ZA744165B - Electron beam pattern generator - Google Patents
Electron beam pattern generatorInfo
- Publication number
- ZA744165B ZA744165B ZA00744165A ZA744165A ZA744165B ZA 744165 B ZA744165 B ZA 744165B ZA 00744165 A ZA00744165 A ZA 00744165A ZA 744165 A ZA744165 A ZA 744165A ZA 744165 B ZA744165 B ZA 744165B
- Authority
- ZA
- South Africa
- Prior art keywords
- electron beam
- beam pattern
- pattern generator
- generator
- electron
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/302—Controlling tubes by external information, e.g. programme control
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US448283A US3922546A (en) | 1972-04-14 | 1974-03-05 | Electron beam pattern generator |
Publications (1)
Publication Number | Publication Date |
---|---|
ZA744165B true ZA744165B (en) | 1975-07-30 |
Family
ID=23779689
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ZA00744165A ZA744165B (en) | 1974-03-05 | 1974-06-28 | Electron beam pattern generator |
Country Status (7)
Country | Link |
---|---|
JP (1) | JPS50120095A (en) |
DE (1) | DE2431496A1 (en) |
FR (1) | FR2263600A1 (en) |
IT (1) | IT1015575B (en) |
NL (1) | NL7408820A (en) |
SE (1) | SE7408231L (en) |
ZA (1) | ZA744165B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4084095A (en) * | 1977-02-14 | 1978-04-11 | Burroughs Corporation | Electron beam column generator for the fabrication of semiconductor devices |
-
1974
- 1974-06-24 SE SE7408231A patent/SE7408231L/ not_active Application Discontinuation
- 1974-06-28 ZA ZA00744165A patent/ZA744165B/en unknown
- 1974-06-28 FR FR7422750A patent/FR2263600A1/en active Granted
- 1974-07-01 DE DE2431496A patent/DE2431496A1/en active Pending
- 1974-07-01 IT IT24651/74A patent/IT1015575B/en active
- 1974-07-01 JP JP49074384A patent/JPS50120095A/ja active Pending
- 1974-07-01 NL NL7408820A patent/NL7408820A/en unknown
Also Published As
Publication number | Publication date |
---|---|
NL7408820A (en) | 1975-09-09 |
JPS50120095A (en) | 1975-09-19 |
IT1015575B (en) | 1977-05-20 |
FR2263600B3 (en) | 1977-05-06 |
FR2263600A1 (en) | 1975-10-03 |
SE7408231L (en) | 1975-09-08 |
DE2431496A1 (en) | 1975-09-11 |
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