FR2296504B1 - - Google Patents

Info

Publication number
FR2296504B1
FR2296504B1 FR7536645A FR7536645A FR2296504B1 FR 2296504 B1 FR2296504 B1 FR 2296504B1 FR 7536645 A FR7536645 A FR 7536645A FR 7536645 A FR7536645 A FR 7536645A FR 2296504 B1 FR2296504 B1 FR 2296504B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7536645A
Other languages
French (fr)
Other versions
FR2296504A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2296504A1 publication Critical patent/FR2296504A1/fr
Application granted granted Critical
Publication of FR2296504B1 publication Critical patent/FR2296504B1/fr
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B9/00—Blowing glass; Production of hollow glass articles
    • C03B9/30—Details of blowing glass; Use of materials for the moulds
    • C03B9/32—Giving special shapes to parts of hollow glass articles
    • C03B9/33—Making hollow glass articles with feet or projections; Moulds therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S239/00—Fluid sprinkling, spraying, and diffusing
    • Y10S239/19—Nozzle materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Weting (AREA)
  • Nozzles (AREA)
  • Facsimile Heads (AREA)
FR7536645A 1974-12-31 1975-11-21 Procede de fabrication de buses dans une tranche de silicium et buse correspondant notamment pour imprimante a jet d'encre Granted FR2296504A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US537799A US3921916A (en) 1974-12-31 1974-12-31 Nozzles formed in monocrystalline silicon

Publications (2)

Publication Number Publication Date
FR2296504A1 FR2296504A1 (fr) 1976-07-30
FR2296504B1 true FR2296504B1 (no) 1978-05-12

Family

ID=24144139

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7536645A Granted FR2296504A1 (fr) 1974-12-31 1975-11-21 Procede de fabrication de buses dans une tranche de silicium et buse correspondant notamment pour imprimante a jet d'encre

Country Status (7)

Country Link
US (1) US3921916A (no)
JP (1) JPS5516070B2 (no)
CA (1) CA1037519A (no)
DE (1) DE2555462C2 (no)
FR (1) FR2296504A1 (no)
GB (1) GB1492465A (no)
IT (1) IT1054354B (no)

Families Citing this family (88)

* Cited by examiner, † Cited by third party
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US4007464A (en) * 1975-01-23 1977-02-08 International Business Machines Corporation Ink jet nozzle
US4014029A (en) * 1975-12-31 1977-03-22 International Business Machines Corporation Staggered nozzle array
US4047184A (en) * 1976-01-28 1977-09-06 International Business Machines Corporation Charge electrode array and combination for ink jet printing and method of manufacture
US4106976A (en) * 1976-03-08 1978-08-15 International Business Machines Corporation Ink jet nozzle method of manufacture
US4035812A (en) * 1976-07-12 1977-07-12 The Mead Corporation Ink jet recorder and charge ring plate therefor with reduced deplating current
US4169008A (en) * 1977-06-13 1979-09-25 International Business Machines Corporation Process for producing uniform nozzle orifices in silicon wafers
US4146899A (en) * 1977-10-13 1979-03-27 The Mead Corporation Formed orifice plate for ink jet printing apparatus
US4184925A (en) * 1977-12-19 1980-01-22 The Mead Corporation Solid metal orifice plate for a jet drop recorder
US4239586A (en) * 1979-06-29 1980-12-16 International Business Machines Corporation Etching of multiple holes of uniform size
US4229265A (en) * 1979-08-09 1980-10-21 The Mead Corporation Method for fabricating and the solid metal orifice plate for a jet drop recorder produced thereby
US4430784A (en) * 1980-02-22 1984-02-14 Celanese Corporation Manufacturing process for orifice nozzle devices for ink jet printing apparati
US4282533A (en) * 1980-02-22 1981-08-04 Celanese Corporation Precision orifice nozzle devices for ink jet printing apparati and the process for their manufacture
JPS5764563A (en) * 1980-10-07 1982-04-19 Fuji Xerox Co Ltd Ink particle jet apparatus of multi-nozzle ink jet printer
JPS57182449A (en) * 1981-05-07 1982-11-10 Fuji Xerox Co Ltd Forming method of ink jet multinozzle
JPS57208262A (en) * 1981-06-18 1982-12-21 Ibm Drop-on demand type ink jet printing method
DE3176140D1 (en) * 1981-10-30 1987-05-27 Ibm Deutschland Contact device for the detachable connection of electrical components
US4583690A (en) * 1983-04-05 1986-04-22 Hewlett-Packard Company Anti-wetting in fluid nozzles
US4555062A (en) * 1983-04-05 1985-11-26 Hewlett-Packard Company Anti-wetting in fluid nozzles
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CA1237020A (en) * 1984-10-13 1988-05-24 Herbert A. Waggener Silicon nozzle structure and method of manufacture
US4733823A (en) * 1984-10-15 1988-03-29 At&T Teletype Corporation Silicon nozzle structures and method of manufacture
US4647013A (en) * 1985-02-21 1987-03-03 Ford Motor Company Silicon valve
US4628576A (en) * 1985-02-21 1986-12-16 Ford Motor Company Method for fabricating a silicon valve
US4756508A (en) * 1985-02-21 1988-07-12 Ford Motor Company Silicon valve
US4768751A (en) * 1987-10-19 1988-09-06 Ford Motor Company Silicon micromachined non-elastic flow valves
JPH02502079A (ja) * 1988-03-14 1990-07-12 バクスター、インターナショナル、インコーポレイテッド 固定および可変流量制御機構を有するシステム
US5176360A (en) * 1988-03-14 1993-01-05 Baxter International Inc. Infusor having fixed and variable flow rate control mechanisms
US5014750A (en) * 1988-03-14 1991-05-14 Baxter International Inc. Systems having fixed and variable flow rate control mechanisms
US5009251A (en) * 1988-11-15 1991-04-23 Baxter International, Inc. Fluid flow control
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DE4112150C2 (de) * 1990-09-21 1998-11-19 Bosch Gmbh Robert Lochkörper und Ventil mit Lochkörper
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DE4104019C1 (no) * 1991-02-09 1992-04-23 Robert Bosch Gmbh, 7000 Stuttgart, De
DE69322025T2 (de) * 1992-08-31 1999-06-10 Canon K.K., Tokio/Tokyo Tintenstrahlkopfherstellungsverfahren mittels Bearbeitung durch Ionen und Tintenstrahlkopf
US6007676A (en) * 1992-09-29 1999-12-28 Boehringer Ingelheim International Gmbh Atomizing nozzle and filter and spray generating device
IL107120A (en) * 1992-09-29 1997-09-30 Boehringer Ingelheim Int Atomising nozzle and filter and spray generating device
CA2115819C (en) * 1993-02-17 2000-07-25 Yasuhide Tani Fluid injection nozzle
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DE19515722C1 (de) * 1995-05-03 1996-07-25 Tricumed Gmbh Implantierbare Infusionspumpe
US5908414A (en) * 1995-05-03 1999-06-01 Tricumed Gmbh Implantable infusion pump
US5992769A (en) * 1995-06-09 1999-11-30 The Regents Of The University Of Michigan Microchannel system for fluid delivery
JP3386099B2 (ja) * 1995-07-03 2003-03-10 セイコーエプソン株式会社 インクジェット式記録ヘッド用ノズルプレート、これの製造方法、及びインクジェット式記録ヘッド
FR2736303B1 (fr) * 1995-07-03 1998-08-21 Seiko Epson Corp Tete a jets d'encre et son procede de fabrication
US5658471A (en) * 1995-09-22 1997-08-19 Lexmark International, Inc. Fabrication of thermal ink-jet feed slots in a silicon substrate
US5757400A (en) * 1996-02-01 1998-05-26 Spectra, Inc. High resolution matrix ink jet arrangement
CA2259625A1 (en) 1996-07-08 1998-01-15 Spraychip Systems Corp. Gas-assisted atomizing device
US6352209B1 (en) 1996-07-08 2002-03-05 Corning Incorporated Gas assisted atomizing devices and methods of making gas-assisted atomizing devices
EP0910478A4 (en) * 1996-07-08 1999-09-01 Corning Inc RAYLEIGH BREAKING ATOMIZATION DEVICES AND METHODS OF MANUFACTURING SUCH DEVICES
US5901425A (en) * 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
AU7247198A (en) * 1997-04-18 1998-11-13 Topaz Technologies, Inc. Nozzle plate for an ink jet print head
KR100514711B1 (ko) * 1997-05-14 2005-09-15 세이코 엡슨 가부시키가이샤 분사 장치의 노즐 형성 방법 및 잉크 젯 헤드의 제조 방법
JP3530744B2 (ja) * 1997-07-04 2004-05-24 キヤノン株式会社 インクジェット記録ヘッドの製造方法
DE19742439C1 (de) * 1997-09-26 1998-10-22 Boehringer Ingelheim Int Mikrostrukturiertes Filter
MXPA00006041A (es) * 1997-12-19 2003-09-10 Corning Inc Quemador y metodo para producir hollin de oxido metalico.
EP1876444A3 (en) * 1998-09-17 2008-03-12 Advion BioSciences, Inc. Integrated monolithic microfabricated electrospray and liquid chromatography system and method
US6363606B1 (en) * 1998-10-16 2002-04-02 Agere Systems Guardian Corp. Process for forming integrated structures using three dimensional printing techniques
US6633031B1 (en) 1999-03-02 2003-10-14 Advion Biosciences, Inc. Integrated monolithic microfabricated dispensing nozzle and liquid chromatography-electrospray system and method
JP2001179987A (ja) * 1999-12-22 2001-07-03 Samsung Electro Mech Co Ltd ノズルプレート及びその製造方法
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KR100499118B1 (ko) 2000-02-24 2005-07-04 삼성전자주식회사 단결정 실리콘 웨이퍼를 이용한 일체형 유체 노즐어셈블리 및 그 제작방법
DE10101875B4 (de) * 2001-01-16 2006-05-04 Infineon Technologies Ag Elektronisches Bauteil mit aufeinander gestapelten Halbleiterchips und Verfahren zu seiner Herstellung
JP3881985B2 (ja) * 2001-12-04 2007-02-14 株式会社アトック 石英ガラス製流体送給用単穴ノズル及び石英ガラス製流体送給用多穴バーナヘッド
JP3975272B2 (ja) * 2002-02-21 2007-09-12 独立行政法人産業技術総合研究所 超微細流体ジェット装置
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US8195267B2 (en) 2006-01-26 2012-06-05 Seymour John P Microelectrode with laterally extending platform for reduction of tissue encapsulation
JP4881126B2 (ja) * 2006-10-25 2012-02-22 株式会社東芝 ノズルプレートの製造方法、および液滴吐出ヘッドの製造方法
US8731673B2 (en) * 2007-02-26 2014-05-20 Sapiens Steering Brain Stimulation B.V. Neural interface system
WO2009042212A2 (en) * 2007-09-26 2009-04-02 Aradigm Corporation Impinging jet nozzles in stretched or deformed substrates
WO2009052423A1 (en) * 2007-10-17 2009-04-23 Neuronexus Technologies Three-dimensional system of electrode leads
WO2009052425A1 (en) 2007-10-17 2009-04-23 Neuronexus Technologies Implantable device including a resorbable carrier
US8224417B2 (en) 2007-10-17 2012-07-17 Neuronexus Technologies, Inc. Guide tube for an implantable device system
US8498720B2 (en) * 2008-02-29 2013-07-30 Neuronexus Technologies, Inc. Implantable electrode and method of making the same
US9289142B2 (en) 2008-03-24 2016-03-22 Neuronexus Technologies, Inc. Implantable electrode lead system with a three dimensional arrangement and method of making the same
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EP2349579A4 (en) * 2008-10-31 2014-01-22 Fujifilm Dimatix Inc SHAPES OF A NOZZLE OUTLET
US8197029B2 (en) * 2008-12-30 2012-06-12 Fujifilm Corporation Forming nozzles
CN102665540B (zh) * 2009-10-16 2015-09-09 神经连结科技公司 神经接口系统
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US2665946A (en) * 1951-05-29 1954-01-12 Arthur E Broughton Spray nozzle
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US3742230A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask support substrate

Also Published As

Publication number Publication date
IT1054354B (it) 1981-11-10
JPS5184641A (no) 1976-07-24
DE2555462A1 (de) 1976-07-08
JPS5516070B2 (no) 1980-04-28
CA1037519A (en) 1978-08-29
DE2555462C2 (de) 1982-06-03
FR2296504A1 (fr) 1976-07-30
GB1492465A (en) 1977-11-23
US3921916A (en) 1975-11-25

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Legal Events

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