ZA744165B - Electron beam pattern generator - Google Patents

Electron beam pattern generator

Info

Publication number
ZA744165B
ZA744165B ZA00744165A ZA744165A ZA744165B ZA 744165 B ZA744165 B ZA 744165B ZA 00744165 A ZA00744165 A ZA 00744165A ZA 744165 A ZA744165 A ZA 744165A ZA 744165 B ZA744165 B ZA 744165B
Authority
ZA
South Africa
Prior art keywords
electron beam
beam pattern
pattern generator
generator
electron
Prior art date
Application number
ZA00744165A
Inventor
W Livesay
Original Assignee
Radiant Energy Systems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US448283A external-priority patent/US3922546A/en
Application filed by Radiant Energy Systems filed Critical Radiant Energy Systems
Publication of ZA744165B publication Critical patent/ZA744165B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
ZA00744165A 1974-03-05 1974-06-28 Electron beam pattern generator ZA744165B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US448283A US3922546A (en) 1972-04-14 1974-03-05 Electron beam pattern generator

Publications (1)

Publication Number Publication Date
ZA744165B true ZA744165B (en) 1975-07-30

Family

ID=23779689

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA00744165A ZA744165B (en) 1974-03-05 1974-06-28 Electron beam pattern generator

Country Status (7)

Country Link
JP (1) JPS50120095A (en)
DE (1) DE2431496A1 (en)
FR (1) FR2263600A1 (en)
IT (1) IT1015575B (en)
NL (1) NL7408820A (en)
SE (1) SE7408231L (en)
ZA (1) ZA744165B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4084095A (en) * 1977-02-14 1978-04-11 Burroughs Corporation Electron beam column generator for the fabrication of semiconductor devices

Also Published As

Publication number Publication date
NL7408820A (en) 1975-09-09
JPS50120095A (en) 1975-09-19
IT1015575B (en) 1977-05-20
FR2263600B3 (en) 1977-05-06
FR2263600A1 (en) 1975-10-03
SE7408231L (en) 1975-09-08
DE2431496A1 (en) 1975-09-11

Similar Documents

Publication Publication Date Title
JPS5293899A (en) Electron irradiator
JPS51123093A (en) Laser generator
AU7746875A (en) Beams
JPS533774A (en) Electron beam projector
GB1557799A (en) Flat electron beam addressed device
JPS54161263A (en) Electron beam generator
JPS51113107A (en) Generator
JPS5329688A (en) Xxray beam generator
JPS54150997A (en) Electron beam generator
GB1547964A (en) Electron beam deflection arrangements
JPS51114503A (en) Steam generator
AU8204475A (en) Relativistic electron beam device
JPS5682556A (en) Electron beam pattern generator
GB1556405A (en) Electron beam gun
JPS51121711A (en) Generator
JPS5225587A (en) Xxray generator
JPS5259767A (en) Fabric beam
JPS5263784A (en) Electron beam collimater
ZA744165B (en) Electron beam pattern generator
CA1012593A (en) Electrolytic steam generator
JPS5246201A (en) Steam generator
JPS5261990A (en) Laser generator
JPS5222547A (en) Electron beam device
YU187076A (en) Steam generator
JPS52133775A (en) Electron beam carrier