GB1478006A - Apparatus for growing monocrystals - Google Patents

Apparatus for growing monocrystals

Info

Publication number
GB1478006A
GB1478006A GB1491876A GB1491876A GB1478006A GB 1478006 A GB1478006 A GB 1478006A GB 1491876 A GB1491876 A GB 1491876A GB 1491876 A GB1491876 A GB 1491876A GB 1478006 A GB1478006 A GB 1478006A
Authority
GB
United Kingdom
Prior art keywords
monocrystal
clamping
clamping elements
april
cylindrical part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1491876A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Publication of GB1478006A publication Critical patent/GB1478006A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C30B13/285—Crystal holders, e.g. chucks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

1478006 Float zone refining apparatus LEYBOLD - HERAEUS - VERWALTUNG GmbH 12 April 1976 [11 April 1975] 14918/76 Heading B1S Apparatus for growing monocrystals by float zone melting of an ingot with a necked seed crystal comprises a means for supporting the cylindrical part of the monocrystal above the neck and below the zone during growth. As shown in Fig. I an embodiment of a suitable support 27 comprises a number of clamping elements 28 located at intervals around the circumference of the monocrystal 18 and at different levels A and B. The clamping elements 28 are supported by rods 24 which can be moved up and down parallel to the crystal axis by cylinder 30 independently of the actuation of the clamping elements. The clamping elements 28 can conveniently be spherical balls held in a conical trough 35, the backing surface of which forms a clamping surface for the balls while the monocrystal 18 forms the other. Due to the conical nature of the backing surface the clamping elements 28 are self adjusting depending on the diameter and surface shape at the contact point of the clamping member. A lifting device (not shown) is located under the clamping elements in order to lift them and so unclamp the monocrystal. Alternative arrangements for the clamping members are described using hydraulically operated plungers or pantograph levers which hold the clamping members and bring them into contact with the cylindrical part of the monocrystal.
GB1491876A 1975-04-11 1976-04-12 Apparatus for growing monocrystals Expired GB1478006A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752515850 DE2515850C3 (en) 1975-04-11 1975-04-11 Device for supporting the crystal rod during crucible-free zone melting

Publications (1)

Publication Number Publication Date
GB1478006A true GB1478006A (en) 1977-06-29

Family

ID=5943609

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1491876A Expired GB1478006A (en) 1975-04-11 1976-04-12 Apparatus for growing monocrystals

Country Status (6)

Country Link
JP (1) JPS51133106A (en)
BE (1) BE840605A (en)
DE (1) DE2515850C3 (en)
FR (1) FR2306736A1 (en)
GB (1) GB1478006A (en)
IT (1) IT1059583B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4886647A (en) * 1987-04-27 1989-12-12 Shin-Etsu Handotai Co., Ltd. Supporting apparatus for semiconductor crystal rod
CN115042104A (en) * 2022-06-08 2022-09-13 江西匀晶光电技术有限公司 Clamping device for vertical polarization of single crystal

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK371977A (en) * 1977-08-22 1979-02-23 Topsil As METHOD AND APPLIANCE FOR REFINING SALMON MATERIAL
JPH06286764A (en) * 1992-10-29 1994-10-11 Piyasu Kk Method for wrapping cleanser, broach, reamer, and file for dental use
DE19621351A1 (en) * 1996-05-28 1997-12-04 Leybold Systems Gmbh Single crystal pulling apparatus
CN105177697B (en) * 2015-10-19 2023-04-14 天津中环领先材料技术有限公司 Clamping device for single crystal clamping system of zone-melting silicon single crystal furnace

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1281981A (en) * 1959-12-31 1962-01-19 Siemens Ag Support device for holding bar-shaped semiconductor materials in crucible-free zone melting plants
DE1215110B (en) * 1961-08-14 1966-04-28 Siemens Ag Device for clamping the end of a rod in apparatus for crucible-free zone melting
DE1519901A1 (en) * 1966-09-23 1970-02-12 Siemens Ag Method for crucible-free zone melting of a crystalline rod

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4886647A (en) * 1987-04-27 1989-12-12 Shin-Etsu Handotai Co., Ltd. Supporting apparatus for semiconductor crystal rod
CN115042104A (en) * 2022-06-08 2022-09-13 江西匀晶光电技术有限公司 Clamping device for vertical polarization of single crystal
CN115042104B (en) * 2022-06-08 2023-07-25 江西匀晶光电技术有限公司 Clamping device for single crystal vertical polarization

Also Published As

Publication number Publication date
DE2515850A1 (en) 1976-10-21
IT1059583B (en) 1982-06-21
JPS5750754B2 (en) 1982-10-28
DE2515850B2 (en) 1979-08-16
FR2306736A1 (en) 1976-11-05
BE840605A (en) 1976-10-11
DE2515850C3 (en) 1980-04-24
FR2306736B1 (en) 1980-05-16
JPS51133106A (en) 1976-11-18

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee