FR2302286A1 - Creuset en nitrure de bore pyrolytique et son procede de realisation - Google Patents

Creuset en nitrure de bore pyrolytique et son procede de realisation

Info

Publication number
FR2302286A1
FR2302286A1 FR7605450A FR7605450A FR2302286A1 FR 2302286 A1 FR2302286 A1 FR 2302286A1 FR 7605450 A FR7605450 A FR 7605450A FR 7605450 A FR7605450 A FR 7605450A FR 2302286 A1 FR2302286 A1 FR 2302286A1
Authority
FR
France
Prior art keywords
realization
boron nitride
pyrolytic boron
nitride crucible
crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7605450A
Other languages
English (en)
Other versions
FR2302286B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Union Carbide Corp
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Publication of FR2302286A1 publication Critical patent/FR2302286A1/fr
Application granted granted Critical
Publication of FR2302286B1 publication Critical patent/FR2302286B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/583—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on boron nitride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Ceramic Products (AREA)
  • Laminated Bodies (AREA)
  • Manufacturing Of Tubular Articles Or Embedded Moulded Articles (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
FR7605450A 1975-02-27 1976-02-26 Creuset en nitrure de bore pyrolytique et son procede de realisation Granted FR2302286A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/553,814 US3986822A (en) 1975-02-27 1975-02-27 Boron nitride crucible

Publications (2)

Publication Number Publication Date
FR2302286A1 true FR2302286A1 (fr) 1976-09-24
FR2302286B1 FR2302286B1 (fr) 1980-04-30

Family

ID=24210865

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7605450A Granted FR2302286A1 (fr) 1975-02-27 1976-02-26 Creuset en nitrure de bore pyrolytique et son procede de realisation

Country Status (7)

Country Link
US (1) US3986822A (fr)
JP (2) JPS5544154B2 (fr)
CA (1) CA1073659A (fr)
DE (1) DE2607756C3 (fr)
FR (1) FR2302286A1 (fr)
GB (1) GB1526003A (fr)
IT (1) IT1057254B (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2414078A1 (fr) * 1978-01-10 1979-08-03 Union Carbide Corp Nacelle pour evaporation sous vide de metaux et son procede de realisation
EP1127961A1 (fr) * 2000-02-17 2001-08-29 Shin-Etsu Chemical Co., Ltd. Recipient double en nitrure de bore et mé thode poiur sa fabrication

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61201607A (ja) * 1985-02-28 1986-09-06 Denki Kagaku Kogyo Kk 熱分解窒化ホウ素物品およびその製造方法
JPS61236655A (ja) * 1985-04-13 1986-10-21 電気化学工業株式会社 熱分解窒化ホウ素物品およびその製法
US4773852A (en) * 1985-06-11 1988-09-27 Denki Kagaku Kogyo Kabushiki Kaisha Pyrolytic boron nitride crucible and method for producing the same
JPS6236009A (ja) * 1985-08-05 1987-02-17 Hitachi Metals Ltd 熱分解型窒化硼素
JPS6272505A (ja) * 1985-09-26 1987-04-03 Denki Kagaku Kogyo Kk 熱分解窒化ほう素製器物の製造法
DE8813227U1 (de) * 1988-10-21 1989-01-12 SK-Sonderkeramik GmbH & Co. KG Ulrich Goetz Dipl. Ing. (FH), 8959 Buching Keramische Verdampfer
US4977103A (en) * 1989-08-24 1990-12-11 At&T Bell Laboratories Method of making an article comprising a III/V semiconductor device
US5075055A (en) * 1990-06-06 1991-12-24 Union Carbide Coatings Service Technology Corporation Process for producing a boron nitride crucible
US5158750A (en) * 1990-06-06 1992-10-27 Praxair S.T. Technology, Inc. Boron nitride crucible
US8747554B2 (en) * 2006-06-20 2014-06-10 Momentive Performance Materials Inc. Multi-piece ceramic crucible and method for making thereof
RU2365842C1 (ru) * 2008-08-26 2009-08-27 ЗАО "Научное и технологическое оборудование" Тигель для испарения алюминия в процессе молекулярно-пучковой эпитаксии
US20120304762A1 (en) * 2011-06-03 2012-12-06 Xu Caixuan Method for making a pyrolytic boron nitride article
CN106381476A (zh) * 2016-09-20 2017-02-08 广东先导稀材股份有限公司 一种热解氮化硼坩埚及其制备方法
CN108411280A (zh) * 2018-04-04 2018-08-17 博宇（天津）半导体材料有限公司 一种多层坩埚及其制造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3063865A (en) * 1957-06-03 1962-11-13 Nat Steel Corp Process of treating a boron nitride crucible with molten aluminum
US3152006A (en) * 1961-06-29 1964-10-06 High Temperature Materials Inc Boron nitride coating and a process of producing the same
FR1539247A (fr) * 1966-09-28 1968-09-13 Raytheon Co Nitrure de bore isotrope et son procédé de préparation
FR2014148A1 (fr) * 1968-05-31 1970-04-17 Varian Associates
US3692566A (en) * 1970-11-24 1972-09-19 Us Army Method of depositing isotropic boron nitride

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3227431A (en) * 1961-11-22 1966-01-04 Nat Res Corp Crucible externally lined with filamentary carbon
DE1621011A1 (de) * 1967-04-13 1971-04-29 Telefunken Patent Verfahren zum Oberflaechenvergueten von Bauteilen
US3649734A (en) * 1971-01-29 1972-03-14 Motorola Inc Crucible electron beam evaporation of aluminum
US3724996A (en) * 1971-03-12 1973-04-03 Union Carbide Corp Boron nitride containing vessel having a surface coating of zirconium silicon
US3734480A (en) * 1972-02-08 1973-05-22 Us Navy Lamellar crucible for induction melting titanium

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3063865A (en) * 1957-06-03 1962-11-13 Nat Steel Corp Process of treating a boron nitride crucible with molten aluminum
US3152006A (en) * 1961-06-29 1964-10-06 High Temperature Materials Inc Boron nitride coating and a process of producing the same
FR1539247A (fr) * 1966-09-28 1968-09-13 Raytheon Co Nitrure de bore isotrope et son procédé de préparation
FR2014148A1 (fr) * 1968-05-31 1970-04-17 Varian Associates
US3692566A (en) * 1970-11-24 1972-09-19 Us Army Method of depositing isotropic boron nitride

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2414078A1 (fr) * 1978-01-10 1979-08-03 Union Carbide Corp Nacelle pour evaporation sous vide de metaux et son procede de realisation
EP1127961A1 (fr) * 2000-02-17 2001-08-29 Shin-Etsu Chemical Co., Ltd. Recipient double en nitrure de bore et mé thode poiur sa fabrication

Also Published As

Publication number Publication date
DE2607756B2 (de) 1979-02-01
JPS5544154B2 (fr) 1980-11-11
IT1057254B (it) 1982-03-10
CA1073659A (fr) 1980-03-18
DE2607756A1 (de) 1976-09-16
JPS5617428B2 (fr) 1981-04-22
GB1526003A (en) 1978-09-27
US3986822A (en) 1976-10-19
FR2302286B1 (fr) 1980-04-30
DE2607756C3 (de) 1979-09-27
JPS55145169A (en) 1980-11-12
JPS51109912A (fr) 1976-09-29

Similar Documents

Publication Publication Date Title
GB2009196B (en) Polycarbosilane process for its prudiction and its use as material for producing silicon carbide
FR2302286A1 (fr) Creuset en nitrure de bore pyrolytique et son procede de realisation
FR2320459A1 (fr) Joint coulissant et son procede de realisation
FR2310216A1 (fr) Motif thermocollant floque et son procede de realisation
FR2339624A1 (fr) Pullulane reticule et son procede de preparation
RO84425A (fr) Procede pour la preparation des derives de pleuromutylinglycosyde
BE869632A (fr) Composition anti-mousse et son procede de preparation
RO79732A (fr) Procede pour la preparation des 7-acylamino-phenylethanolamines
RO73511A (fr) Procede pour la preparation des derives de pyrimidone
GB2012096B (en) Neutron-absorber material comprising boron carbide and process for its manufacture
FR2316327A1 (fr) Flacon de culture et son procede de preparation
RO70677A (fr) Procede pour la preparation des derives de diphenylamine
RO79711A (fr) Procede pour la preparation des derives de 2-ethylamino-4-pyrimidone
FR2312258A1 (fr) Lucknomycine et son procede de preparation
RO77297A (fr) Procede pour la preparation des derives de 3(2-hydroxy-4-substitu)-phenylcycloalkenales et cycloalcanole
FR2303557A1 (fr) Nouvel antibiotique et son procede de preparation
RO76151A (fr) Procede pour la preparation des derives de 2-iminoimidazolidine
RO84586A (fr) Procede pour la preparation des derives de pyrannone
OA05765A (fr) Monocristal de cuivre et son procédé de préparation.
RO70078A (fr) Procede pour la preparation des derives de diphenylamine
RO76867A (fr) Procede pour la preparation des derives de phenoxyalcanolamine
RO81226A (fr) Procede pour la preparation des derives de 5(3)-hydroxypyrazole
RO76166A (fr) Procede pour la preparation des derives d'ergoline
JPS5439024A (en) Process for preparing benzene and xylene
FR2319377A1 (fr) Fortimicine c et son procede de preparation