FR2378358A1 - Pellicule cristalline piezoelectrique - Google Patents
Pellicule cristalline piezoelectriqueInfo
- Publication number
- FR2378358A1 FR2378358A1 FR7802077A FR7802077A FR2378358A1 FR 2378358 A1 FR2378358 A1 FR 2378358A1 FR 7802077 A FR7802077 A FR 7802077A FR 7802077 A FR7802077 A FR 7802077A FR 2378358 A1 FR2378358 A1 FR 2378358A1
- Authority
- FR
- France
- Prior art keywords
- crystalline film
- piezoelectric
- piezoelectric crystalline
- manufacture
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
L'invention concerne la fabrication de pellicules piézoélectriques. La pellicule cristalline piézoélectrique de l'invention est réalisée à l'aide d'un dispositif de pulvérisation haute fréquence contenu dans une coche 1. Cette pellicule consiste en une pellicule cristalline d'oxyde de zinc qui contient 0,01 à 20,0 % d'atomes de mangasène, et éventuellement 0,01 à 20,0 % d'atomes de cuivre. Application à la fabrication de filtres à ondes acoustiques de surface.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP690977A JPS5392498A (en) | 1977-01-25 | 1977-01-25 | Piezooelectric crystal film of zinc oxide |
JP3351077A JPS53118798A (en) | 1977-03-26 | 1977-03-26 | Piezooelectric crystal film of zinc oxide |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2378358A1 true FR2378358A1 (fr) | 1978-08-18 |
FR2378358B1 FR2378358B1 (fr) | 1983-01-07 |
Family
ID=26341131
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7802077A Granted FR2378358A1 (fr) | 1977-01-25 | 1978-01-25 | Pellicule cristalline piezoelectrique |
Country Status (6)
Country | Link |
---|---|
US (1) | US4142124A (fr) |
CH (1) | CH628464A5 (fr) |
DE (1) | DE2802901C3 (fr) |
FR (1) | FR2378358A1 (fr) |
GB (1) | GB1582317A (fr) |
NL (1) | NL183615C (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2430099A1 (fr) * | 1978-06-30 | 1980-01-25 | Murata Manufacturing Co | Couches minces dielectriques |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4174421A (en) * | 1977-09-13 | 1979-11-13 | Murata Manufacturing Co., Ltd. | Piezoelectric crystalline film of zinc oxide and method for making same |
JPS5830752B2 (ja) * | 1977-09-13 | 1983-07-01 | 株式会社村田製作所 | 酸化亜鉛の圧電結晶膜 |
DE2839715A1 (de) * | 1977-09-17 | 1979-03-29 | Murata Manufacturing Co | Piezoelektrische kristalline filme aus zinkoxyd und verfahren zu ihrer herstellung |
JPS5831743B2 (ja) * | 1977-09-17 | 1983-07-08 | 株式会社村田製作所 | 酸化亜鉛の圧電結晶膜 |
JPS5516554A (en) * | 1978-07-21 | 1980-02-05 | Toko Inc | Manufacture of thin film of zinc oxide |
US4640756A (en) * | 1983-10-25 | 1987-02-03 | The United States Of America As Represented By The United States Department Of Energy | Method of making a piezoelectric shear wave resonator |
JPS60129483A (ja) * | 1983-12-14 | 1985-07-10 | Diesel Kiki Co Ltd | 電磁弁 |
US4749900A (en) * | 1986-11-17 | 1988-06-07 | The Board Of Trustees Of The Leland Stanford Junior University | Multi-layer acoustic transducer for high frequency ultrasound |
US5231327A (en) * | 1990-12-14 | 1993-07-27 | Tfr Technologies, Inc. | Optimized piezoelectric resonator-based networks |
JP3085043B2 (ja) * | 1993-08-05 | 2000-09-04 | 株式会社村田製作所 | サファイア面上の酸化亜鉛圧電結晶膜 |
US5736267A (en) * | 1994-08-17 | 1998-04-07 | Asahi Glass Company Ltd. | Transparent conductive film and method for its production, and sputtering target |
SG94706A1 (en) * | 1998-07-01 | 2003-03-18 | Univ Singapore | Novel mechanochemical fabrication of electronceramics |
WO2004105148A1 (fr) * | 2003-05-22 | 2004-12-02 | Fujitsu Limited | Dispositif piezoelectrique, procede de fabrication dudit dispositif et dispositif a ecran tactile |
US8399092B2 (en) * | 2009-10-07 | 2013-03-19 | Sakai Chemical Industry Co., Ltd. | Zinc oxide particle having high bulk density, method for producing it, exoergic filler, exoergic resin composition, exoergic grease and exoergic coating composition |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3846649A (en) * | 1973-06-18 | 1974-11-05 | Rca Corp | Piezoelectric transducer comprising oriented zinc oxide film and method of manufacture |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3091707A (en) * | 1960-04-07 | 1963-05-28 | Bell Telephone Labor Inc | Piezoelectric devices utilizing zinc oxide |
US3440550A (en) * | 1966-10-25 | 1969-04-22 | Minnesota Mining & Mfg | Zinc oxide maximum efficiency transverse wave crystals and devices |
US3471721A (en) * | 1966-10-25 | 1969-10-07 | Minnesota Mining & Mfg | Zinc oxide maximum efficiency length extensional crystals and devices |
US3766041A (en) * | 1970-09-29 | 1973-10-16 | Matsushita Electric Ind Co Ltd | Method of producing piezoelectric thin films by cathodic sputtering |
-
1978
- 1978-01-24 GB GB2870/78A patent/GB1582317A/en not_active Expired
- 1978-01-24 DE DE2802901A patent/DE2802901C3/de not_active Expired
- 1978-01-25 CH CH81378A patent/CH628464A5/de not_active IP Right Cessation
- 1978-01-25 US US05/872,342 patent/US4142124A/en not_active Expired - Lifetime
- 1978-01-25 FR FR7802077A patent/FR2378358A1/fr active Granted
- 1978-01-25 NL NLAANVRAGE7800891,A patent/NL183615C/xx not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3846649A (en) * | 1973-06-18 | 1974-11-05 | Rca Corp | Piezoelectric transducer comprising oriented zinc oxide film and method of manufacture |
Non-Patent Citations (1)
Title |
---|
CA1976 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2430099A1 (fr) * | 1978-06-30 | 1980-01-25 | Murata Manufacturing Co | Couches minces dielectriques |
Also Published As
Publication number | Publication date |
---|---|
US4142124A (en) | 1979-02-27 |
DE2802901C3 (de) | 1981-01-15 |
NL183615C (nl) | 1988-12-01 |
CH628464A5 (de) | 1982-02-26 |
DE2802901A1 (de) | 1978-07-27 |
DE2802901B2 (de) | 1980-04-24 |
GB1582317A (en) | 1981-01-07 |
NL7800891A (nl) | 1978-07-27 |
FR2378358B1 (fr) | 1983-01-07 |
NL183615B (nl) | 1988-07-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
FR2378358A1 (fr) | Pellicule cristalline piezoelectrique | |
IT1115626B (it) | Processo di lavorazione per il deposito di sottili pellicole complanari | |
OA05723A (fr) | Procédé et dispositif pour modifier l'épaisseur d'un corps extrudé à débit constant | |
FR2370387A1 (fr) | Dispositif a ondes de surfaces elastiques | |
NZ193310A (en) | Manufacture of piezo-electric film orientation polarization and electrode deposition | |
BE827295A (fr) | Filtre d'ondes de surface | |
FR2379495A1 (fr) | Pellicule cristalline piezoelectrique contenant du bismuth | |
FR2411458A1 (fr) | Dispositif d'affichage luminescent dont la couche luminescente est recouverte d'une pellicule non homogene absorbant la lumiere et procede de fabrication du dispositif | |
IT1125444B (it) | Procedimento e dispositivo per l'eliminazione di pellicole di liquidi adesivi oppure per ridurne lo spessore in modo controllato presenti su superfici dure | |
FR2379496A1 (fr) | Pellicule cristalline piezo-electrique contenant du vanadium | |
FR2418574A1 (fr) | Dispositif mettant a profit des ondes acoustiques | |
JPS5425497A (en) | Piezoelectric crystal film of zinc oxide | |
FR2371706A1 (fr) | Element producteur d'images par voie seche | |
FR2407571A1 (fr) | Dispositif piezoelectrique a couche de selenium | |
FR2337589A1 (fr) | Dispositif d'excitation d'ondes notamment d'ondes ultra-sonores incluant une lentille | |
IT1101990B (it) | Antenna rete non dispersiva e sua applicazione alla realizzazione di un'antenna ad analisi elettronica | |
FR2423870A1 (fr) | Dispositif a ondes acoustiques de surface comprenant un substrat piezoelectrique comportant une couche d'oxyde de zinc sur une couche d'alumine-a | |
FR2358872A1 (fr) | Bandage | |
FR2306570A1 (fr) | Compose ceramique de dispositif acoustique a onde de surface et procede de realisation d'un tel compose | |
JPS543297A (en) | Piezoelectric crystal film of zinc oxide | |
IT1075409B (it) | Perfezionamenti relativi allo scarico di polveri adesive | |
FR2284904A1 (fr) | Methode photographique de diffusion-transfert et ensemble unitaire pour l'application de cette methode | |
FR2418511A1 (fr) | Bras et cartouche de pick-up d'electrophone comportant ce bras | |
GB1372067A (en) | Acoustic surface wave transducers | |
FR2321802A1 (fr) | Filtre mettant a profit des ondes de surface acoustiques |