FR2423870A1 - Dispositif a ondes acoustiques de surface comprenant un substrat piezoelectrique comportant une couche d'oxyde de zinc sur une couche d'alumine-a - Google Patents

Dispositif a ondes acoustiques de surface comprenant un substrat piezoelectrique comportant une couche d'oxyde de zinc sur une couche d'alumine-a

Info

Publication number
FR2423870A1
FR2423870A1 FR7909673A FR7909673A FR2423870A1 FR 2423870 A1 FR2423870 A1 FR 2423870A1 FR 7909673 A FR7909673 A FR 7909673A FR 7909673 A FR7909673 A FR 7909673A FR 2423870 A1 FR2423870 A1 FR 2423870A1
Authority
FR
France
Prior art keywords
layer
zinc oxide
alumina
oxide layer
acoustic wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7909673A
Other languages
English (en)
Other versions
FR2423870B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of FR2423870A1 publication Critical patent/FR2423870A1/fr
Application granted granted Critical
Publication of FR2423870B1 publication Critical patent/FR2423870B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/36—Devices for manipulating acoustic surface waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Abstract

Le dispositif à ondes acoustiques de surface selon la présente invention comprend un substrat piézoélectrique 10 formé par une couche d'alumine- alpha en tant que région de base 12 et une couche d'oxyde de zinc en tant que région superficielle 12a formé sur la couche d'alumine- alpha . Les deux couches sont de préférence formées par un monocristal et on détermine l'épaisseur d de la couche d'oxyde de zinc ainsi que l'angle compris entre l'axe cristallographique du monocristal d'oxyde de zinc et la direction de propagation de manière telle que ces paramètres se trouvent dans des plages optimales respectivement Ce dispositif est caractérisé par une vitesse de phase accrue et une valeur de coefficient de couplage électro-magnétique accrue. Il trouve par conséquent une utilisation appropriée pour les fréquence' VHF et UFF.
FR7909673A 1978-04-18 1979-04-17 Dispositif a ondes acoustiques de surface comprenant un substrat piezoelectrique comportant une couche d'oxyde de zinc sur une couche d'alumine-a Granted FR2423870A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53046291A JPS5941602B2 (ja) 1978-04-18 1978-04-18 表面弾性波素子

Publications (2)

Publication Number Publication Date
FR2423870A1 true FR2423870A1 (fr) 1979-11-16
FR2423870B1 FR2423870B1 (fr) 1984-10-19

Family

ID=12743098

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7909673A Granted FR2423870A1 (fr) 1978-04-18 1979-04-17 Dispositif a ondes acoustiques de surface comprenant un substrat piezoelectrique comportant une couche d'oxyde de zinc sur une couche d'alumine-a

Country Status (4)

Country Link
US (1) US4236095A (fr)
JP (1) JPS5941602B2 (fr)
FR (1) FR2423870A1 (fr)
GB (1) GB2025184B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2474243A1 (fr) * 1979-12-19 1981-07-24 Matsushita Electric Ind Co Ltd Dispositif generateur d'ondes acoustiques de surface

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4546283A (en) * 1984-05-04 1985-10-08 The United States Of America As Represented By The Secretary Of The Air Force Conductor structure for thick film electrical device
JPH0415956Y2 (fr) * 1985-10-24 1992-04-09
JPS6382100A (ja) * 1986-09-26 1988-04-12 Hitachi Ltd 圧電素子およびその製造方法
JPH0590871A (ja) * 1991-09-27 1993-04-09 Sumitomo Electric Ind Ltd 表面弾性波素子
JP3198691B2 (ja) * 1993-01-14 2001-08-13 株式会社村田製作所 酸化亜鉛圧電結晶膜
TW241397B (fr) * 1993-01-14 1995-02-21 Murata Manufacturing Co
KR100236975B1 (ko) * 1996-12-30 2000-01-15 윤덕용 질화알루미늄/수소화된 질화알루미늄/질화알루미늄 3층 박막을 이용한 탄성표면파 필터의 제조방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3955160A (en) * 1975-04-30 1976-05-04 Rca Corporation Surface acoustic wave device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2607837C2 (de) * 1975-03-04 1984-09-13 Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto Mehrschichten-Interdigital-Wandler für akustische Oberflächenwellen
FR2336838A1 (fr) * 1975-12-23 1977-07-22 Thomson Csf Dispositif de lecture acousto-electrique d'une image optique a deux dimensions, a l'aide d'un reseau d'electrodes

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3955160A (en) * 1975-04-30 1976-05-04 Rca Corporation Surface acoustic wave device

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
EXBK/73 *
EXBK/75 *
EXBK/76 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2474243A1 (fr) * 1979-12-19 1981-07-24 Matsushita Electric Ind Co Ltd Dispositif generateur d'ondes acoustiques de surface

Also Published As

Publication number Publication date
JPS5941602B2 (ja) 1984-10-08
FR2423870B1 (fr) 1984-10-19
GB2025184A (en) 1980-01-16
JPS54137994A (en) 1979-10-26
US4236095A (en) 1980-11-25
GB2025184B (en) 1982-09-29

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