NL7414459A - Drukopnemer. - Google Patents

Drukopnemer.

Info

Publication number
NL7414459A
NL7414459A NL7414459A NL7414459A NL7414459A NL 7414459 A NL7414459 A NL 7414459A NL 7414459 A NL7414459 A NL 7414459A NL 7414459 A NL7414459 A NL 7414459A NL 7414459 A NL7414459 A NL 7414459A
Authority
NL
Netherlands
Prior art keywords
pressure transmitter
transmitter
pressure
Prior art date
Application number
NL7414459A
Other languages
English (en)
Dutch (nl)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL7414459A priority Critical patent/NL7414459A/xx
Priority to JP50132078A priority patent/JPS5169678A/ja
Priority to IT28979/75A priority patent/IT1048760B/it
Priority to SE7512278A priority patent/SE7512278L/sv
Priority to DE19752549001 priority patent/DE2549001A1/de
Priority to FR7533825A priority patent/FR2290658A1/fr
Publication of NL7414459A publication Critical patent/NL7414459A/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
NL7414459A 1974-11-06 1974-11-06 Drukopnemer. NL7414459A (nl)

Priority Applications (6)

Application Number Priority Date Filing Date Title
NL7414459A NL7414459A (nl) 1974-11-06 1974-11-06 Drukopnemer.
JP50132078A JPS5169678A (sv) 1974-11-06 1975-11-01
IT28979/75A IT1048760B (it) 1974-11-06 1975-11-03 Manometro
SE7512278A SE7512278L (sv) 1974-11-06 1975-11-03 Tryckmetare
DE19752549001 DE2549001A1 (de) 1974-11-06 1975-11-03 Druckaufnehmer
FR7533825A FR2290658A1 (fr) 1974-11-06 1975-11-05 Capteur de pression

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7414459A NL7414459A (nl) 1974-11-06 1974-11-06 Drukopnemer.

Publications (1)

Publication Number Publication Date
NL7414459A true NL7414459A (nl) 1976-05-10

Family

ID=19822401

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7414459A NL7414459A (nl) 1974-11-06 1974-11-06 Drukopnemer.

Country Status (6)

Country Link
JP (1) JPS5169678A (sv)
DE (1) DE2549001A1 (sv)
FR (1) FR2290658A1 (sv)
IT (1) IT1048760B (sv)
NL (1) NL7414459A (sv)
SE (1) SE7512278L (sv)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4191057A (en) * 1978-06-28 1980-03-04 Gould Inc. Inversion layer sprain gauge
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
JPS5664471A (en) * 1979-10-30 1981-06-01 Toshiba Corp Detector for pressure of semiconductor
JPS5687372A (en) * 1979-12-19 1981-07-15 Hitachi Ltd Semiconductor type measuring diaphragm
DE3004031C2 (de) * 1980-02-05 1990-03-29 Philips Patentverwaltung Gmbh, 2000 Hamburg Druckaufnehmer
DE3108300C2 (de) * 1980-03-06 1986-05-28 Robert Bosch Gmbh, 7000 Stuttgart Druckmeßdose und Verfahren zu deren Herstellung
JPS56133877A (en) * 1980-03-24 1981-10-20 Hitachi Ltd Semiconductor diaphragm type sensor
DE3624240A1 (de) * 1986-07-18 1988-01-28 Vdo Schindling Mechanisch-elektrischer wandler
JPH0691265B2 (ja) * 1986-08-01 1994-11-14 株式会社日立製作所 半導体圧力センサ
US6140143A (en) * 1992-02-10 2000-10-31 Lucas Novasensor Inc. Method of producing a buried boss diaphragm structure in silicon

Also Published As

Publication number Publication date
DE2549001A1 (de) 1976-05-13
FR2290658A1 (fr) 1976-06-04
IT1048760B (it) 1980-12-20
SE7512278L (sv) 1976-05-07
JPS5169678A (sv) 1976-06-16

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