropic containment
US6057544A (en) Mass spectrometer
US5171987A (en) Combined magnetic sector mass spectrometer and time-of-flight mass spectrometer
JPS5578451A (en) Inspecting method of contamination in electron-optical system
JP2687433B2 (ja) 質量分析計
JPH05251035A (ja) スパッタ中性粒子質量分析装置
JPH0355239Y2 (enrdf_load_stackoverflow)
JPS59173938A (ja) 二次イオン質量分析計
JPS5791446A (en) Analytical apparatus using charged particle ray
JPS57168460A (en) Scanning electron microscope
JPS57143253A (en) Analytical electron microscope

Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse