SE7512278L - Tryckmetare - Google Patents

Tryckmetare

Info

Publication number
SE7512278L
SE7512278L SE7512278A SE7512278A SE7512278L SE 7512278 L SE7512278 L SE 7512278L SE 7512278 A SE7512278 A SE 7512278A SE 7512278 A SE7512278 A SE 7512278A SE 7512278 L SE7512278 L SE 7512278L
Authority
SE
Sweden
Prior art keywords
pressure meter
meter
pressure
Prior art date
Application number
SE7512278A
Other languages
English (en)
Inventor
A C M Gieles
J L Spoormaker
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of SE7512278L publication Critical patent/SE7512278L/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
SE7512278A 1974-11-06 1975-11-03 Tryckmetare SE7512278L (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7414459A NL7414459A (nl) 1974-11-06 1974-11-06 Drukopnemer.

Publications (1)

Publication Number Publication Date
SE7512278L true SE7512278L (sv) 1976-05-07

Family

ID=19822401

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7512278A SE7512278L (sv) 1974-11-06 1975-11-03 Tryckmetare

Country Status (6)

Country Link
JP (1) JPS5169678A (sv)
DE (1) DE2549001A1 (sv)
FR (1) FR2290658A1 (sv)
IT (1) IT1048760B (sv)
NL (1) NL7414459A (sv)
SE (1) SE7512278L (sv)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4191057A (en) * 1978-06-28 1980-03-04 Gould Inc. Inversion layer sprain gauge
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
JPS5664471A (en) * 1979-10-30 1981-06-01 Toshiba Corp Detector for pressure of semiconductor
JPS5687372A (en) * 1979-12-19 1981-07-15 Hitachi Ltd Semiconductor type measuring diaphragm
DE3004031C2 (de) * 1980-02-05 1990-03-29 Philips Patentverwaltung Gmbh, 2000 Hamburg Druckaufnehmer
DE3108300C2 (de) * 1980-03-06 1986-05-28 Robert Bosch Gmbh, 7000 Stuttgart Druckmeßdose und Verfahren zu deren Herstellung
JPS56133877A (en) * 1980-03-24 1981-10-20 Hitachi Ltd Semiconductor diaphragm type sensor
DE3624240A1 (de) * 1986-07-18 1988-01-28 Vdo Schindling Mechanisch-elektrischer wandler
JPH0691265B2 (ja) * 1986-08-01 1994-11-14 株式会社日立製作所 半導体圧力センサ
US6140143A (en) * 1992-02-10 2000-10-31 Lucas Novasensor Inc. Method of producing a buried boss diaphragm structure in silicon

Also Published As

Publication number Publication date
IT1048760B (it) 1980-12-20
JPS5169678A (sv) 1976-06-16
DE2549001A1 (de) 1976-05-13
FR2290658A1 (fr) 1976-06-04
NL7414459A (nl) 1976-05-10

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Legal Events

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NAV Patent application has lapsed

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