GB1478006A - Apparatus for growing monocrystals - Google Patents
Apparatus for growing monocrystalsInfo
- Publication number
- GB1478006A GB1478006A GB1491876A GB1491876A GB1478006A GB 1478006 A GB1478006 A GB 1478006A GB 1491876 A GB1491876 A GB 1491876A GB 1491876 A GB1491876 A GB 1491876A GB 1478006 A GB1478006 A GB 1478006A
- Authority
- GB
- United Kingdom
- Prior art keywords
- monocrystal
- clamping
- clamping elements
- april
- cylindrical part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
- C30B13/285—Crystal holders, e.g. chucks
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
1478006 Float zone refining apparatus LEYBOLD - HERAEUS - VERWALTUNG GmbH 12 April 1976 [11 April 1975] 14918/76 Heading B1S Apparatus for growing monocrystals by float zone melting of an ingot with a necked seed crystal comprises a means for supporting the cylindrical part of the monocrystal above the neck and below the zone during growth. As shown in Fig. I an embodiment of a suitable support 27 comprises a number of clamping elements 28 located at intervals around the circumference of the monocrystal 18 and at different levels A and B. The clamping elements 28 are supported by rods 24 which can be moved up and down parallel to the crystal axis by cylinder 30 independently of the actuation of the clamping elements. The clamping elements 28 can conveniently be spherical balls held in a conical trough 35, the backing surface of which forms a clamping surface for the balls while the monocrystal 18 forms the other. Due to the conical nature of the backing surface the clamping elements 28 are self adjusting depending on the diameter and surface shape at the contact point of the clamping member. A lifting device (not shown) is located under the clamping elements in order to lift them and so unclamp the monocrystal. Alternative arrangements for the clamping members are described using hydraulically operated plungers or pantograph levers which hold the clamping members and bring them into contact with the cylindrical part of the monocrystal.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19752515850 DE2515850C3 (en) | 1975-04-11 | 1975-04-11 | Device for supporting the crystal rod during crucible-free zone melting |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1478006A true GB1478006A (en) | 1977-06-29 |
Family
ID=5943609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1491876A Expired GB1478006A (en) | 1975-04-11 | 1976-04-12 | Apparatus for growing monocrystals |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS51133106A (en) |
BE (1) | BE840605A (en) |
DE (1) | DE2515850C3 (en) |
FR (1) | FR2306736A1 (en) |
GB (1) | GB1478006A (en) |
IT (1) | IT1059583B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4886647A (en) * | 1987-04-27 | 1989-12-12 | Shin-Etsu Handotai Co., Ltd. | Supporting apparatus for semiconductor crystal rod |
CN115042104A (en) * | 2022-06-08 | 2022-09-13 | 江西匀晶光电技术有限公司 | Clamping device for vertical polarization of single crystal |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DK371977A (en) * | 1977-08-22 | 1979-02-23 | Topsil As | METHOD AND APPLIANCE FOR REFINING SALMON MATERIAL |
JPH06286764A (en) * | 1992-10-29 | 1994-10-11 | Piyasu Kk | Method for wrapping cleanser, broach, reamer, and file for dental use |
DE19621351A1 (en) * | 1996-05-28 | 1997-12-04 | Leybold Systems Gmbh | Single crystal pulling apparatus |
CN105177697B (en) * | 2015-10-19 | 2023-04-14 | 天津中环领先材料技术有限公司 | Clamping device for single crystal clamping system of zone-melting silicon single crystal furnace |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1281981A (en) * | 1959-12-31 | 1962-01-19 | Siemens Ag | Support device for holding bar-shaped semiconductor materials in crucible-free zone melting plants |
DE1215110B (en) * | 1961-08-14 | 1966-04-28 | Siemens Ag | Device for clamping the end of a rod in apparatus for crucible-free zone melting |
DE1519901A1 (en) * | 1966-09-23 | 1970-02-12 | Siemens Ag | Method for crucible-free zone melting of a crystalline rod |
-
1975
- 1975-04-11 DE DE19752515850 patent/DE2515850C3/en not_active Expired
-
1976
- 1976-04-06 IT IT2198076A patent/IT1059583B/en active
- 1976-04-07 FR FR7610115A patent/FR2306736A1/en active Granted
- 1976-04-09 BE BE166034A patent/BE840605A/en not_active IP Right Cessation
- 1976-04-12 GB GB1491876A patent/GB1478006A/en not_active Expired
- 1976-04-12 JP JP4116976A patent/JPS51133106A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4886647A (en) * | 1987-04-27 | 1989-12-12 | Shin-Etsu Handotai Co., Ltd. | Supporting apparatus for semiconductor crystal rod |
CN115042104A (en) * | 2022-06-08 | 2022-09-13 | 江西匀晶光电技术有限公司 | Clamping device for vertical polarization of single crystal |
CN115042104B (en) * | 2022-06-08 | 2023-07-25 | 江西匀晶光电技术有限公司 | Clamping device for single crystal vertical polarization |
Also Published As
Publication number | Publication date |
---|---|
DE2515850A1 (en) | 1976-10-21 |
IT1059583B (en) | 1982-06-21 |
JPS5750754B2 (en) | 1982-10-28 |
DE2515850B2 (en) | 1979-08-16 |
FR2306736A1 (en) | 1976-11-05 |
BE840605A (en) | 1976-10-11 |
DE2515850C3 (en) | 1980-04-24 |
FR2306736B1 (en) | 1980-05-16 |
JPS51133106A (en) | 1976-11-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |