FR2290658A1 - Capteur de pression - Google Patents

Capteur de pression

Info

Publication number
FR2290658A1
FR2290658A1 FR7533825A FR7533825A FR2290658A1 FR 2290658 A1 FR2290658 A1 FR 2290658A1 FR 7533825 A FR7533825 A FR 7533825A FR 7533825 A FR7533825 A FR 7533825A FR 2290658 A1 FR2290658 A1 FR 2290658A1
Authority
FR
France
Prior art keywords
thick
membrane
strain
sensor
monocrystalline silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7533825A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2290658A1 publication Critical patent/FR2290658A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
FR7533825A 1974-11-06 1975-11-05 Capteur de pression Withdrawn FR2290658A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7414459A NL7414459A (nl) 1974-11-06 1974-11-06 Drukopnemer.

Publications (1)

Publication Number Publication Date
FR2290658A1 true FR2290658A1 (fr) 1976-06-04

Family

ID=19822401

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7533825A Withdrawn FR2290658A1 (fr) 1974-11-06 1975-11-05 Capteur de pression

Country Status (6)

Country Link
JP (1) JPS5169678A (sv)
DE (1) DE2549001A1 (sv)
FR (1) FR2290658A1 (sv)
IT (1) IT1048760B (sv)
NL (1) NL7414459A (sv)
SE (1) SE7512278L (sv)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0059488A1 (en) * 1978-07-21 1982-09-08 Hitachi, Ltd. Capacitive pressure sensor
EP0556009A2 (en) * 1992-02-10 1993-08-18 Lucas Novasensor Inc. Method of producing a buried boss diaphragm structure in silicon and product made thereby

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4191057A (en) * 1978-06-28 1980-03-04 Gould Inc. Inversion layer sprain gauge
JPS5664471A (en) * 1979-10-30 1981-06-01 Toshiba Corp Detector for pressure of semiconductor
JPS5687372A (en) * 1979-12-19 1981-07-15 Hitachi Ltd Semiconductor type measuring diaphragm
DE3004031C2 (de) * 1980-02-05 1990-03-29 Philips Patentverwaltung Gmbh, 2000 Hamburg Druckaufnehmer
DE3108300C2 (de) * 1980-03-06 1986-05-28 Robert Bosch Gmbh, 7000 Stuttgart Druckmeßdose und Verfahren zu deren Herstellung
JPS56133877A (en) * 1980-03-24 1981-10-20 Hitachi Ltd Semiconductor diaphragm type sensor
DE3624240A1 (de) * 1986-07-18 1988-01-28 Vdo Schindling Mechanisch-elektrischer wandler
JPH0691265B2 (ja) * 1986-08-01 1994-11-14 株式会社日立製作所 半導体圧力センサ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0059488A1 (en) * 1978-07-21 1982-09-08 Hitachi, Ltd. Capacitive pressure sensor
EP0556009A2 (en) * 1992-02-10 1993-08-18 Lucas Novasensor Inc. Method of producing a buried boss diaphragm structure in silicon and product made thereby
EP0556009A3 (en) * 1992-02-10 1993-11-10 Lucas Novasensor Inc. Method of producing a buried boss diaphragm structure in silicon and product made thereby

Also Published As

Publication number Publication date
IT1048760B (it) 1980-12-20
JPS5169678A (sv) 1976-06-16
SE7512278L (sv) 1976-05-07
DE2549001A1 (de) 1976-05-13
NL7414459A (nl) 1976-05-10

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Legal Events

Date Code Title Description
ST Notification of lapse