FR2306736A1 - Appareil pour produire des monocristaux - Google Patents

Appareil pour produire des monocristaux

Info

Publication number
FR2306736A1
FR2306736A1 FR7610115A FR7610115A FR2306736A1 FR 2306736 A1 FR2306736 A1 FR 2306736A1 FR 7610115 A FR7610115 A FR 7610115A FR 7610115 A FR7610115 A FR 7610115A FR 2306736 A1 FR2306736 A1 FR 2306736A1
Authority
FR
France
Prior art keywords
single crystals
producing single
producing
crystals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7610115A
Other languages
English (en)
French (fr)
Other versions
FR2306736B1 (de
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2306736A1 publication Critical patent/FR2306736A1/fr
Application granted granted Critical
Publication of FR2306736B1 publication Critical patent/FR2306736B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C30B13/285—Crystal holders, e.g. chucks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR7610115A 1975-04-11 1976-04-07 Appareil pour produire des monocristaux Granted FR2306736A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752515850 DE2515850C3 (de) 1975-04-11 1975-04-11 Vorrichtung zum Stützen des Kristallstabs beim tiegellosen Zonenschmelzen

Publications (2)

Publication Number Publication Date
FR2306736A1 true FR2306736A1 (fr) 1976-11-05
FR2306736B1 FR2306736B1 (de) 1980-05-16

Family

ID=5943609

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7610115A Granted FR2306736A1 (fr) 1975-04-11 1976-04-07 Appareil pour produire des monocristaux

Country Status (6)

Country Link
JP (1) JPS51133106A (de)
BE (1) BE840605A (de)
DE (1) DE2515850C3 (de)
FR (1) FR2306736A1 (de)
GB (1) GB1478006A (de)
IT (1) IT1059583B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0288639A1 (de) * 1987-04-27 1988-11-02 Shin-Etsu Handotai Company Limited Vorrichtung zum Stützen eines Halbleiterkristallstabes

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK371977A (da) * 1977-08-22 1979-02-23 Topsil As Fremgangsmaade og apparat til raffinering af halvledermateriale
JPH06286764A (ja) * 1992-10-29 1994-10-11 Piyasu Kk 歯科用クレンザー及びブローチ並びにリーマー及びファイルの包装方法
DE19621351A1 (de) * 1996-05-28 1997-12-04 Leybold Systems Gmbh Kristallhaltevorrichtung
CN105177697B (zh) * 2015-10-19 2023-04-14 天津中环领先材料技术有限公司 一种用于区熔硅单晶炉单晶夹持系统的夹持装置
CN115042104B (zh) * 2022-06-08 2023-07-25 江西匀晶光电技术有限公司 一种用于单晶立放极化的夹持装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1281981A (fr) * 1959-12-31 1962-01-19 Siemens Ag Dispositif-support pour maintenir des matériaux semi-conducteurs en forme de barreaux dans des installations de fusion par zones sans creuset
DE1215110B (de) * 1961-08-14 1966-04-28 Siemens Ag Vorrichtung zum Einspannen des Endes eines Stabes bei Apparaturen zum tiegellosen Zonenschmelzen
DE1519901A1 (de) * 1966-09-23 1970-02-12 Siemens Ag Verfahren zum tiegelfreien Zonenschmelzen eines kristallinen Stabes

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1281981A (fr) * 1959-12-31 1962-01-19 Siemens Ag Dispositif-support pour maintenir des matériaux semi-conducteurs en forme de barreaux dans des installations de fusion par zones sans creuset
DE1215110B (de) * 1961-08-14 1966-04-28 Siemens Ag Vorrichtung zum Einspannen des Endes eines Stabes bei Apparaturen zum tiegellosen Zonenschmelzen
DE1519901A1 (de) * 1966-09-23 1970-02-12 Siemens Ag Verfahren zum tiegelfreien Zonenschmelzen eines kristallinen Stabes

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0288639A1 (de) * 1987-04-27 1988-11-02 Shin-Etsu Handotai Company Limited Vorrichtung zum Stützen eines Halbleiterkristallstabes
US4886647A (en) * 1987-04-27 1989-12-12 Shin-Etsu Handotai Co., Ltd. Supporting apparatus for semiconductor crystal rod

Also Published As

Publication number Publication date
IT1059583B (it) 1982-06-21
GB1478006A (en) 1977-06-29
JPS51133106A (en) 1976-11-18
BE840605A (fr) 1976-10-11
JPS5750754B2 (de) 1982-10-28
DE2515850A1 (de) 1976-10-21
DE2515850C3 (de) 1980-04-24
FR2306736B1 (de) 1980-05-16
DE2515850B2 (de) 1979-08-16

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Legal Events

Date Code Title Description
ST Notification of lapse