FR2377703B1 - - Google Patents
Info
- Publication number
- FR2377703B1 FR2377703B1 FR7801128A FR7801128A FR2377703B1 FR 2377703 B1 FR2377703 B1 FR 2377703B1 FR 7801128 A FR7801128 A FR 7801128A FR 7801128 A FR7801128 A FR 7801128A FR 2377703 B1 FR2377703 B1 FR 2377703B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/0223—Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate
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- H10D64/0135—
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- H10P14/61—
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- H10P14/6308—
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- H10P14/6309—
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- H10P14/6322—
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- H10P14/6502—
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- H10P32/302—
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- H10P76/40—
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US75980377A | 1977-01-17 | 1977-01-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2377703A1 FR2377703A1 (fr) | 1978-08-11 |
| FR2377703B1 true FR2377703B1 (OSRAM) | 1985-04-12 |
Family
ID=25057013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7801128A Granted FR2377703A1 (fr) | 1977-01-17 | 1978-01-16 | Procede de fabrication de dispositif semi-conducteur |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS5812732B2 (OSRAM) |
| DE (1) | DE2801680A1 (OSRAM) |
| FR (1) | FR2377703A1 (OSRAM) |
| GB (1) | GB1593694A (OSRAM) |
| IT (1) | IT1089298B (OSRAM) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4268951A (en) * | 1978-11-13 | 1981-05-26 | Rockwell International Corporation | Submicron semiconductor devices |
| JPS5941870A (ja) * | 1982-08-25 | 1984-03-08 | Toshiba Corp | 半導体装置の製造方法 |
| JPS5955071A (ja) * | 1982-09-24 | 1984-03-29 | Hitachi Micro Comput Eng Ltd | 不揮発性半導体装置 |
| GB2131407B (en) * | 1982-11-12 | 1987-02-04 | Rca Corp | Method of formation of silicon dioxide layer |
| JPS59184547A (ja) * | 1983-04-04 | 1984-10-19 | Agency Of Ind Science & Technol | 半導体装置及びその製造方法 |
| JPS6066866A (ja) * | 1983-09-24 | 1985-04-17 | Sharp Corp | 炭化珪素mos構造の製造方法 |
| CN112002648A (zh) * | 2020-07-14 | 2020-11-27 | 全球能源互联网研究院有限公司 | 一种碳化硅功率器件的制备方法及碳化硅功率器件 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3966501A (en) * | 1973-03-23 | 1976-06-29 | Mitsubishi Denki Kabushiki Kaisha | Process of producing semiconductor devices |
| JPS5536185B2 (OSRAM) * | 1973-05-08 | 1980-09-19 | ||
| US3911168A (en) * | 1973-06-01 | 1975-10-07 | Fairchild Camera Instr Co | Method for forming a continuous layer of silicon dioxide over a substrate |
| US3874920A (en) * | 1973-06-28 | 1975-04-01 | Ibm | Boron silicide method for making thermally oxidized boron doped poly-crystalline silicon having minimum resistivity |
| US3899373A (en) * | 1974-05-20 | 1975-08-12 | Ibm | Method for forming a field effect device |
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1977
- 1977-12-30 IT IT31505/77A patent/IT1089298B/it active
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1978
- 1978-01-11 GB GB1075/78A patent/GB1593694A/en not_active Expired
- 1978-01-16 DE DE19782801680 patent/DE2801680A1/de not_active Ceased
- 1978-01-16 FR FR7801128A patent/FR2377703A1/fr active Granted
- 1978-01-17 JP JP53002850A patent/JPS5812732B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1593694A (en) | 1981-07-22 |
| DE2801680A1 (de) | 1978-07-20 |
| JPS5812732B2 (ja) | 1983-03-10 |
| IT1089298B (it) | 1985-06-18 |
| FR2377703A1 (fr) | 1978-08-11 |
| JPS5390776A (en) | 1978-08-09 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| TP | Transmission of property | ||
| CA | Change of address | ||
| CD | Change of name or company name | ||
| TP | Transmission of property |