FR2263600A1 - Electron beam pattern generator - has target support facility and electron emitter using field-emission process - Google Patents

Electron beam pattern generator - has target support facility and electron emitter using field-emission process

Info

Publication number
FR2263600A1
FR2263600A1 FR7422750A FR7422750A FR2263600A1 FR 2263600 A1 FR2263600 A1 FR 2263600A1 FR 7422750 A FR7422750 A FR 7422750A FR 7422750 A FR7422750 A FR 7422750A FR 2263600 A1 FR2263600 A1 FR 2263600A1
Authority
FR
France
Prior art keywords
target
electron
field
pattern generator
beam pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7422750A
Other languages
English (en)
French (fr)
Other versions
FR2263600B3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RADIANT ENERGY SYSTEMS
Original Assignee
RADIANT ENERGY SYSTEMS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US448283A external-priority patent/US3922546A/en
Application filed by RADIANT ENERGY SYSTEMS filed Critical RADIANT ENERGY SYSTEMS
Publication of FR2263600A1 publication Critical patent/FR2263600A1/fr
Application granted granted Critical
Publication of FR2263600B3 publication Critical patent/FR2263600B3/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
FR7422750A 1974-03-05 1974-06-28 Electron beam pattern generator - has target support facility and electron emitter using field-emission process Granted FR2263600A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US448283A US3922546A (en) 1972-04-14 1974-03-05 Electron beam pattern generator

Publications (2)

Publication Number Publication Date
FR2263600A1 true FR2263600A1 (en) 1975-10-03
FR2263600B3 FR2263600B3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-05-06

Family

ID=23779689

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7422750A Granted FR2263600A1 (en) 1974-03-05 1974-06-28 Electron beam pattern generator - has target support facility and electron emitter using field-emission process

Country Status (7)

Country Link
JP (1) JPS50120095A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2431496A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2263600A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IT (1) IT1015575B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL7408820A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
SE (1) SE7408231L (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
ZA (1) ZA744165B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4084095A (en) * 1977-02-14 1978-04-11 Burroughs Corporation Electron beam column generator for the fabrication of semiconductor devices

Also Published As

Publication number Publication date
JPS50120095A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-09-19
SE7408231L (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-09-08
IT1015575B (it) 1977-05-20
DE2431496A1 (de) 1975-09-11
FR2263600B3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-05-06
NL7408820A (nl) 1975-09-09
ZA744165B (en) 1975-07-30

Similar Documents

Publication Publication Date Title
ES438659A1 (es) Mejoras introducidas en un generador de rayos x.
GB919299A (en) Method and apparatus for the working of material by means of a beam of charge carriers
ES8102413A1 (es) Un tubo de presentacion en color,perfeccionado
FR2263600A1 (en) Electron beam pattern generator - has target support facility and electron emitter using field-emission process
GB1381082A (en) Method and apparatus for selectively exposing a photosensitive surface
ES427182A1 (es) Tubo de rayos catodicos.
US4260893A (en) Device for directing electrically charged particles towards a target
US2969477A (en) Moving target indicator with background compensation for visual light and the near infrared
ES2005280A6 (es) Procedimiento y aparato para corregir la posicion de reposo, no desviada, de un haz de electores.
US2300394A (en) Pulse modulation system
US3497762A (en) Electron beam recording system and apparatus
JPS51142220A (en) Picture receiving device
JPS6415604A (en) Measuring apparatus for length by electron beam
JPS55126849A (en) Analyzer
JPS54138467A (en) Scanning type electron microscope or resembling apparatus
FR2312110A1 (fr) Procede et dispositif de microscopie electronique a modulation d'intensite du faisceau d'electrons primaires
FR2255137A1 (en) Beam control for electron beam welder - has beam focus and stability controlled by periodically deflecting beam
JPS54105970A (en) Electron beam drawing device and its use
JPS54149569A (en) Scanning electron microscope
CA1007360A (en) Device for focussing and deflection of an electron beam in a cathode-ray apparatus
FR2297452A1 (fr) Dispositif de controle de balayage d'une cible par un faisceau de particules
JPS57162333A (en) Exposure of electron beam
JPS5586056A (en) Electron beam character generator
IT1212786B (it) Sali di esteri di acidi idrossibenzensolfonici con la 5-(o-clorobenzil)-4,5,6,7,-tetraidrotieno-[3,2-c] piridina,metodo di preparazione e composizioni farmaceutiche che li compongono
JPS54160176A (en) Electron beam exposure device

Legal Events

Date Code Title Description
ST Notification of lapse