FR2255137A1 - Beam control for electron beam welder - has beam focus and stability controlled by periodically deflecting beam - Google Patents
Beam control for electron beam welder - has beam focus and stability controlled by periodically deflecting beamInfo
- Publication number
- FR2255137A1 FR2255137A1 FR7345530A FR7345530A FR2255137A1 FR 2255137 A1 FR2255137 A1 FR 2255137A1 FR 7345530 A FR7345530 A FR 7345530A FR 7345530 A FR7345530 A FR 7345530A FR 2255137 A1 FR2255137 A1 FR 2255137A1
- Authority
- FR
- France
- Prior art keywords
- focus
- probe
- coils
- welder
- control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 title 1
- 239000000523 sample Substances 0.000 abstract 4
- 230000000737 periodic effect Effects 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K15/00—Electron-beam welding or cutting
- B23K15/02—Control circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
Abstract
An electron gun produces a collimated and accelerated beam of electrons via the collimator and accelerating anode respectively. The beam is focussed onto a workpiece by coils and is deflectable by further coils. A water cooled probe (or a Faraday slit) is positioned adjacent the beam and, by a periodic signal generated as a saw tooth wave by the generator, the beam is periodically deflected across the probe. The dwell time of the beam on the probe is a signal proportional to the dia. of the beam and hence its focus. The current induced in the probe is compared with a reference signal from a generator and the beam focus adjusted accordingly by an operational amplifier acting on the focus coils.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7345530A FR2255137A1 (en) | 1973-12-19 | 1973-12-19 | Beam control for electron beam welder - has beam focus and stability controlled by periodically deflecting beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7345530A FR2255137A1 (en) | 1973-12-19 | 1973-12-19 | Beam control for electron beam welder - has beam focus and stability controlled by periodically deflecting beam |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2255137A1 true FR2255137A1 (en) | 1975-07-18 |
FR2255137B1 FR2255137B1 (en) | 1978-08-11 |
Family
ID=9129462
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7345530A Granted FR2255137A1 (en) | 1973-12-19 | 1973-12-19 | Beam control for electron beam welder - has beam focus and stability controlled by periodically deflecting beam |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2255137A1 (en) |
-
1973
- 1973-12-19 FR FR7345530A patent/FR2255137A1/en active Granted
Also Published As
Publication number | Publication date |
---|---|
FR2255137B1 (en) | 1978-08-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US2473691A (en) | Stabilization of cathode beam tubes | |
US4254340A (en) | High current ion implanter | |
GB1287262A (en) | Improvements in or relating to non-thermionic glow discharge devices | |
GB1005053A (en) | Improvements in or relating to mass spectrometers | |
GB982669A (en) | Improvements in or relating to electron beam generators | |
ES433987A1 (en) | Plural beam cathode ray tube including an astigmatic electron lens and self-converging | |
US4021636A (en) | Beam current control device for a technical corpuscular beam apparatus | |
US3258591A (en) | Pulse type mass spectrometer wherein ions are separated by oscillations in an electrostatic field | |
FR2255137A1 (en) | Beam control for electron beam welder - has beam focus and stability controlled by periodically deflecting beam | |
FR2338595A1 (en) | FEEDBACK CONTROL PROCESS OF ELECTRON BEAM LASERS | |
GB1570314A (en) | Device for scanning a target with a beam of charged particles | |
US4260893A (en) | Device for directing electrically charged particles towards a target | |
GB1494398A (en) | Ion beam apparatus | |
GB1013403A (en) | Improvements in or relating to electron beam generating and deflecting systems | |
ES2005280A6 (en) | Beam position correction device. | |
GB1183751A (en) | Charged Particle Generator with Electromagnetic Current Control. | |
GB959213A (en) | Method and apparatus for the machining of material by means of a beam of charge carriers | |
GB1086578A (en) | A machining method and device using a corpuscular beam | |
JPS56134462A (en) | Electron beam system | |
FR2297452A1 (en) | Electron beam target scanning control - converts intensity of beam on target to current signal displayed on oscilloscope for beam direction control | |
GB948486A (en) | Cathode ray tube system | |
JPS556829A (en) | Electron beam exposure method | |
US3268729A (en) | System of generating pulsed neutrons of narrow pulse width | |
FR2384415A1 (en) | X=Rays directed from ring of targets onto object - by moving electron beam directed onto targets without moving parts | |
FR2314633A1 (en) | Adjustment of directional sensitivity of compressible electrical tape - uses electron beam irradiation to obtain permanent electrical polarisation |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |