FR2310481A1 - Perfectionnements aux pompes turbomoleculaires - Google Patents
Perfectionnements aux pompes turbomoleculairesInfo
- Publication number
- FR2310481A1 FR2310481A1 FR7606594A FR7606594A FR2310481A1 FR 2310481 A1 FR2310481 A1 FR 2310481A1 FR 7606594 A FR7606594 A FR 7606594A FR 7606594 A FR7606594 A FR 7606594A FR 2310481 A1 FR2310481 A1 FR 2310481A1
- Authority
- FR
- France
- Prior art keywords
- cover
- blades
- turbomolecular pump
- circumferential ribs
- stators
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/06—Lubrication
- F04D29/063—Lubrication specially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT6814875A IT1032818B (it) | 1975-05-06 | 1975-05-06 | Perfezionamento alle pompe turbomo lecolari |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2310481A1 true FR2310481A1 (fr) | 1976-12-03 |
FR2310481B3 FR2310481B3 (fr) | 1978-12-15 |
Family
ID=11308167
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7606594A Granted FR2310481A1 (fr) | 1975-05-06 | 1976-02-27 | Perfectionnements aux pompes turbomoleculaires |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE2549700A1 (fr) |
FR (1) | FR2310481A1 (fr) |
IT (1) | IT1032818B (fr) |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2446934A1 (fr) * | 1979-01-19 | 1980-08-14 | Cit Alcatel | Pompe rotative a vide eleve |
FR2492475A1 (fr) * | 1980-10-17 | 1982-04-23 | Leybold Heraeus Gmbh & Co Kg | Procede pour assembler une pompe a vide turbomoleculaire a simple flux et pompe ainsi assemblee |
US4512725A (en) * | 1982-02-16 | 1985-04-23 | Compagnie Industrielle Des Telecommunications Cit-Alcatel | Rotary vacuum pump |
EP0220581A1 (fr) * | 1985-10-24 | 1987-05-06 | Leybold-Heraeus GmbH | Pompe à vide avec carter et rotor |
EP0228040A1 (fr) * | 1985-12-27 | 1987-07-08 | Hitachi, Ltd. | Pompe à vide |
US4732529A (en) * | 1984-02-29 | 1988-03-22 | Shimadzu Corporation | Turbomolecular pump |
EP0280984A1 (fr) * | 1987-02-25 | 1988-09-07 | Alcatel Cit | Pompe à vide, rotative |
US5160250A (en) * | 1988-07-13 | 1992-11-03 | Osaka Vacuum, Ltd. | Vacuum pump with a peripheral groove pump unit |
US5221179A (en) * | 1988-07-13 | 1993-06-22 | Osaka Vacuum, Ltd. | Vacuum pump |
US5344282A (en) * | 1991-12-04 | 1994-09-06 | The Boc Group, Plc | Molecular drag type vacuum pump |
WO2000020762A1 (fr) * | 1998-10-07 | 2000-04-13 | Leybold Vakuum Gmbh | Pompe a vide a friction avec stator et rotor |
WO2000020763A1 (fr) * | 1998-10-07 | 2000-04-13 | Leybold Vakuum Gmbh | Pompe a vide a friction |
EP2060795A3 (fr) * | 2007-11-15 | 2013-11-06 | Pfeiffer Vacuum GmbH | Pompe à vide |
EP2740956A3 (fr) * | 2012-12-05 | 2015-07-08 | Pfeiffer Vacuum GmbH | Dispositif de lubrification pour un palier à roulement |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE9013672U1 (fr) * | 1990-09-29 | 1992-01-30 | Leybold Ag, 6450 Hanau, De | |
US6589009B1 (en) * | 1997-06-27 | 2003-07-08 | Ebara Corporation | Turbo-molecular pump |
US6332752B2 (en) | 1997-06-27 | 2001-12-25 | Ebara Corporation | Turbo-molecular pump |
DE19915983A1 (de) | 1999-04-09 | 2000-10-12 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit Gaslagerung |
GB0309830D0 (en) | 2003-04-29 | 2003-06-04 | Boc Group Plc | A vacuum pump |
DE202011002794U1 (de) * | 2011-02-16 | 2012-06-06 | Oerlikon Leybold Vacuum Gmbh | Lageranordnung für schnell drehende Wellen von Vakuumpumpen |
-
1975
- 1975-05-06 IT IT6814875A patent/IT1032818B/it active
- 1975-11-06 DE DE19752549700 patent/DE2549700A1/de active Pending
-
1976
- 1976-02-27 FR FR7606594A patent/FR2310481A1/fr active Granted
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2446934A1 (fr) * | 1979-01-19 | 1980-08-14 | Cit Alcatel | Pompe rotative a vide eleve |
FR2492475A1 (fr) * | 1980-10-17 | 1982-04-23 | Leybold Heraeus Gmbh & Co Kg | Procede pour assembler une pompe a vide turbomoleculaire a simple flux et pompe ainsi assemblee |
US4512725A (en) * | 1982-02-16 | 1985-04-23 | Compagnie Industrielle Des Telecommunications Cit-Alcatel | Rotary vacuum pump |
US4732529A (en) * | 1984-02-29 | 1988-03-22 | Shimadzu Corporation | Turbomolecular pump |
EP0220581A1 (fr) * | 1985-10-24 | 1987-05-06 | Leybold-Heraeus GmbH | Pompe à vide avec carter et rotor |
EP0228040A1 (fr) * | 1985-12-27 | 1987-07-08 | Hitachi, Ltd. | Pompe à vide |
US4734018A (en) * | 1985-12-27 | 1988-03-29 | Hitachi, Ltd. | Vacuum pump with plural labyrinth seal portions |
FR2611819A1 (fr) * | 1987-02-25 | 1988-09-09 | Cit Alcatel | Pompe a vide, rotative |
EP0280984A1 (fr) * | 1987-02-25 | 1988-09-07 | Alcatel Cit | Pompe à vide, rotative |
US4808067A (en) * | 1987-02-25 | 1989-02-28 | Alcatel Cit | Rotary vacuum pump |
US5160250A (en) * | 1988-07-13 | 1992-11-03 | Osaka Vacuum, Ltd. | Vacuum pump with a peripheral groove pump unit |
US5221179A (en) * | 1988-07-13 | 1993-06-22 | Osaka Vacuum, Ltd. | Vacuum pump |
US5344282A (en) * | 1991-12-04 | 1994-09-06 | The Boc Group, Plc | Molecular drag type vacuum pump |
WO2000020762A1 (fr) * | 1998-10-07 | 2000-04-13 | Leybold Vakuum Gmbh | Pompe a vide a friction avec stator et rotor |
WO2000020763A1 (fr) * | 1998-10-07 | 2000-04-13 | Leybold Vakuum Gmbh | Pompe a vide a friction |
US6619911B1 (en) | 1998-10-07 | 2003-09-16 | Leybold Vakuum Gmbh | Friction vacuum pump with a stator and a rotor |
US6641376B1 (en) | 1998-10-07 | 2003-11-04 | Leybold Vakuum Gmbh | Friction vacuum pump |
EP2060795A3 (fr) * | 2007-11-15 | 2013-11-06 | Pfeiffer Vacuum GmbH | Pompe à vide |
EP2740956A3 (fr) * | 2012-12-05 | 2015-07-08 | Pfeiffer Vacuum GmbH | Dispositif de lubrification pour un palier à roulement |
Also Published As
Publication number | Publication date |
---|---|
DE2549700A1 (de) | 1976-11-18 |
IT1032818B (it) | 1979-06-20 |
FR2310481B3 (fr) | 1978-12-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |