FR2351283A1 - Cryopompe - Google Patents
CryopompeInfo
- Publication number
- FR2351283A1 FR2351283A1 FR7714412A FR7714412A FR2351283A1 FR 2351283 A1 FR2351283 A1 FR 2351283A1 FR 7714412 A FR7714412 A FR 7714412A FR 7714412 A FR7714412 A FR 7714412A FR 2351283 A1 FR2351283 A1 FR 2351283A1
- Authority
- FR
- France
- Prior art keywords
- cryopump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2620880A DE2620880C2 (de) | 1976-05-11 | 1976-05-11 | Kryopumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2351283A1 true FR2351283A1 (fr) | 1977-12-09 |
FR2351283B3 FR2351283B3 (fr) | 1981-01-16 |
Family
ID=5977692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7714412A Granted FR2351283A1 (fr) | 1976-05-11 | 1977-05-11 | Cryopompe |
Country Status (5)
Country | Link |
---|---|
US (1) | US4121430A (fr) |
CH (1) | CH618502A5 (fr) |
DE (1) | DE2620880C2 (fr) |
FR (1) | FR2351283A1 (fr) |
GB (1) | GB1531378A (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2391376A1 (fr) * | 1977-05-16 | 1978-12-15 | Air Prod & Chem | Appareil de pompage cryoscopique |
FR2533637A1 (fr) * | 1982-09-29 | 1984-03-30 | Cvi Inc | Pompe cryogenique |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54153315A (en) * | 1978-05-24 | 1979-12-03 | Aisin Seiki Co Ltd | Cryopump |
US4336690A (en) * | 1979-09-28 | 1982-06-29 | Varian Associates, Inc. | Cryogenic pump with radiation shield |
US4295338A (en) * | 1979-10-18 | 1981-10-20 | Varian Associates, Inc. | Cryogenic pumping apparatus with replaceable pumping surface elements |
USRE31665E (en) * | 1980-04-01 | 1984-09-11 | Cvi Incorporated | Cryopump apparatus |
US4275566A (en) * | 1980-04-01 | 1981-06-30 | Pennwalt Corporation | Cryopump apparatus |
US4341079A (en) * | 1980-04-01 | 1982-07-27 | Cvi Incorporated | Cryopump apparatus |
US4277951A (en) * | 1980-04-10 | 1981-07-14 | Air Products And Chemicals, Inc. | Cryopumping apparatus |
DE3216591A1 (de) * | 1982-05-04 | 1983-11-10 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpe mit jalousieartigem baffle |
DE3232324C2 (de) * | 1982-08-31 | 1986-08-28 | Leybold-Heraeus GmbH, 5000 Köln | Refrigerator-betriebene Kryopumpe |
US4508055A (en) * | 1983-06-03 | 1985-04-02 | The United States Of America As Represented By The Secretary Of The Navy | Device for cryogenically fabricating source material for plasma X-ray lasers |
US4530213A (en) * | 1983-06-28 | 1985-07-23 | Air Products And Chemicals, Inc. | Economical and thermally efficient cryopump panel and panel array |
GB8400349D0 (en) * | 1984-01-07 | 1984-02-08 | Boc Group Plc | Cryogenic pumps |
US4555907A (en) * | 1984-05-18 | 1985-12-03 | Helix Technology Corporation | Cryopump with improved second stage array |
DE3512614A1 (de) * | 1985-04-06 | 1986-10-16 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe |
US4791791A (en) * | 1988-01-20 | 1988-12-20 | Varian Associates, Inc. | Cryosorption surface for a cryopump |
DE8804218U1 (de) * | 1988-03-29 | 1988-05-11 | Leybold AG, 6450 Hanau | Einrichtung zur Evakuierung einer Vakuumkammer |
DE4006755A1 (de) * | 1990-03-03 | 1991-09-05 | Leybold Ag | Zweistufige kryopumpe |
DE9111236U1 (de) * | 1991-09-10 | 1992-07-09 | Leybold AG, 6450 Hanau | Kryopumpe |
WO1994000212A1 (fr) * | 1992-06-24 | 1994-01-06 | Extek Cryogenics Inc. | Pompe cryogenique |
JPH10184541A (ja) * | 1996-12-27 | 1998-07-14 | Anelva Corp | 真空排気装置 |
US6122921A (en) * | 1999-01-19 | 2000-09-26 | Applied Materials, Inc. | Shield to prevent cryopump charcoal array from shedding during cryo-regeneration |
US7037083B2 (en) * | 2003-01-08 | 2006-05-02 | Brooks Automation, Inc. | Radiation shielding coating |
JP6031451B2 (ja) | 2011-02-09 | 2016-11-24 | ブルックス オートメーション インコーポレイテッド | クライオポンプ |
JP2019143537A (ja) * | 2018-02-21 | 2019-08-29 | 住友重機械工業株式会社 | クライオポンプ |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1028734B (de) * | 1957-02-09 | 1958-04-24 | Leybolds Nachfolger E | Vorrichtung zum Verhindern des Einstroemens von Daempfen in Hochvakuumraeume |
US3137551A (en) * | 1959-10-02 | 1964-06-16 | John T Mark | Ultra high vacuum device |
US3095494A (en) * | 1960-02-25 | 1963-06-25 | New York Air Brake Co | Ultra high vacuum device |
US3122896A (en) * | 1962-10-31 | 1964-03-03 | Cryovac Inc | Pump heat radiation shield |
US3252652A (en) * | 1963-01-24 | 1966-05-24 | Bendix Balzers Vacuum Inc | Process and apparatus for the production of high vacuums |
NL6408166A (fr) * | 1964-07-17 | 1966-01-18 | ||
US3360949A (en) * | 1965-09-20 | 1968-01-02 | Air Reduction | Cryopumping configuration |
US3338063A (en) * | 1966-01-17 | 1967-08-29 | 500 Inc | Cryopanels for cryopumps and cryopumps incorporating them |
US3485054A (en) * | 1966-10-27 | 1969-12-23 | Cryogenic Technology Inc | Rapid pump-down vacuum chambers incorporating cryopumps |
DE1816981A1 (de) * | 1968-01-02 | 1969-08-21 | Internat Res & Dev Company Ltd | Kryogenpumpe |
FR1587077A (fr) * | 1968-08-01 | 1970-03-13 | ||
GB1287733A (en) * | 1968-08-29 | 1972-09-06 | Int Research & Dev Co Ltd | Improvements in and relating to cryogenic pumps |
FR2114039A5 (fr) * | 1970-11-13 | 1972-06-30 | Air Liquide | |
DE2455712A1 (de) * | 1974-11-25 | 1976-08-12 | Eckhard Kellner | Cryo-sorptionspumpe |
-
1976
- 1976-05-11 DE DE2620880A patent/DE2620880C2/de not_active Expired
-
1977
- 1977-04-25 GB GB17136/77A patent/GB1531378A/en not_active Expired
- 1977-05-04 US US05/793,488 patent/US4121430A/en not_active Expired - Lifetime
- 1977-05-10 CH CH585077A patent/CH618502A5/de not_active IP Right Cessation
- 1977-05-11 FR FR7714412A patent/FR2351283A1/fr active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2391376A1 (fr) * | 1977-05-16 | 1978-12-15 | Air Prod & Chem | Appareil de pompage cryoscopique |
FR2533637A1 (fr) * | 1982-09-29 | 1984-03-30 | Cvi Inc | Pompe cryogenique |
Also Published As
Publication number | Publication date |
---|---|
FR2351283B3 (fr) | 1981-01-16 |
DE2620880C2 (de) | 1984-07-12 |
US4121430B1 (fr) | 1986-10-14 |
DE2620880A1 (de) | 1977-11-24 |
US4121430A (en) | 1978-10-24 |
GB1531378A (en) | 1978-11-08 |
CH618502A5 (fr) | 1980-07-31 |
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