FR2293713A1 - Procede interferometrique optique de mesure de la deviation de la surface d'une eprouvette sous l'influence des ultrasons - Google Patents

Procede interferometrique optique de mesure de la deviation de la surface d'une eprouvette sous l'influence des ultrasons

Info

Publication number
FR2293713A1
FR2293713A1 FR7537171A FR7537171A FR2293713A1 FR 2293713 A1 FR2293713 A1 FR 2293713A1 FR 7537171 A FR7537171 A FR 7537171A FR 7537171 A FR7537171 A FR 7537171A FR 2293713 A1 FR2293713 A1 FR 2293713A1
Authority
FR
France
Prior art keywords
ultrasound
deviation
influence
measuring
specimen under
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7537171A
Other languages
English (en)
Other versions
FR2293713B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Krautkraemer GmbH and Co
Krautkraemer GmbH
Original Assignee
Krautkraemer GmbH and Co
Krautkraemer GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Krautkraemer GmbH and Co, Krautkraemer GmbH filed Critical Krautkraemer GmbH and Co
Publication of FR2293713A1 publication Critical patent/FR2293713A1/fr
Application granted granted Critical
Publication of FR2293713B1 publication Critical patent/FR2293713B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02854—Length, thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
FR7537171A 1974-12-04 1975-12-04 Procede interferometrique optique de mesure de la deviation de la surface d'une eprouvette sous l'influence des ultrasons Granted FR2293713A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2457253A DE2457253C2 (de) 1974-12-04 1974-12-04 Optisches interferometrisches Verfahren und Vorrichtung zur berührungslosen Messung der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings

Publications (2)

Publication Number Publication Date
FR2293713A1 true FR2293713A1 (fr) 1976-07-02
FR2293713B1 FR2293713B1 (fr) 1981-10-23

Family

ID=5932447

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7537171A Granted FR2293713A1 (fr) 1974-12-04 1975-12-04 Procede interferometrique optique de mesure de la deviation de la surface d'une eprouvette sous l'influence des ultrasons

Country Status (5)

Country Link
US (1) US4046477A (fr)
JP (1) JPS5619561B2 (fr)
DE (1) DE2457253C2 (fr)
FR (1) FR2293713A1 (fr)
GB (1) GB1488536A (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0091826A2 (fr) * 1982-04-14 1983-10-19 The Board Of Trustees Of The Leland Stanford Junior University Capteur à fibre optique amélioré pour détecter de très petits déplacements d'une surface
EP0129205A2 (fr) * 1983-06-15 1984-12-27 Hitachi, Ltd. Méthode ultrasonore sans contact pour la détection de défauts
EP0189482A1 (fr) * 1984-05-31 1986-08-06 Matsushita Electric Industrial Co., Ltd. Appareil d'evaluation de forme
US4652744A (en) * 1982-04-14 1987-03-24 The Board Of Trustees Of The Leland Stanford Junior University Fiber optic sensor for detecting very small displacements of a surface

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2707968C2 (de) * 1977-02-24 1984-12-13 Krautkrämer GmbH, 5000 Köln Verfahren zum Empfang von Ultraschallwellen unter einem vorbestimmten Auftreffwinkel
DE2709686C2 (de) * 1977-03-05 1982-09-09 Krautkrämer, GmbH, 5000 Köln Optisches interferometrisches Verfahren zur berührungslosen Messung der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings
DE2710638C2 (de) * 1977-03-11 1984-10-11 Krautkrämer GmbH, 5000 Köln Vorrichtung zum berührungslosen optischen Empfang von Ultraschallwellen in der zerstörungsfreien Werkstoffprüfung
US4338822A (en) * 1978-06-20 1982-07-13 Sumitomo Metal Industries, Ltd. Method and apparatus for non-contact ultrasonic flaw detection
US4267732A (en) * 1978-11-29 1981-05-19 Stanford University Board Of Trustees Acoustic microscope and method
DE2918384C2 (de) * 1979-05-08 1984-03-22 Krautkrämer GmbH, 5000 Köln Verfahren zum optischen Empfang von Ultraschallwellen
US4280764A (en) * 1980-02-21 1981-07-28 The United States Of America As Represented By The Secretary Of The Navy Phase-conjugate interferometer
DE3016879C2 (de) * 1980-05-02 1982-12-30 Krautkrämer, GmbH, 5000 Köln Verfahren und Vorrichtung zur zerstörungsfreien Ultraschall-Werkstoffprüfung
US4339199A (en) * 1980-07-07 1982-07-13 The United States Of America As Represented By The Secretary Of The Army Pulsed laser beam intensity monitor
DE3029776C2 (de) * 1980-08-06 1983-04-07 Krautkrämer, GmbH, 5000 Köln Verfahren zum berührungslosen Empfang von Ultraschallwellen
DE3029716C2 (de) * 1980-08-06 1985-05-15 Krautkrämer GmbH, 5000 Köln Verfahren und Vorrichtung zur automatischen Aufrechterhaltung einer Justage der Deckung und der relativen Phasenlage von Lichtstrahlen in einem für den Ultraschallempfang benutzten optischen Interferometer
US4474467A (en) * 1981-12-28 1984-10-02 Itek Corporation Wavefront sensor using a surface acoustic wave diffraction grating
JPS58131557A (ja) * 1982-01-12 1983-08-05 Nippon Steel Corp 超音波の非接触測定法
US4512661A (en) * 1982-09-02 1985-04-23 The United States Of America As Represented By The Aministration Of The National Aeronautics And Space Administration Dual differential interferometer
US4567769A (en) * 1984-03-08 1986-02-04 Rockwell International Corporation Contact-free ultrasonic transduction for flaw and acoustic discontinuity detection
US4641527A (en) * 1984-06-04 1987-02-10 Hitachi, Ltd. Inspection method and apparatus for joint junction states
JPS6184505A (ja) * 1984-10-03 1986-04-30 Canon Inc 位置検出装置
US4666308A (en) * 1984-10-30 1987-05-19 Stanford University Method and apparatus for non-destructive testing using acoustic-optic laser probe
US4938597A (en) * 1988-04-21 1990-07-03 Conoco Inc. Light responsive motion sensing device
CA1287388C (fr) * 1988-04-29 1991-08-06 Jean-Pierre Monchalin Detection optique a large bande de mouvements transitoires a partir d'une surface de diffusion
DE3816755C3 (de) * 1988-05-17 1994-09-15 Fraunhofer Ges Forschung Vorrichtung zum berührungslosen Erfassen der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings
JP2718705B2 (ja) * 1988-07-27 1998-02-25 株式会社日立製作所 光音響信号検出方法及びその装置
CA2013406C (fr) * 1990-03-29 1998-06-16 Rene Heon Detection optique du mouvement de la surface d'un objet
JPH0746045B2 (ja) * 1992-09-09 1995-05-17 工業技術院長 スペックル干渉法変形測定方法
US5684592A (en) * 1995-06-07 1997-11-04 Hughes Aircraft Company System and method for detecting ultrasound using time-delay interferometry
JP3695188B2 (ja) * 1998-12-21 2005-09-14 富士ゼロックス株式会社 形状計測装置および形状計測方法
US6628408B1 (en) * 1999-04-15 2003-09-30 Kimberly-Clark Worldwide, Inc. Amplitude measurement for an ultrasonic horn
US6186004B1 (en) * 1999-05-27 2001-02-13 The Regents Of The University Of California Apparatus and method for remote, noninvasive characterization of structures and fluids inside containers
US7286241B2 (en) * 1999-06-24 2007-10-23 Lockheed Martin Corporation System and method for high-speed laser detection of ultrasound
DE19949760A1 (de) * 1999-10-15 2001-04-19 Zeiss Carl Fa Interferometer
US7667851B2 (en) 2001-07-24 2010-02-23 Lockheed Martin Corporation Method and apparatus for using a two-wave mixing ultrasonic detection in rapid scanning applications
US7230719B2 (en) * 2003-12-02 2007-06-12 National University Of Singapore High sensitivity scanning probe system
WO2005094503A2 (fr) * 2004-03-23 2005-10-13 Trustees Of Boston University Caracterisation de materiaux a micro-echelle et nano-ecehlle par production d'onde acoustique avec un laser a modulation en onde entretenue
US7357029B2 (en) * 2004-03-31 2008-04-15 Optometrix, Inc. Thermal-acoustic scanning systems and methods
WO2006072938A1 (fr) * 2005-01-03 2006-07-13 Soreq Nuclear Research Center Procede et appareil de detection d'objets places derriere une barriere opaque
US8392138B2 (en) * 2008-08-08 2013-03-05 The Regents Of The University Of Colorado System and method for correcting sampling errors associated with radiation source tuning rate fluctuations in swept-wavelength interferometry
CN106323191A (zh) * 2015-06-23 2017-01-11 南京理工大学 一种共轭差分法检测柱面镜绝对面形的装置
US9889564B2 (en) 2015-07-08 2018-02-13 Empire Technology Development Llc Stable grasp point selection for robotic grippers with machine vision and ultrasound beam forming
CN105737965B (zh) * 2016-02-29 2018-11-13 莆田学院 一种风力发电机振动检测装置及分析方法
CN106052565A (zh) * 2016-06-12 2016-10-26 天津大学 一种基于分光镜的双光路三维散斑干涉系统
US11815493B2 (en) * 2018-12-20 2023-11-14 Shimadzu Corporation Defect inspection apparatus and defect inspection method

Citations (2)

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US3286582A (en) * 1961-06-29 1966-11-22 Block Engineering Interference technique and apparatus for spectrum analysis
FR2030857A5 (en) * 1969-02-05 1970-11-13 Texas Instruments Inc Spectrometer/interferometer for measuring - the thickness of a film on a substrate

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US3319515A (en) * 1963-08-27 1967-05-16 Du Pont Interferometric optical phase discrimination apparatus
DE1548394B2 (de) * 1966-11-23 1970-12-03 Messerschmi^t-Bölkow-Blohm GmbH, 8000 München Verfahren und Anordnung zur Messung mechanischer Schwingungen
US3503012A (en) * 1967-11-13 1970-03-24 Lockheed Aircraft Corp Optical differential interferometer discriminator for fm to am conversion
US3535024A (en) * 1968-04-04 1970-10-20 Webb James E Interferometer servo system
NL6813608A (fr) * 1968-09-24 1970-03-26
US3633987A (en) * 1970-06-01 1972-01-11 Trw Inc Method of and apparatus for holographically contour mapping of distant objects
US3711823A (en) * 1970-07-27 1973-01-16 American Express Invest Acoustic to optical image converter using an acoustic grating
DE2127483A1 (de) * 1971-06-03 1972-12-14 Leitz Ernst Gmbh Verfahren zur interferentiellen Messung von Langen, Winkeln, Gangunter schieden oder Geschwindigkeiten

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3286582A (en) * 1961-06-29 1966-11-22 Block Engineering Interference technique and apparatus for spectrum analysis
FR2030857A5 (en) * 1969-02-05 1970-11-13 Texas Instruments Inc Spectrometer/interferometer for measuring - the thickness of a film on a substrate

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
EXBK/70 *
NV931/70 *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0091826A2 (fr) * 1982-04-14 1983-10-19 The Board Of Trustees Of The Leland Stanford Junior University Capteur à fibre optique amélioré pour détecter de très petits déplacements d'une surface
EP0091826A3 (en) * 1982-04-14 1985-05-29 The Board Of Trustees Of The Leland Stanford Junior University Improved fiber optic sensor for detecting very small displacements of a surface
US4652744A (en) * 1982-04-14 1987-03-24 The Board Of Trustees Of The Leland Stanford Junior University Fiber optic sensor for detecting very small displacements of a surface
EP0129205A2 (fr) * 1983-06-15 1984-12-27 Hitachi, Ltd. Méthode ultrasonore sans contact pour la détection de défauts
EP0129205A3 (en) * 1983-06-15 1989-04-05 Hitachi, Ltd. Noncontacting ultrasonic flaw detecting method and apparatus therefor
EP0189482A1 (fr) * 1984-05-31 1986-08-06 Matsushita Electric Industrial Co., Ltd. Appareil d'evaluation de forme
EP0189482A4 (fr) * 1984-05-31 1988-09-07 Matsushita Electric Ind Co Ltd Appareil d'evaluation de forme.

Also Published As

Publication number Publication date
DE2457253A1 (de) 1976-06-10
JPS5619561B2 (fr) 1981-05-08
GB1488536A (en) 1977-10-12
DE2457253C2 (de) 1982-09-02
JPS5183549A (fr) 1976-07-22
US4046477A (en) 1977-09-06
FR2293713B1 (fr) 1981-10-23

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Legal Events

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TP Transmission of property
ST Notification of lapse